ATE551447T1 - Tiegelhalterungselement - Google Patents

Tiegelhalterungselement

Info

Publication number
ATE551447T1
ATE551447T1 AT09006010T AT09006010T ATE551447T1 AT E551447 T1 ATE551447 T1 AT E551447T1 AT 09006010 T AT09006010 T AT 09006010T AT 09006010 T AT09006010 T AT 09006010T AT E551447 T1 ATE551447 T1 AT E551447T1
Authority
AT
Austria
Prior art keywords
crucible
holding member
supporting portion
divided
cruble
Prior art date
Application number
AT09006010T
Other languages
English (en)
Inventor
Hideki Kato
Haruhide Shikano
Masahiro Yasuda
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Application granted granted Critical
Publication of ATE551447T1 publication Critical patent/ATE551447T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
    • D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
    • D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
    • D—TEXTILES; PAPER
    • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
    • D04C—BRAIDING OR MANUFACTURE OF LACE, INCLUDING BOBBIN-NET OR CARBONISED LACE; BRAIDING MACHINES; BRAID; LACE
    • D04C1/00—Braid or lace, e.g. pillow-lace; Processes for the manufacture thereof
    • D04C1/02—Braid or lace, e.g. pillow-lace; Processes for the manufacture thereof made from particular materials
    • D—TEXTILES; PAPER
    • D10—INDEXING SCHEME ASSOCIATED WITH SUBLASSES OF SECTION D, RELATING TO TEXTILES
    • D10B—INDEXING SCHEME ASSOCIATED WITH SUBLASSES OF SECTION D, RELATING TO TEXTILES
    • D10B2403/00—Details of fabric structure established in the fabric forming process
    • D10B2403/02—Cross-sectional features
    • D10B2403/024—Fabric incorporating additional compounds
    • D10B2403/0241—Fabric incorporating additional compounds enhancing mechanical properties
    • D10B2403/02411—Fabric incorporating additional compounds enhancing mechanical properties with a single array of unbent yarn, e.g. unidirectional reinforcement fabrics
    • D—TEXTILES; PAPER
    • D10—INDEXING SCHEME ASSOCIATED WITH SUBLASSES OF SECTION D, RELATING TO TEXTILES
    • D10B—INDEXING SCHEME ASSOCIATED WITH SUBLASSES OF SECTION D, RELATING TO TEXTILES
    • D10B2505/00—Industrial
    • D10B2505/02—Reinforcing materials; Prepregs
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
    • Y10T156/1062—Prior to assembly

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Textile Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Ceramic Products (AREA)
AT09006010T 2008-05-01 2009-04-30 Tiegelhalterungselement ATE551447T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008119948A JP5286589B2 (ja) 2008-05-01 2008-05-01 ルツボ保持部材およびその製造方法

Publications (1)

Publication Number Publication Date
ATE551447T1 true ATE551447T1 (de) 2012-04-15

Family

ID=40756797

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09006010T ATE551447T1 (de) 2008-05-01 2009-04-30 Tiegelhalterungselement

Country Status (7)

Country Link
US (1) US20090272314A1 (de)
EP (2) EP2206810B1 (de)
JP (1) JP5286589B2 (de)
KR (1) KR101194157B1 (de)
CN (1) CN101571351B (de)
AT (1) ATE551447T1 (de)
TW (1) TWI374247B (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009203093A (ja) * 2008-02-26 2009-09-10 Ibiden Co Ltd ルツボ保持部材
KR20120127397A (ko) 2009-11-27 2012-11-21 미쓰비시 가가꾸 가부시키가이샤 질화물 결정의 제조 방법, 제조 용기 및 부재
US20130111730A1 (en) * 2011-11-07 2013-05-09 Graftech International Holdings Inc. Graphite Crucible for Silicone Crystal Production and Method of Ingot Removal
JP2014012614A (ja) * 2012-07-04 2014-01-23 Toyo Tanso Kk カーボン製ルツボ及びその製造方法
USD771167S1 (en) 2013-08-21 2016-11-08 A.L.M.T. Corp. Crucible
KR20180060433A (ko) 2016-11-29 2018-06-07 (주)에이원엔지니어링 식품 건조기
CN108997019B (zh) * 2017-06-02 2021-04-20 上海新昇半导体科技有限公司 石墨坩埚及其制造方法
CN108048902B (zh) * 2017-10-30 2019-10-29 包头美科硅能源有限公司 一种高纯度低杂质的多晶炉热场保温层及其制备工艺
FR3075671B1 (fr) * 2017-12-21 2020-12-18 Commissariat Energie Atomique Creuset pour la solidification dirigee d'un lingot
CN112195508A (zh) * 2020-10-21 2021-01-08 上海骐杰碳素材料有限公司 带底孔的整体编织坩埚预制体及以其制成的涂层坩埚
EP4368751A1 (de) * 2021-08-02 2024-05-15 Longi Green Energy Technology Co., Ltd. Tiegelanordnung und wärmefeldanordnung
KR20230083437A (ko) * 2021-12-03 2023-06-12 인동첨단소재(주) 그라파이트 시트를 이용한 흑연 도가니의 제조방법.

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US3860736A (en) * 1973-10-29 1975-01-14 Hewlett Packard Co Crystal furnace
SU1487514A1 (ru) * 1987-10-19 1990-10-15 Gnii Pi Redkometa Подставка под кварцевый тигель ;
JPH01183490A (ja) 1988-01-14 1989-07-21 Toyo Tanso Kk 単結晶引上用黒鉛るつぼ
DE4007053A1 (de) * 1989-03-21 1990-09-27 Schunk Kohlenstofftechnik Gmbh Graphittiegel, verfahren zu seiner herstellung und verwendung
JP3181443B2 (ja) * 1993-07-12 2001-07-03 コマツ電子金属株式会社 半導体単結晶育成装置の黒鉛るつぼ
WO1996014455A1 (en) * 1994-11-04 1996-05-17 Nippon Steel Corporation Triaxial woven material using carbon fiber bundle and method of manufacturing the same
JP4029147B2 (ja) * 1996-06-27 2008-01-09 東洋炭素株式会社 単結晶引き上げ用ルツボ及びその製造方法
WO1997049844A1 (fr) 1996-06-27 1997-12-31 Toyo Tanso Co., Ltd. Creuset destine au tirage du cristal et son procede de production
JPH10101471A (ja) * 1996-09-27 1998-04-21 Sumitomo Metal Ind Ltd 単結晶引き上げ用黒鉛ルツボ
FR2753993B1 (fr) * 1996-10-01 1998-11-27 Aerospatiale Structure tubulaire tressee pour piece composite, sa realisation et ses applications
JPH10245275A (ja) 1997-02-28 1998-09-14 Nippon Carbon Co Ltd 黒鉛型を用いた炭素繊維強化炭素材の製造方法
CA2240695A1 (en) * 1997-06-18 1998-12-18 Saburou Tanaka Method of manufacturing multiple-piece graphite crucible
JPH1160373A (ja) 1997-08-06 1999-03-02 Toyo Tanso Kk 単結晶引き上げ用ルツボ
JPH11147199A (ja) 1997-11-13 1999-06-02 Sumitomo Metal Ind Ltd 単結晶引上げ用坩堝の成形方法
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FR2818666B1 (fr) * 2000-12-27 2004-02-06 Snecma Moteurs Protection d'un bol en materiau carbone, notamment en composite c/c, destine a recevoir un creuset, tel qu'un creuset en silice pour le tirage de silicium
US20020166503A1 (en) * 2001-03-08 2002-11-14 Hitco Carbon Composites, Inc. Hybrid crucible susceptor
JP3617466B2 (ja) * 2001-03-16 2005-02-02 三菱住友シリコン株式会社 単結晶引上げ装置
JP4018503B2 (ja) * 2001-10-25 2007-12-05 東洋炭素株式会社 単結晶引き上げ用ルツボ
KR20070019970A (ko) * 2004-01-29 2007-02-16 쿄세라 코포레이션 주형 및 그 형성방법, 및 그 주형을 이용한 다결정 실리콘기판의 제조방법
US7540919B2 (en) * 2005-04-01 2009-06-02 Gt Solar Incorporated Solidification of crystalline silicon from reusable crucible molds
CN100432023C (zh) * 2006-07-20 2008-11-12 西安超码科技有限公司 单晶硅拉制炉用热场炭/炭坩埚的制备方法

Also Published As

Publication number Publication date
TWI374247B (en) 2012-10-11
CN101571351B (zh) 2012-02-01
JP5286589B2 (ja) 2013-09-11
EP2206810A3 (de) 2010-11-03
KR101194157B1 (ko) 2012-10-23
EP2113588A1 (de) 2009-11-04
EP2113588B1 (de) 2012-03-28
EP2206810A2 (de) 2010-07-14
KR20090115680A (ko) 2009-11-05
JP2009269777A (ja) 2009-11-19
US20090272314A1 (en) 2009-11-05
CN101571351A (zh) 2009-11-04
TW200946852A (en) 2009-11-16
EP2206810B1 (de) 2012-11-07

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