AU2001247889A1 - Apparatus and methods for actively controlling rf peak-to-peak voltage in an inductively coupled plasma etching system - Google Patents

Apparatus and methods for actively controlling rf peak-to-peak voltage in an inductively coupled plasma etching system

Info

Publication number
AU2001247889A1
AU2001247889A1 AU2001247889A AU4788901A AU2001247889A1 AU 2001247889 A1 AU2001247889 A1 AU 2001247889A1 AU 2001247889 A AU2001247889 A AU 2001247889A AU 4788901 A AU4788901 A AU 4788901A AU 2001247889 A1 AU2001247889 A1 AU 2001247889A1
Authority
AU
Australia
Prior art keywords
peak
methods
plasma etching
inductively coupled
coupled plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001247889A
Inventor
Shu Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/608,883 external-priority patent/US6531030B1/en
Priority claimed from US09/676,462 external-priority patent/US6422173B1/en
Application filed by Lam Research Corp filed Critical Lam Research Corp
Publication of AU2001247889A1 publication Critical patent/AU2001247889A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065—Plasma etching; Reactive-ion etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
AU2001247889A 2000-03-31 2001-03-28 Apparatus and methods for actively controlling rf peak-to-peak voltage in an inductively coupled plasma etching system Abandoned AU2001247889A1 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP2000099728 2000-03-31
JP2000-99728 2000-03-31
US09608883 2000-06-30
US09/608,883 US6531030B1 (en) 2000-03-31 2000-06-30 Inductively coupled plasma etching apparatus
US09/676,462 US6422173B1 (en) 2000-06-30 2000-09-29 Apparatus and methods for actively controlling RF peak-to-peak voltage in an inductively coupled plasma etching system
US09676462 2000-09-29
PCT/US2001/010183 WO2001075930A2 (en) 2000-03-31 2001-03-28 Apparatus and methods for actively controlling rf peak-to-peak voltage in an inductively coupled plasma etching system

Publications (1)

Publication Number Publication Date
AU2001247889A1 true AU2001247889A1 (en) 2001-10-15

Family

ID=27342948

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001247889A Abandoned AU2001247889A1 (en) 2000-03-31 2001-03-28 Apparatus and methods for actively controlling rf peak-to-peak voltage in an inductively coupled plasma etching system

Country Status (7)

Country Link
EP (1) EP1269512B1 (en)
KR (1) KR100801044B1 (en)
CN (1) CN1230042C (en)
AU (1) AU2001247889A1 (en)
DE (1) DE60130744T2 (en)
TW (1) TW534928B (en)
WO (1) WO2001075930A2 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100452920B1 (en) * 2002-07-19 2004-10-14 한국디엔에스 주식회사 Inductive coupled plasma etching apparatus
KR20060073737A (en) * 2004-12-24 2006-06-29 삼성전자주식회사 Plasma apparatus
US7353771B2 (en) * 2005-11-07 2008-04-08 Mks Instruments, Inc. Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator
EP2053631A1 (en) * 2007-10-22 2009-04-29 Industrial Plasma Services & Technologies - IPST GmbH Method and device for plasma treatment of moving substrates
CN102820286A (en) * 2012-07-16 2012-12-12 昆山华太电子技术有限公司 Structure for improving performance of passive device of power integrated circuit
CN104183451A (en) * 2013-05-22 2014-12-03 中微半导体设备(上海)有限公司 Faraday shield device capable of realizing rapid heat radiation and plasma processing device
CN104576278B (en) * 2013-10-10 2017-05-10 中微半导体设备(上海)有限公司 Faraday shield plate and plasma treatment system using Faraday shield plate
US20170278680A1 (en) * 2016-03-28 2017-09-28 Lam Research Corporation Substrate processing system including coil with rf powered faraday shield
JP6715129B2 (en) * 2016-08-31 2020-07-01 東京エレクトロン株式会社 Plasma processing device
KR101848908B1 (en) * 2016-09-19 2018-05-15 인베니아 주식회사 Inductively coupled plasma processing apparatus
US10734195B2 (en) * 2017-06-08 2020-08-04 Lam Research Corporation Systems and methods for transformer coupled plasma pulsing with transformer coupled capacitive tuning switching
CN110875168B (en) * 2018-08-31 2022-08-16 北京北方华创微电子装备有限公司 Reaction chamber and plasma processing equipment
CN110491759A (en) * 2019-08-21 2019-11-22 江苏鲁汶仪器有限公司 A kind of plasma etching system
CN110491760B (en) * 2019-08-23 2020-09-15 江苏鲁汶仪器有限公司 Faraday cleaning device and plasma processing system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5540800A (en) * 1994-06-23 1996-07-30 Applied Materials, Inc. Inductively coupled high density plasma reactor for plasma assisted materials processing
US5650032A (en) * 1995-06-06 1997-07-22 International Business Machines Corporation Apparatus for producing an inductive plasma for plasma processes
JP4119547B2 (en) * 1997-10-20 2008-07-16 東京エレクトロンＡｔ株式会社 Plasma processing equipment
US6280563B1 (en) * 1997-12-31 2001-08-28 Lam Research Corporation Plasma device including a powered non-magnetic metal member between a plasma AC excitation source and the plasma
US6097157A (en) * 1998-04-09 2000-08-01 Board Of Regents, The University Of Texas System System for ion energy control during plasma processing

