ATE549750T1 - Piezoelektrischer aktuator - Google Patents
Piezoelektrischer aktuatorInfo
- Publication number
- ATE549750T1 ATE549750T1 AT07738408T AT07738408T ATE549750T1 AT E549750 T1 ATE549750 T1 AT E549750T1 AT 07738408 T AT07738408 T AT 07738408T AT 07738408 T AT07738408 T AT 07738408T AT E549750 T1 ATE549750 T1 AT E549750T1
- Authority
- AT
- Austria
- Prior art keywords
- thick
- film
- conductor
- film conductor
- piezoelectric actuator
- Prior art date
Links
- 239000004020 conductor Substances 0.000 abstract 13
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
- H10N30/063—Forming interconnections, e.g. connection electrodes of multilayered piezoelectric or electrostrictive parts
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Electrically Driven Valve-Operating Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006097575 | 2006-03-31 | ||
PCT/JP2007/054936 WO2007114002A1 (ja) | 2006-03-31 | 2007-03-13 | 圧電アクチュエータ |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE549750T1 true ATE549750T1 (de) | 2012-03-15 |
Family
ID=38563274
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT07738408T ATE549750T1 (de) | 2006-03-31 | 2007-03-13 | Piezoelektrischer aktuator |
Country Status (6)
Country | Link |
---|---|
US (1) | US7777398B2 (de) |
EP (1) | EP2003707B1 (de) |
JP (1) | JP4154538B2 (de) |
CN (1) | CN101405882B (de) |
AT (1) | ATE549750T1 (de) |
WO (1) | WO2007114002A1 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4929875B2 (ja) * | 2006-06-30 | 2012-05-09 | 株式会社デンソー | 積層型圧電素子 |
CN103094469B (zh) * | 2007-12-26 | 2015-07-08 | 京瓷株式会社 | 层叠型压电元件、利用该元件的喷射装置及燃料喷射系统 |
CN101978522A (zh) * | 2008-04-11 | 2011-02-16 | 株式会社村田制作所 | 层叠型压电致动器 |
EP2259353B1 (de) * | 2008-04-21 | 2012-06-27 | Murata Manufacturing Co. Ltd. | Mehrschichtiger piezoelektrischer aktuator |
DE102008062021A1 (de) * | 2008-08-18 | 2010-03-04 | Epcos Ag | Piezoaktor in Vielschichtbauweise |
JP5385400B2 (ja) * | 2009-10-23 | 2014-01-08 | 株式会社村田製作所 | 電気機械変換素子及びアクチュエータ |
DE102010063385A1 (de) * | 2010-12-17 | 2012-06-21 | Robert Bosch Gmbh | Piezoaktor |
US8450910B2 (en) * | 2011-01-14 | 2013-05-28 | General Electric Company | Ultrasound transducer element and method for providing an ultrasound transducer element |
US9478725B2 (en) | 2011-02-24 | 2016-10-25 | Kyocera Corporation | Multi-layer piezoelectric element, and injection device and fuel injection system provided with the same |
DE102012105517B4 (de) * | 2012-06-25 | 2020-06-18 | Tdk Electronics Ag | Vielschichtbauelement mit einer Außenkontaktierung und Verfahren zur Herstellung eines Vielschichtbauelements mit einer Außenkontaktierung |
DE102012109250B4 (de) * | 2012-09-28 | 2020-07-16 | Tdk Electronics Ag | Elektrisches Bauelement und Verfahren zur Herstellung einer Kontaktierung eines Elektrischen Bauelements |
CN105374929B (zh) * | 2015-11-20 | 2018-10-30 | 中国科学院上海硅酸盐研究所 | 一种织构化无铅压电陶瓷多层驱动器及其制备方法 |
