ATE60057T1 - Verfahren zur herstellung von hexamethylcyclotrisilazan. - Google Patents

Verfahren zur herstellung von hexamethylcyclotrisilazan.

Info

Publication number
ATE60057T1
ATE60057T1 AT86102688T AT86102688T ATE60057T1 AT E60057 T1 ATE60057 T1 AT E60057T1 AT 86102688 T AT86102688 T AT 86102688T AT 86102688 T AT86102688 T AT 86102688T AT E60057 T1 ATE60057 T1 AT E60057T1
Authority
AT
Austria
Prior art keywords
hexamethylcyclotrisilazan
production
sflazane
cyclotrisilazanes
cyclotetrasilazanes
Prior art date
Application number
AT86102688T
Other languages
English (en)
Inventor
Barry C Arkles
Burrell N Hamon
Original Assignee
Huels America Inc A Delaware C
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huels America Inc A Delaware C filed Critical Huels America Inc A Delaware C
Application granted granted Critical
Publication of ATE60057T1 publication Critical patent/ATE60057T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/08—Compounds having one or more C—Si linkages
    • C07F7/10—Compounds having one or more C—Si linkages containing nitrogen having a Si-N linkage
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/21—Cyclic compounds having at least one ring containing silicon, but no carbon in the ring

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Silicon Compounds (AREA)
AT86102688T 1985-07-15 1986-03-01 Verfahren zur herstellung von hexamethylcyclotrisilazan. ATE60057T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/755,049 US4577039A (en) 1985-07-15 1985-07-15 Method of preparing hexamethylcyclotrisilazane
EP86102688A EP0208831B1 (de) 1985-07-15 1986-03-01 Verfahren zur Herstellung von Hexamethylcyclotrisilazan

Publications (1)

Publication Number Publication Date
ATE60057T1 true ATE60057T1 (de) 1991-02-15

Family

ID=25037512

Family Applications (1)

Application Number Title Priority Date Filing Date
AT86102688T ATE60057T1 (de) 1985-07-15 1986-03-01 Verfahren zur herstellung von hexamethylcyclotrisilazan.

Country Status (5)

Country Link
US (1) US4577039A (de)
EP (1) EP0208831B1 (de)
JP (1) JPS6219597A (de)
AT (1) ATE60057T1 (de)
DE (1) DE3676896D1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4869854A (en) * 1986-10-31 1989-09-26 Shin-Etsu Chemical Co., Ltd. Process for manufacturing organic silazane polymers and ceramics therefrom
US5084423A (en) * 1987-11-07 1992-01-28 Hoechst Aktiengesellschaft Polysilazanes, process for the preparation thereof, silicon, nitride-containing ceramic materials which can be prepared therefrom, and the preparation thereof
US4855469A (en) * 1988-11-09 1989-08-08 Dow Corning Corporation Preparation of cycloorganotrisilazanes
JP2793008B2 (ja) * 1990-04-20 1998-09-03 信越化学工業株式会社 ヘキサメチルシクロトリシラザンの製造方法
JP2626336B2 (ja) * 1991-08-22 1997-07-02 信越化学工業株式会社 ヘキサメチルシクロトリシラザンの製造方法
JP3446291B2 (ja) * 1993-10-29 2003-09-16 信越化学工業株式会社 ヘキサメチルシクロトリシラザンの製造方法
US7122222B2 (en) * 2003-01-23 2006-10-17 Air Products And Chemicals, Inc. Precursors for depositing silicon containing films and processes thereof
CN107778327A (zh) * 2016-08-29 2018-03-09 张家港市国泰华荣化工新材料有限公司 一种六甲基环三硅氮烷的制备方法
CN112552334A (zh) * 2020-12-08 2021-03-26 江西贝特利新材料有限公司 一种六甲基环三硅氮烷的制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2885370A (en) * 1957-10-03 1959-05-05 American Cyanamid Co Method of preparing polymers of monomeric cyclotrisilazanes
DE1187615B (de) * 1961-01-26 1965-02-25 Monsanto Co Verfahren zur Herstellung von N-Silylcyclosilazanen
US3228895A (en) * 1963-05-15 1966-01-11 Southern Res Inst Infusible silylamine polymer and process for producing same
DE1593040A1 (de) * 1965-07-05 1970-07-23 Monsanto Co Verfahren zur Herstellung von N-Silylcyclosilazanen

Also Published As

Publication number Publication date
EP0208831B1 (de) 1991-01-16
EP0208831A3 (en) 1987-04-15
JPS6219597A (ja) 1987-01-28
EP0208831A2 (de) 1987-01-21
JPS6358838B2 (de) 1988-11-17
US4577039A (en) 1986-03-18
DE3676896D1 (de) 1991-02-21

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee