ATE531678T1 - Verfahren zur herstellung dichter blöcke - Google Patents
Verfahren zur herstellung dichter blöckeInfo
- Publication number
- ATE531678T1 ATE531678T1 AT06800553T AT06800553T ATE531678T1 AT E531678 T1 ATE531678 T1 AT E531678T1 AT 06800553 T AT06800553 T AT 06800553T AT 06800553 T AT06800553 T AT 06800553T AT E531678 T1 ATE531678 T1 AT E531678T1
- Authority
- AT
- Austria
- Prior art keywords
- blocks
- substrate
- plasma torch
- vertical axis
- motion along
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 238000002844 melting Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 230000008018 melting Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
Classifications
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/653—Processes involving a melting step
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
- C04B35/111—Fine ceramics
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- C04B35/14—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silica
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- C04B35/443—Magnesium aluminate spinel
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
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- Thermal Sciences (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Composite Materials (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Luminescent Compositions (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
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Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US70471805P | 2005-08-02 | 2005-08-02 | |
PCT/US2006/029745 WO2007016489A1 (en) | 2005-08-02 | 2006-07-28 | Method for purifying and producing dense blocks |
Publications (1)
Publication Number | Publication Date |
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ATE531678T1 true ATE531678T1 (de) | 2011-11-15 |
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AT06800553T ATE531678T1 (de) | 2005-08-02 | 2006-07-28 | Verfahren zur herstellung dichter blöcke |
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US (1) | US20070031610A1 (de) |
EP (2) | EP1910246B1 (de) |
JP (3) | JP5068753B2 (de) |
AT (1) | ATE531678T1 (de) |
PL (1) | PL1910246T3 (de) |
SI (1) | SI1910246T1 (de) |
WO (1) | WO2007016489A1 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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EP1910246B1 (de) * | 2005-08-02 | 2011-11-02 | MOGILEVSKY, Radion | Verfahren zur herstellung dichter blöcke |
KR101808572B1 (ko) * | 2009-11-20 | 2017-12-13 | 스미또모 가가꾸 가부시끼가이샤 | 단결정 사파이어 제조용 α-알루미나 |
PL224041B1 (pl) * | 2011-05-10 | 2016-11-30 | Polycor Spółka Z Ograniczoną Odpowiedzialnością | Wsad surowcowy do wytwarzania kryształu tlenkowego będącego szafirem na zarodku krystalizacji z masy stopionej i sposób otrzymywania takiego wsadu surowcowego |
US11905808B2 (en) * | 2018-04-27 | 2024-02-20 | Vipera Inc. | Method and apparatus for thermal fluid generation for use in enhanced oil recovery |
TW202016017A (zh) | 2018-06-15 | 2020-05-01 | 奧地利商太陽能矽公司 | 製造元素矽的方法 |
CN115142119A (zh) * | 2021-12-20 | 2022-10-04 | 常州瞻驰光电科技股份有限公司 | 一种旋转坩埚下降技术制备五氧化二钽晶体的方法及应用 |
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US631628A (en) | 1899-03-27 | 1899-08-22 | Charles T Farnham | Electric lighter for incandescent burners. |
US3401302A (en) * | 1965-11-01 | 1968-09-10 | Humphreys Corp | Induction plasma generator including cooling means, gas flow means, and operating means therefor |
CH571361A5 (de) * | 1970-03-24 | 1976-01-15 | Siemens Ag | |
DE2110274C2 (de) * | 1971-03-04 | 1973-01-04 | Fried. Krupp Gmbh, 4300 Essen | Vorrichtung zum Einschmelzen von Metallschwamm durch inerte Gasplasmen |
US4003770A (en) * | 1975-03-24 | 1977-01-18 | Monsanto Research Corporation | Plasma spraying process for preparing polycrystalline solar cells |