CN112514088A (zh) * | 2018-09-21 | 2021-03-16 | 株式会社村田制作所 | 压电器件 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4201937C2 (de) * | 1991-01-25 | 1997-05-22 | Murata Manufacturing Co | Piezoelektrisches laminiertes Stellglied |
DE19646676C1 (de) * | 1996-11-12 | 1998-04-23 | Siemens Ag | Piezoaktor mit neuartiger Kontaktierung und Herstellverfahren |
DE19928190A1 (de) | 1999-06-19 | 2001-01-11 | Bosch Gmbh Robert | Piezoaktor |
US6396193B1 (en) * | 1999-10-01 | 2002-05-28 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device having mutually opposing thin plate portions |
JP4158338B2 (ja) | 2000-06-06 | 2008-10-01 | 株式会社デンソー | インジェクタ用圧電体素子 |
DE10152490A1 (de) * | 2000-11-06 | 2002-05-08 | Ceramtec Ag | Außenelektroden an piezokeramischen Vielschichtaktoren |
JP3964184B2 (ja) * | 2000-12-28 | 2007-08-22 | 株式会社デンソー | 積層型圧電アクチュエータ |
US6548943B2 (en) * | 2001-04-12 | 2003-04-15 | Nokia Mobile Phones Ltd. | Method of producing thin-film bulk acoustic wave devices |
JP3815285B2 (ja) * | 2001-10-09 | 2006-08-30 | ブラザー工業株式会社 | インクジェットヘッド |
JP4422973B2 (ja) * | 2002-08-27 | 2010-03-03 | 京セラ株式会社 | 積層圧電体、アクチュエータ及び印刷ヘッド |
JP4208234B2 (ja) | 2003-03-24 | 2009-01-14 | 株式会社ノリタケカンパニーリミテド | 圧電セラミック材用導体ペースト及びその利用 |
JP2005183478A (ja) * | 2003-12-16 | 2005-07-07 | Ibiden Co Ltd | 積層型圧電素子 |
CN1898813B (zh) | 2003-12-26 | 2010-11-24 | 株式会社村田制作所 | 厚膜电极和多层陶瓷电子器件 |
JP4355665B2 (ja) | 2004-04-09 | 2009-11-04 | Tdk株式会社 | 圧電磁器および圧電素子 |
JP2006041279A (ja) * | 2004-07-28 | 2006-02-09 | Denso Corp | 積層型圧電体素子及びその製造方法 |
US7249817B2 (en) * | 2005-03-17 | 2007-07-31 | Hewlett-Packard Development Company, L.P. | Printer having image dividing modes |
JP2006303044A (ja) * | 2005-04-18 | 2006-11-02 | Denso Corp | 積層型圧電体素子 |
US7998362B2 (en) * | 2005-08-23 | 2011-08-16 | Canon Kabushiki Kaisha | Piezoelectric substance, piezoelectric element, liquid discharge head using piezoelectric element, liquid discharge apparatus, and production method of piezoelectric element |
JP2007173320A (ja) * | 2005-12-19 | 2007-07-05 | Denso Corp | 積層型圧電素子及びその製造方法 |
-
2007
- 2007-03-13 AT AT07738408T patent/ATE549750T1/de active
- 2007-03-13 CN CN2007800101439A patent/CN101405882B/zh active Active
- 2007-03-13 EP EP20070738408 patent/EP2003707B1/de active Active
- 2007-03-13 WO PCT/JP2007/054936 patent/WO2007114002A1/ja active Application Filing
- 2007-03-13 JP JP2007534958A patent/JP4154538B2/ja active Active
- 2007-09-19 US US11/857,599 patent/US7777398B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US7777398B2 (en) | 2010-08-17 |
CN101405882B (zh) | 2011-06-15 |
US20080007144A1 (en) | 2008-01-10 |
JPWO2007114002A1 (ja) | 2009-08-13 |
JP4154538B2 (ja) | 2008-09-24 |
CN101405882A (zh) | 2009-04-08 |
WO2007114002A1 (ja) | 2007-10-11 |
EP2003707B1 (de) | 2012-03-14 |
EP2003707A1 (de) | 2008-12-17 |
EP2003707A4 (de) | 2010-10-13 |
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