Also Published As

Publication number Publication date
WO2001075930A2 (en) 2001-10-11
CN1230042C (en) 2005-11-30
EP1269512B1 (en) 2007-10-03
DE60130744D1 (en) 2007-11-15
KR20030012856A (en) 2003-02-12
KR100801044B1 (en) 2008-02-04
EP1269512A2 (en) 2003-01-02
TW534928B (en) 2003-06-01
WO2001075930A3 (en) 2002-05-23
DE60130744T2 (en) 2008-07-17
CN1422434A (en) 2003-06-04

Similar Documents

Publication Publication Date Title
AU2001265093A1 (en) Methods and apparatus for plasma processing
AU2001279189A1 (en) Plasma processing method and apparatus
AU2002213451A1 (en) System, apparatus, and method for processing wafer using single frequency rf power in plasma processing chamber
AU2001231132A1 (en) Plasma processing system and method
AU3382900A (en) Method and apparatus for compensating non-uniform wafer processing in plasma processing
AU2001238725A1 (en) Method and apparatus for powering tire monitor
AU2001275970A1 (en) Method and apparatus for performing final critical dimension control
AU2001247889A1 (en) Apparatus and methods for actively controlling rf peak-to-peak voltage in an inductively coupled plasma etching system
AU2002349419A1 (en) Plasma etching method and plasma etching device
AU2001271307A1 (en) Method and apparatus for controlling an extensible computing system
AUPR157300A0 (en) An apparatus and method (bin03)
AU2001253702A1 (en) Apparatus and method for persistent display interface
AUPR157600A0 (en) An apparatus and method (bin04)
AU2001259119A1 (en) Method and apparatus for plasma cleaning of workpieces
AUPR157400A0 (en) An apparatus and method (bin01)
AU4446400A (en) Method and apparatuses for plasma treatment
AU2002327455A1 (en) Method and apparatus for protecting devices in an rf power amplifier
AU2001260830A1 (en) Method and apparatus for providing an integrated loyalty system
AU2002354241A1 (en) Plasma treatment apparatus and control method thereof
AU2002326159A1 (en) Plasma treating apparatus and plasma treating method
AU2002247433A1 (en) Plasma processing method and apparatus with control of plasma excitation power
AU2001280200A1 (en) Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator
AU2002367178A1 (en) Etching method and plasma etching device
AU2001270163A1 (en) Vacuum plasma processor apparatus and method
AU2001238445A1 (en) Apparatus and method for stabilizing pelvic ring disruption