AU2666497A - Vertical cavity lasers with monolithically integrated refractive microlenses - Google Patents

Vertical cavity lasers with monolithically integrated refractive microlenses

Info

Publication number
AU2666497A
AU2666497A AU26664/97A AU2666497A AU2666497A AU 2666497 A AU2666497 A AU 2666497A AU 26664/97 A AU26664/97 A AU 26664/97A AU 2666497 A AU2666497 A AU 2666497A AU 2666497 A AU2666497 A AU 2666497A
Authority
AU
Australia
Prior art keywords
vertical cavity
monolithically integrated
cavity lasers
refractive microlenses
integrated refractive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU26664/97A
Inventor
Gerald D. Robinson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WL Gore and Associates Inc
Original Assignee
WL Gore and Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WL Gore and Associates Inc filed Critical WL Gore and Associates Inc
Publication of AU2666497A publication Critical patent/AU2666497A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18386—Details of the emission surface for influencing the near- or far-field, e.g. a grating on the surface
    • H01S5/18388—Lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/0206—Substrates, e.g. growth, shape, material, removal or bonding
    • H01S5/0207—Substrates having a special shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18305—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] with emission through the substrate, i.e. bottom emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4012—Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/42—Arrays of surface emitting lasers
    • H01S5/423—Arrays of surface emitting lasers having a vertical cavity

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
AU26664/97A 1996-04-22 1997-04-14 Vertical cavity lasers with monolithically integrated refractive microlenses Abandoned AU2666497A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US63579896A 1996-04-22 1996-04-22
US08635798 1996-04-22
PCT/US1997/006126 WO1997040558A1 (en) 1996-04-22 1997-04-14 Vertical cavity lasers with monolithically integrated refractive microlenses

Publications (1)

Publication Number Publication Date
AU2666497A true AU2666497A (en) 1997-11-12

Family

ID=24549158

Family Applications (1)

Application Number Title Priority Date Filing Date
AU26664/97A Abandoned AU2666497A (en) 1996-04-22 1997-04-14 Vertical cavity lasers with monolithically integrated refractive microlenses

Country Status (2)

Country Link
AU (1) AU2666497A (en)
WO (1) WO1997040558A1 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6888871B1 (en) * 2000-07-12 2005-05-03 Princeton Optronics, Inc. VCSEL and VCSEL array having integrated microlenses for use in a semiconductor laser pumped solid state laser system
KR100374796B1 (en) * 2001-02-02 2003-03-03 삼성전기주식회사 GaN surface emitting LD comprising spacer for effectively diffusing holes between p type electrode and active layer and method for manufacturing the same
WO2002071104A2 (en) * 2001-03-02 2002-09-12 Innovative Solutions & Support, Inc. Image display generator for a head-up display
FR2824188B1 (en) * 2001-04-25 2003-12-12 Commissariat Energie Atomique OPTICAL DEVICE COMPRISING A PLURALITY OF RESONANT CAVITIES OF DIFFERENT LENGTHS ASSOCIATED WITH DIFFERENT WAVE LENGTHS
KR100472822B1 (en) * 2001-06-02 2005-03-08 전헌수 Vertical cavity surface emitting laser
EP1265327B1 (en) 2001-06-02 2007-11-07 Seoul National University Industry Foundation Vertical cavity surface emitting laser
JP4074498B2 (en) * 2002-09-25 2008-04-09 セイコーエプソン株式会社 Surface emitting light emitting device, optical module, and optical transmission device
AU2003900172A0 (en) * 2003-01-15 2003-01-30 Edith Cowan University Laser array
CN100463234C (en) * 2003-08-01 2009-02-18 厦门市三安光电科技有限公司 Surface anti-reflection light-emitting diode
EP2320215B1 (en) * 2009-11-06 2013-05-01 Axetris AG Semiconductor laser system for gas detection with integrated and thermally controlled beam shaping element
CN105811244A (en) * 2016-04-28 2016-07-27 中国科学院长春光学精密机械与物理研究所 Microlens-integrated high-beam quality semiconductor laser array
CN112753146B (en) * 2018-09-24 2024-07-30 ams传感器亚洲私人有限公司 Improved lighting device
CN109378709B (en) * 2018-12-13 2020-07-17 中国科学院半导体研究所 Flexible VCSE L array device and preparation method thereof
CN111162451A (en) * 2019-12-26 2020-05-15 浙江博升光电科技有限公司 Bottom emitting vertical cavity surface emitting laser

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0214583A (en) * 1988-06-30 1990-01-18 Mitsubishi Electric Corp Manufacture of light emitting element with monolithic lens
JPH0555703A (en) * 1991-05-15 1993-03-05 Fujitsu Ltd Plane emission laser device
JPH05328233A (en) * 1992-05-22 1993-12-10 Hitachi Ltd Solid-state image pickup element

Also Published As

Publication number Publication date
WO1997040558A1 (en) 1997-10-30

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