ATE75860T1 - Duennschicht-zusammensetzungen fuer maske. - Google Patents

Duennschicht-zusammensetzungen fuer maske.

Info

Publication number
ATE75860T1
ATE75860T1 AT88300920T AT88300920T ATE75860T1 AT E75860 T1 ATE75860 T1 AT E75860T1 AT 88300920 T AT88300920 T AT 88300920T AT 88300920 T AT88300920 T AT 88300920T AT E75860 T1 ATE75860 T1 AT E75860T1
Authority
AT
Austria
Prior art keywords
mask
thin layer
graphic artwork
thin film
layer compositions
Prior art date
Application number
AT88300920T
Other languages
English (en)
Inventor
Wilfred C Kittler Jr
Darrell Stoddard
Janos Czukor
Original Assignee
Andus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Andus Corp filed Critical Andus Corp
Application granted granted Critical
Publication of ATE75860T1 publication Critical patent/ATE75860T1/de

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/80—Etching
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Surface Treatment Of Glass (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Materials For Photolithography (AREA)
AT88300920T 1987-02-04 1988-02-03 Duennschicht-zusammensetzungen fuer maske. ATE75860T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/010,873 US4911785A (en) 1987-02-04 1987-02-04 The method of forming a thin film artwork compounds
EP88300920A EP0277828B1 (de) 1987-02-04 1988-02-03 Dünnschicht-Zusammensetzungen für Maske

Publications (1)

Publication Number Publication Date
ATE75860T1 true ATE75860T1 (de) 1992-05-15

Family

ID=21747821

Family Applications (1)

Application Number Title Priority Date Filing Date
AT88300920T ATE75860T1 (de) 1987-02-04 1988-02-03 Duennschicht-zusammensetzungen fuer maske.

Country Status (7)

Country Link
US (1) US4911785A (de)
EP (1) EP0277828B1 (de)
JP (1) JPS63239453A (de)
KR (1) KR880010640A (de)
AT (1) ATE75860T1 (de)
CA (1) CA1308293C (de)
DE (1) DE3870638D1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5011569A (en) * 1987-02-04 1991-04-30 Andus Corporation Thin film artwork compounds
US4937055A (en) * 1989-01-13 1990-06-26 Andus Corporation Surface treatment for thin metal or semiconductor oxide coatings
US6120693A (en) * 1998-11-06 2000-09-19 Alliedsignal Inc. Method of manufacturing an interlayer via and a laminate precursor useful for same
US6707152B1 (en) * 1999-04-16 2004-03-16 Micron Technology, Inc. Semiconductor device, electrical conductor system, and method of making

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2825687A (en) * 1952-04-04 1958-03-04 Nat Res Dev Transparent conducting films
DE946588C (de) * 1954-01-25 1956-08-02 Wenczler & Heidenhain Verfahren zum Aufbringen von Kopien auf beliebiges Material
US3705061A (en) * 1971-03-19 1972-12-05 Southern California Chem Co In Continuous redox process for dissolving copper
US4123309A (en) * 1973-11-29 1978-10-31 Minnesota Mining And Manufacturing Company Transfer letter system
US3822155A (en) * 1973-01-22 1974-07-02 Rca Corp Method of making a semitransparent photomask
JPS50902A (de) * 1973-05-04 1975-01-08
JPS5230848B2 (de) * 1973-10-09 1977-08-11
US3919100A (en) * 1974-04-24 1975-11-11 Enthone Alkaline etchant compositions
US4039698A (en) * 1976-01-23 1977-08-02 Bell Telephone Laboratories, Incorporated Method for making patterned platinum metallization
US4319955A (en) * 1980-11-05 1982-03-16 Philip A. Hunt Chemical Corp. Ammoniacal alkaline cupric etchant solution for and method of reducing etchant undercut
US4379040A (en) * 1981-01-29 1983-04-05 Ppg Industries, Inc. Method of and apparatus for control of reactive sputtering deposition
US4336119A (en) * 1981-01-29 1982-06-22 Ppg Industries, Inc. Method of and apparatus for control of reactive sputtering deposition
US4387156A (en) * 1981-02-04 1983-06-07 Minnesota Mining And Manufacturing Company Imageable film containing a metal oxide opacifying layer
US4451327A (en) * 1982-12-17 1984-05-29 Psi Star, Inc. Process and structure for etching copper
JPS59150453A (ja) * 1982-12-23 1984-08-28 Toshiba Corp 半導体モジユ−ル用基板の製造方法
US4419183A (en) * 1983-01-18 1983-12-06 Shipley Company Inc. Etchant
US4469777A (en) * 1983-12-01 1984-09-04 E. I. Du Pont De Nemours And Company Single exposure process for preparing printed circuits
US4567129A (en) * 1984-07-27 1986-01-28 E. I. Du Pont De Nemours And Company Process for image formation utilizing chemically soluble pigments
DE3433251A1 (de) * 1984-08-16 1986-02-27 Robert Bosch Gmbh, 7000 Stuttgart Verfahren zur herstellung von galvanischen lotschichten auf anorganischen substraten
US4652336A (en) * 1984-09-20 1987-03-24 Siemens Aktiengesellschaft Method of producing copper platforms for integrated circuits
US4636282A (en) * 1985-06-20 1987-01-13 Great Lakes Chemical Corporation Method for etching copper and composition useful therein
US4717439A (en) * 1985-10-24 1988-01-05 Enthone, Incorporated Process for the treatment of copper oxide in the preparation of printed circuit boards
US4673521A (en) * 1986-01-21 1987-06-16 Enthone, Incorporated Process for regenerating solder stripping solutions
US4732649A (en) * 1986-06-18 1988-03-22 Macdermid, Incorporated Method for manufacture of printed circuit boards
GB8614868D0 (en) * 1986-06-18 1986-07-23 Ciba Geigy Ag Metallic patterns
US4687545A (en) * 1986-06-18 1987-08-18 Macdermid, Incorporated Process for stripping tin or tin-lead alloy from copper

Also Published As

Publication number Publication date
CA1308293C (en) 1992-10-06
DE3870638D1 (de) 1992-06-11
KR880010640A (ko) 1988-10-10
US4911785A (en) 1990-03-27
EP0277828A3 (en) 1988-09-14
JPS63239453A (ja) 1988-10-05
EP0277828B1 (de) 1992-05-06
EP0277828A2 (de) 1988-08-10

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties