ATE545016T1 - Verfahren zur herstellung eines mikrochips zur detektion von biologischem material - Google Patents

Verfahren zur herstellung eines mikrochips zur detektion von biologischem material

Info

Publication number
ATE545016T1
ATE545016T1 AT09176303T AT09176303T ATE545016T1 AT E545016 T1 ATE545016 T1 AT E545016T1 AT 09176303 T AT09176303 T AT 09176303T AT 09176303 T AT09176303 T AT 09176303T AT E545016 T1 ATE545016 T1 AT E545016T1
Authority
AT
Austria
Prior art keywords
grid
transistors
type
layer
channel area
Prior art date
Application number
AT09176303T
Other languages
English (en)
Inventor
Julien Buckley
Olivier Billoint
Guillaume Delapierre
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE545016T1 publication Critical patent/ATE545016T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4145—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for biomolecules, e.g. gate electrode with immobilised receptors

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Molecular Biology (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Biochemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Thin Film Transistor (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
AT09176303T 2008-11-20 2009-11-18 Verfahren zur herstellung eines mikrochips zur detektion von biologischem material ATE545016T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0857893A FR2938703B1 (fr) 2008-11-20 2008-11-20 Procede de realisation d'une puce de detection d'elements biologiques

Publications (1)

Publication Number Publication Date
ATE545016T1 true ATE545016T1 (de) 2012-02-15

Family

ID=40792700

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09176303T ATE545016T1 (de) 2008-11-20 2009-11-18 Verfahren zur herstellung eines mikrochips zur detektion von biologischem material

Country Status (5)

Country Link
US (1) US7927888B2 (de)
EP (1) EP2189787B1 (de)
JP (1) JP5373566B2 (de)
AT (1) ATE545016T1 (de)
FR (1) FR2938703B1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2962667A1 (fr) * 2010-07-19 2012-01-20 Commissariat Energie Atomique Procede de fonctionnalisation selective d'un materiau semiconducteur par activation thermique par effet joule
FR2980989A1 (fr) 2011-10-06 2013-04-12 Commissariat Energie Atomique Procede de fonctionnalisation d'un substrat solide autre qu'un substrat en or par des composes chimiques specifiques

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0646190B2 (ja) * 1985-08-14 1994-06-15 日本電気株式会社 半導体マルチバイオセンサ
DE4430811C1 (de) * 1994-08-30 1995-09-07 Fraunhofer Ges Forschung Verfahren zum Herstellen eines integrierten ionensensitiven Feldeffekttransistors in CMOS-Silizium-Planartechnologie
JP2001033423A (ja) * 1999-07-16 2001-02-09 Horiba Ltd 比較電極機能付イオン感応性電界効果トランジスタ型センサ
DE10255755B4 (de) * 2002-11-28 2006-07-13 Schneider, Christian, Dr. Integrierte elektronische Schaltung mit Feldeffekt-Sensoren zum Nachweis von Biomolekülen
US7189987B2 (en) * 2003-04-02 2007-03-13 Lucent Technologies Inc. Electrical detection of selected species
JP4065855B2 (ja) * 2004-01-21 2008-03-26 株式会社日立製作所 生体および化学試料検査装置
US20080108164A1 (en) * 2006-11-06 2008-05-08 Oleynik Vladislav A Sensor System and Method

Also Published As

Publication number Publication date
JP5373566B2 (ja) 2013-12-18
EP2189787A1 (de) 2010-05-26
FR2938703A1 (fr) 2010-05-21
US7927888B2 (en) 2011-04-19
US20100124791A1 (en) 2010-05-20
FR2938703B1 (fr) 2011-04-22
EP2189787B1 (de) 2012-02-08
JP2010122219A (ja) 2010-06-03

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