AU2001252981A1 - Methods of forming aluminum-comprising physical vapor deposition targets; sputtered films; and target constructions - Google Patents

Methods of forming aluminum-comprising physical vapor deposition targets; sputtered films; and target constructions

Info

Publication number
AU2001252981A1
AU2001252981A1 AU2001252981A AU5298101A AU2001252981A1 AU 2001252981 A1 AU2001252981 A1 AU 2001252981A1 AU 2001252981 A AU2001252981 A AU 2001252981A AU 5298101 A AU5298101 A AU 5298101A AU 2001252981 A1 AU2001252981 A1 AU 2001252981A1
Authority
AU
Australia
Prior art keywords
methods
vapor deposition
physical vapor
forming aluminum
sputtered films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001252981A
Inventor
Frank Alford
Stephane Ferrasse
Jianxing Li
Vladimir M. Segal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of AU2001252981A1 publication Critical patent/AU2001252981A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/04—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S72/00—Metal deforming
    • Y10S72/70—Deforming specified alloys or uncommon metal or bimetallic work
AU2001252981A 2000-03-28 2001-03-27 Methods of forming aluminum-comprising physical vapor deposition targets; sputtered films; and target constructions Abandoned AU2001252981A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US19335400P 2000-03-28 2000-03-28
US60193354 2000-03-28
US09783377 2001-02-13
US09/783,377 US20010047838A1 (en) 2000-03-28 2001-02-13 Methods of forming aluminum-comprising physical vapor deposition targets; sputtered films; and target constructions
PCT/US2001/009813 WO2001073156A2 (en) 2000-03-28 2001-03-27 Method of forming aluminum targets

Publications (1)

Publication Number Publication Date
AU2001252981A1 true AU2001252981A1 (en) 2001-10-08

Family

ID=26888912

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001252981A Abandoned AU2001252981A1 (en) 2000-03-28 2001-03-27 Methods of forming aluminum-comprising physical vapor deposition targets; sputtered films; and target constructions

Country Status (8)

Country Link
US (3) US20010047838A1 (en)
EP (1) EP1268873A2 (en)
JP (1) JP2003533589A (en)
KR (1) KR20020092406A (en)
CN (1) CN1432070A (en)
AU (1) AU2001252981A1 (en)
TW (1) TW507014B (en)
WO (1) WO2001073156A2 (en)

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WO2001073156B1 (en) 2002-03-28
US20010047838A1 (en) 2001-12-06
TW507014B (en) 2002-10-21
WO2001073156A3 (en) 2002-02-21
US20020174917A1 (en) 2002-11-28
KR20020092406A (en) 2002-12-11
EP1268873A2 (en) 2003-01-02
CN1432070A (en) 2003-07-23

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