ATE544885T1 - Impfkristall-fixierungsvorrichtung - Google Patents

Impfkristall-fixierungsvorrichtung

Info

Publication number
ATE544885T1
ATE544885T1 AT07829129T AT07829129T ATE544885T1 AT E544885 T1 ATE544885 T1 AT E544885T1 AT 07829129 T AT07829129 T AT 07829129T AT 07829129 T AT07829129 T AT 07829129T AT E544885 T1 ATE544885 T1 AT E544885T1
Authority
AT
Austria
Prior art keywords
seed crystal
placing part
chamber
fixation device
inflated
Prior art date
Application number
AT07829129T
Other languages
English (en)
Inventor
Daisuke Kondo
Takuya Monbara
Original Assignee
Bridgestone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bridgestone Corp filed Critical Bridgestone Corp
Application granted granted Critical
Publication of ATE544885T1 publication Critical patent/ATE544885T1/de

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00Single-crystal growth by condensing evaporated or sublimed materials
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02Epitaxial-layer growth
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
    • C30B29/36Carbides
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032Seed pulling
    • Y10T117/1064Seed pulling including a fully-sealed or vacuum-maintained crystallization chamber [e.g., ampoule]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Pretreatment Of Seeds And Plants (AREA)
  • Polarising Elements (AREA)
AT07829129T 2006-10-03 2007-10-03 Impfkristall-fixierungsvorrichtung ATE544885T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006271711A JP5081423B2 (ja) 2006-10-03 2006-10-03 種結晶固定装置
PCT/JP2007/069390 WO2008041728A1 (fr) 2006-10-03 2007-10-03 DISPOSITIF DE FIXATION D'un CRISTAl D'ENSEMENCEMENT

Publications (1)

Publication Number Publication Date
ATE544885T1 true ATE544885T1 (de) 2012-02-15

Family

ID=39268582

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07829129T ATE544885T1 (de) 2006-10-03 2007-10-03 Impfkristall-fixierungsvorrichtung

Country Status (5)

Country Link
US (1) US8051888B2 (de)
EP (1) EP2071061B1 (de)
JP (1) JP5081423B2 (de)
AT (1) ATE544885T1 (de)
WO (1) WO2008041728A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4998491B2 (ja) * 2009-02-20 2012-08-15 トヨタ自動車株式会社 SiC単結晶の接着方法及びSiC単結晶の溶液成長法
CN116377596B (zh) * 2023-06-06 2023-10-13 苏州优晶光电科技有限公司 一种碳化硅籽晶粘结固定用加热装置和加热方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3680531B2 (ja) * 1997-12-11 2005-08-10 株式会社豊田中央研究所 種結晶固定剤及びそれを用いた単結晶の製造方法
JP4258921B2 (ja) * 1999-11-10 2009-04-30 株式会社豊田中央研究所 種結晶固定剤、種結晶固定方法およびそれらを用いた単結晶の製造方法
JP4224755B2 (ja) * 2001-10-16 2009-02-18 株式会社デンソー 種結晶の固定方法
US7601441B2 (en) * 2002-06-24 2009-10-13 Cree, Inc. One hundred millimeter high purity semi-insulating single crystal silicon carbide wafer
JP4401649B2 (ja) * 2002-12-13 2010-01-20 キヤノン株式会社 太陽電池モジュールの製造方法
JP4501657B2 (ja) * 2004-11-30 2010-07-14 パナソニック株式会社 炭化珪素単結晶成長用の種結晶固定方法
US7497906B2 (en) * 2006-03-08 2009-03-03 Bridgestone Corporation Seed crystal fixing apparatus and a method for fixing the seed crystal

Also Published As

Publication number Publication date
US8051888B2 (en) 2011-11-08
EP2071061A1 (de) 2009-06-17
WO2008041728A1 (fr) 2008-04-10
JP5081423B2 (ja) 2012-11-28
JP2008088024A (ja) 2008-04-17
EP2071061A4 (de) 2010-05-19
EP2071061B1 (de) 2012-02-08
US20100065223A1 (en) 2010-03-18

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