US4334495A (en) * | 1978-07-11 | 1982-06-15 | Trw Inc. | Method and apparatus for use in making an object |
JPS57149833A (en) * | 1981-03-10 | 1982-09-16 | Shin Etsu Chem Co Ltd | Manufacture of quartz glass product |
JPS61163171A (ja) * | 1985-01-14 | 1986-07-23 | 大阪富士工業株式会社 | セラミツクプレ−トの製造法 |
US5028572A (en) * | 1986-02-04 | 1991-07-02 | The Carborundum Company | Near net shape fused cast refractories and process for their manufacture by rapid melting/controlled rapid cooling |
JP2789751B2 (ja) * | 1989-12-27 | 1998-08-20 | 住友化学工業株式会社 | ベルヌーイ法単結晶用原料アルミナの製造法 |
JP3000109B2 (ja) * | 1990-09-20 | 2000-01-17 | 株式会社住友シチックス尼崎 | 高純度シリコン鋳塊の製造方法 |
JPH04295094A (ja) * | 1991-03-26 | 1992-10-20 | Tosoh Corp | 高品位チタンサファイア単結晶の製造方法 |
US5200595A (en) * | 1991-04-12 | 1993-04-06 | Universite De Sherbrooke | High performance induction plasma torch with a water-cooled ceramic confinement tube |
GB9108891D0 (en) * | 1991-04-25 | 1991-06-12 | Tetronics Research & Dev Co Li | Silica production |
JP2526190B2 (ja) * | 1991-12-20 | 1996-08-21 | 株式会社三社電機製作所 | サファイヤ人工結晶合成装置 |
US5549874A (en) * | 1992-04-23 | 1996-08-27 | Ebara Corporation | Discharge reactor |
US6108189A (en) * | 1996-04-26 | 2000-08-22 | Applied Materials, Inc. | Electrostatic chuck having improved gas conduits |
US5844192A (en) * | 1996-05-09 | 1998-12-01 | United Technologies Corporation | Thermal spray coating method and apparatus |
JP4094140B2 (ja) * | 1998-10-29 | 2008-06-04 | カルソニックカンセイ株式会社 | コンデンサの容量診断回路 |
JP4587350B2 (ja) * | 2001-01-19 | 2010-11-24 | 信越石英株式会社 | 透光性セラミックス体の製造方法 |
CN1226212C (zh) * | 2001-04-19 | 2005-11-09 | 株式会社尼康 | 石英玻璃元件和投影曝光装置 |
US6777045B2 (en) * | 2001-06-27 | 2004-08-17 | Applied Materials Inc. | Chamber components having textured surfaces and method of manufacture |
US20030027054A1 (en) | 2001-08-01 | 2003-02-06 | Ball Laura J. | Method for making photomask material by plasma induction |
US20030027055A1 (en) | 2001-08-01 | 2003-02-06 | Ball Laura J. | Method and feedstock for making photomask material |
JP2003129246A (ja) * | 2001-10-26 | 2003-05-08 | Sekisui Chem Co Ltd | 放電プラズマ処理装置 |
JP2003273082A (ja) * | 2002-03-14 | 2003-09-26 | Tokyo Electron Ltd | プラズマ処理装置及びプラズマ処理方法 |
JP4546032B2 (ja) * | 2002-03-19 | 2010-09-15 | パナソニック株式会社 | プラズマ処理装置及び方法 |
US6774076B2 (en) * | 2002-04-08 | 2004-08-10 | Saint-Gobain Ceramics & Plastics, Inc. | Chromia spray powders and a process for making the same |
US20040025542A1 (en) * | 2002-06-07 | 2004-02-12 | Ball Laura J. | Method of making extreme ultraviolet lithography glass substrates |
EP1910246B1 (de) * | 2005-08-02 | 2011-11-02 | MOGILEVSKY, Radion | Verfahren zur herstellung dichter blöcke |
-
2006
- 2006-07-28 EP EP06800553A patent/EP1910246B1/de not_active Not-in-force
- 2006-07-28 SI SI200631157T patent/SI1910246T1/sl unknown
- 2006-07-28 PL PL06800553T patent/PL1910246T3/pl unknown
- 2006-07-28 WO PCT/US2006/029745 patent/WO2007016489A1/en active Application Filing
- 2006-07-28 JP JP2008525080A patent/JP5068753B2/ja not_active Expired - Fee Related
- 2006-07-28 AT AT06800553T patent/ATE531678T1/de active
- 2006-07-28 EP EP10010935A patent/EP2258670A3/de not_active Withdrawn
- 2006-07-28 US US11/495,077 patent/US20070031610A1/en not_active Abandoned
-
2011
- 2011-07-28 JP JP2011165678A patent/JP2011251902A/ja active Pending
-
2012
- 2012-05-17 JP JP2012112985A patent/JP2012184163A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
SI1910246T1 (sl) | 2012-03-30 |
JP5068753B2 (ja) | 2012-11-07 |
PL1910246T3 (pl) | 2012-03-30 |
JP2011251902A (ja) | 2011-12-15 |
EP2258670A3 (de) | 2011-03-02 |
EP2258670A2 (de) | 2010-12-08 |
WO2007016489A1 (en) | 2007-02-08 |
US20070031610A1 (en) | 2007-02-08 |
JP2009502729A (ja) | 2009-01-29 |
JP2012184163A (ja) | 2012-09-27 |
EP1910246B1 (de) | 2011-11-02 |
EP1910246A1 (de) | 2008-04-16 |
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