ATE552518T1 - Zerstreuungsgitter - Google Patents

Zerstreuungsgitter

Info

Publication number
ATE552518T1
ATE552518T1 AT08305949T AT08305949T ATE552518T1 AT E552518 T1 ATE552518 T1 AT E552518T1 AT 08305949 T AT08305949 T AT 08305949T AT 08305949 T AT08305949 T AT 08305949T AT E552518 T1 ATE552518 T1 AT E552518T1
Authority
AT
Austria
Prior art keywords
pattern
melting temperature
optical
generated
dispersion grid
Prior art date
Application number
AT08305949T
Other languages
English (en)
Inventor
Flavio Pardo
Chien-Shing Pai
Maria Elina Simon
Original Assignee
Alcatel Lucent
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent filed Critical Alcatel Lucent
Application granted granted Critical
Publication of ATE552518T1 publication Critical patent/ATE552518T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
AT08305949T 2008-12-16 2008-12-16 Zerstreuungsgitter ATE552518T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP08305949A EP2199837B1 (de) 2008-12-16 2008-12-16 Zerstreuungsgitter

Publications (1)

Publication Number Publication Date
ATE552518T1 true ATE552518T1 (de) 2012-04-15

Family

ID=40546391

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08305949T ATE552518T1 (de) 2008-12-16 2008-12-16 Zerstreuungsgitter

Country Status (2)

Country Link
EP (1) EP2199837B1 (de)
AT (1) ATE552518T1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104803342B (zh) * 2014-01-23 2016-08-17 清华大学 碗状金属纳米结构的制备方法
CN107305260B (zh) * 2016-04-22 2019-07-30 中国科学院微电子研究所 厚体硅反射式单级衍射光栅的制作方法
CN113514912B (zh) * 2021-06-02 2022-12-02 中国计量科学研究院 梯度渐变微纳米光学结构制备方法及其结构

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3944420A (en) * 1974-05-22 1976-03-16 Rca Corporation Generation of permanent phase holograms and relief patterns in durable media by chemical etching
JPS58125084A (ja) * 1982-01-21 1983-07-25 株式会社東芝 液晶表示装置およびその製造方法
US4842633A (en) * 1987-08-25 1989-06-27 Matsushita Electric Industrial Co., Ltd. Method of manufacturing molds for molding optical glass elements and diffraction gratings
US5550663A (en) * 1994-05-24 1996-08-27 Omron Corporation Method of manufacturing optical low-pass filter
US5814237A (en) * 1996-09-26 1998-09-29 Electronics And Telecommunications Research Institute Method for forming deflection grating
EP1645893A1 (de) * 2004-10-08 2006-04-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Beugungsgitter für elektromagnetische Strahlung sowie Verfahren zur Herstellung

Also Published As

Publication number Publication date
EP2199837B1 (de) 2012-04-04
EP2199837A1 (de) 2010-06-23

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