ATE554497T1 - Ionenquelle mit elektrischer entladung über glühfaden - Google Patents

Ionenquelle mit elektrischer entladung über glühfaden

Info

Publication number
ATE554497T1
ATE554497T1 AT08290027T AT08290027T ATE554497T1 AT E554497 T1 ATE554497 T1 AT E554497T1 AT 08290027 T AT08290027 T AT 08290027T AT 08290027 T AT08290027 T AT 08290027T AT E554497 T1 ATE554497 T1 AT E554497T1
Authority
AT
Austria
Prior art keywords
filade
ion source
electrical discharge
discharge via
power supply
Prior art date
Application number
AT08290027T
Other languages
English (en)
Inventor
Maxime Makarov
Marc Mestres
Original Assignee
Excico Group N V
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=39431164&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE554497(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Excico Group N V filed Critical Excico Group N V
Application granted granted Critical
Publication of ATE554497T1 publication Critical patent/ATE554497T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
AT08290027T 2008-01-11 2008-01-11 Ionenquelle mit elektrischer entladung über glühfaden ATE554497T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP08290027A EP2079096B1 (de) 2008-01-11 2008-01-11 Ionenquelle mit elektrischer Entladung über Glühfaden

Publications (1)

Publication Number Publication Date
ATE554497T1 true ATE554497T1 (de) 2012-05-15

Family

ID=39431164

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08290027T ATE554497T1 (de) 2008-01-11 2008-01-11 Ionenquelle mit elektrischer entladung über glühfaden

Country Status (5)

Country Link
EP (1) EP2079096B1 (de)
JP (1) JP5340308B2 (de)
KR (1) KR20100131978A (de)
AT (1) ATE554497T1 (de)
TW (1) TWI445036B (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0921791D0 (en) * 2009-12-14 2010-01-27 Aviza Technologies Ltd Ion beam source
JP6219594B2 (ja) * 2013-05-15 2017-10-25 Hoya株式会社 薄膜形成装置、及び薄膜形成方法
JP2019067488A (ja) * 2017-09-28 2019-04-25 日新イオン機器株式会社 イオン源およびイオン注入装置
CN114959551B (zh) * 2022-04-29 2023-12-19 超微中程纳米科技（苏州）有限公司 模具钢刀具离子氮化工艺

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3156842A (en) 1962-10-08 1964-11-10 Gordon W Mcclure Gas ionizer
US3970892A (en) 1975-05-19 1976-07-20 Hughes Aircraft Company Ion plasma electron gun
US4025818A (en) 1976-04-20 1977-05-24 Hughes Aircraft Company Wire ion plasma electron gun
US4412153A (en) * 1980-03-03 1983-10-25 Varian Associates, Inc. Dual filament ion source
US4694222A (en) 1984-04-02 1987-09-15 Rpc Industries Ion plasma electron gun
US4642522A (en) 1984-06-18 1987-02-10 Hughes Aircraft Company Wire-ion-plasma electron gun employing auxiliary grid
US4608513A (en) 1984-09-13 1986-08-26 Varian Associates, Inc. Dual filament ion source with improved beam characteristics
FR2591035B1 (fr) 1985-11-29 1988-02-26 Onera (Off Nat Aerospatiale) Canon a electrons operant par emission secondaire sous bombardement ionique
FR2596580A1 (fr) * 1986-03-26 1987-10-02 Centre Nat Rech Scient Generateur de plasma
US4910435A (en) 1988-07-20 1990-03-20 American International Technologies, Inc. Remote ion source plasma electron gun
JPH065219A (ja) * 1992-06-22 1994-01-14 Nissin Electric Co Ltd イオン源装置
JP3968874B2 (ja) 1998-06-22 2007-08-29 日新イオン機器株式会社 三相交流を用いたプラズマ発生装置
EP1807859A2 (de) * 2004-10-25 2007-07-18 TEL Epion Inc. Ionisierer und verfahren zur ionenstrahlformierung in einem gascluster

Also Published As

Publication number Publication date
EP2079096B1 (de) 2012-04-18
KR20100131978A (ko) 2010-12-16
EP2079096A1 (de) 2009-07-15
JP2011509511A (ja) 2011-03-24
JP5340308B2 (ja) 2013-11-13
TW200941535A (en) 2009-10-01
TWI445036B (zh) 2014-07-11

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