ATE528974T1 - Verfahren zur herstellung von leiterstrukturen und anwendung - Google Patents

Verfahren zur herstellung von leiterstrukturen und anwendung

Info

Publication number
ATE528974T1
ATE528974T1 AT08157722T AT08157722T ATE528974T1 AT E528974 T1 ATE528974 T1 AT E528974T1 AT 08157722 T AT08157722 T AT 08157722T AT 08157722 T AT08157722 T AT 08157722T AT E528974 T1 ATE528974 T1 AT E528974T1
Authority
AT
Austria
Prior art keywords
nanoparticles
application
conductor structures
structures
voltage
Prior art date
Application number
AT08157722T
Other languages
English (en)
Inventor
Tomi Mattila
Ari Alastalo
Mark Allen
Heikki Seppae
Original Assignee
Teknologian Tutkimuskeskus Vtt Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teknologian Tutkimuskeskus Vtt Oy filed Critical Teknologian Tutkimuskeskus Vtt Oy
Application granted granted Critical
Publication of ATE528974T1 publication Critical patent/ATE528974T1/de

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/105—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by conversion of non-conductive material on or in the support into conductive material, e.g. by using an energy beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00031—Regular or irregular arrays of nanoscale structures, e.g. etch mask layer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/09—Use of materials for the conductive, e.g. metallic pattern
    • H05K1/092—Dispersed materials, e.g. conductive pastes or inks
    • H05K1/095—Dispersed materials, e.g. conductive pastes or inks for polymer thick films, i.e. having a permanent organic polymeric binder
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
    • H05K2201/0203—Fillers and particles
    • H05K2201/0206—Materials
    • H05K2201/0224—Conductive particles having an insulating coating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
    • H05K2201/0203—Fillers and particles
    • H05K2201/0242—Shape of an individual particle
    • H05K2201/0257—Nanoparticles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/10—Using electric, magnetic and electromagnetic fields; Using laser light
    • H05K2203/105—Using an electrical field; Special methods of applying an electric potential
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/762—Nanowire or quantum wire, i.e. axially elongated structure having two dimensions of 100 nm or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/773—Nanoparticle, i.e. structure having three dimensions of 100 nm or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y10T29/49156—Manufacturing circuit on or in base with selective destruction of conductive paths

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Powder Metallurgy (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Silicon Compounds (AREA)
  • Conductive Materials (AREA)
  • Processes Specially Adapted For Manufacturing Cables (AREA)
AT08157722T 2007-06-08 2008-06-06 Verfahren zur herstellung von leiterstrukturen und anwendung ATE528974T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20075430A FI122644B (fi) 2007-06-08 2007-06-08 Menetelmä sähköisesti johtavien tai puolijohtavien reittien muodostamiseksi substraatille sekä menetelmän käyttö transistorien tuottamiseen ja anturien valmistukseen

Publications (1)

Publication Number Publication Date
ATE528974T1 true ATE528974T1 (de) 2011-10-15

Family

ID=38212401

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08157722T ATE528974T1 (de) 2007-06-08 2008-06-06 Verfahren zur herstellung von leiterstrukturen und anwendung

Country Status (5)

Country Link
US (1) US7759160B2 (de)
EP (1) EP2001273B1 (de)
CN (1) CN101325177A (de)
AT (1) ATE528974T1 (de)
FI (1) FI122644B (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI122009B (fi) * 2007-06-08 2011-07-15 Teknologian Tutkimuskeskus Vtt Nanopartikkeleihin perustuvat rakenteet ja menetelmä niiden valmistamiseksi
SG155778A1 (en) * 2008-03-10 2009-10-29 Turbine Overhaul Services Pte Method for diffusion bonding metallic components with nanoparticle foil
CN101908388B (zh) * 2009-06-04 2013-01-23 财团法人工业技术研究院 纳米点状材料的形成方法
GB201604818D0 (en) * 2016-03-22 2016-05-04 Xtpl Sp Z O O Method for forming structures upon a substrate
GB201812691D0 (en) * 2018-08-03 2018-09-19 Xtpl S A Method of forming a structure upon a substrate

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2676416B1 (fr) * 1991-05-15 1996-10-04 Sambre & Meuse Usines Bogie ferroviaire avec chassis a deformabilite selective.
US5471163A (en) 1993-11-16 1995-11-28 Hewlett-Packard Company Tab circuit fusible links for disconnection or encoding information
US6807079B2 (en) * 2002-11-01 2004-10-19 Hewlett-Packard Development Company, L.P. Device having a state dependent upon the state of particles dispersed in a carrier
EP1579499B1 (de) * 2002-12-18 2010-10-27 International Business Machines Corporation Verfahren zur selbstanordnung elektronischer schaltkreise und damit hergestellte schaltungen
DE102004020497B8 (de) 2004-04-26 2006-06-14 Infineon Technologies Ag Verfahren zur Herstellung von Durchkontaktierungen und Halbleiterbauteil mit derartigen Durchkontaktierungen
US8421231B2 (en) * 2005-07-01 2013-04-16 National University Of Singapore Electrically conductive composite
WO2007038950A1 (en) 2005-09-28 2007-04-12 Stichting Dutch Polymer Institute Method for generation of metal surface structures and apparatus therefor
FI121562B (fi) * 2006-07-21 2010-12-31 Valtion Teknillinen Menetelmä johteiden ja puolijohteiden valmistamiseksi
JP5636188B2 (ja) 2006-07-21 2014-12-03 ヴァルティオン テクニリネン ツッツキムスケスクス 導体および半導体の製造方法

Also Published As

Publication number Publication date
FI20075430L (fi) 2008-12-09
EP2001273A2 (de) 2008-12-10
FI122644B (fi) 2012-04-30
EP2001273B1 (de) 2011-10-12
EP2001273A3 (de) 2010-02-24
CN101325177A (zh) 2008-12-17
US20090014821A1 (en) 2009-01-15
US7759160B2 (en) 2010-07-20
FI20075430A0 (fi) 2007-06-08

Similar Documents

Publication Publication Date Title
ATE553485T1 (de) Verfahren zur herstellung einer durchsichtigen, leitfähigen folie mit kohlenstoffnanoröhrchen und bindemittel sowie danach hergestellte durchsichtige, leitfähige folie
Zhu et al. Assembly and electronic applications of colloidal nanomaterials
ATE528974T1 (de) Verfahren zur herstellung von leiterstrukturen und anwendung
WO2008027078A3 (en) Nanobioelectronics
WO2008033889A3 (en) Highly accessible, nanotube electrodes for large surface area contact applications
WO2011102864A3 (en) On-demand nanoelectronics platform
ATE468006T1 (de) Verfahren zur herstellung einer aktiven elektrode unter verwendung von flexibler schaltungstechnologie und flexible schaltung umfassend eine solche elektrode
DE60323435D1 (de) Elektronisches Bauelement mit einer elektrisch leitenden Verbindung aus Karbon-Nanoröhren und Verfahren zu seiner Herstellung
ATE526376T1 (de) Elektrisch leitfähige beschichtungszusammensetzung
WO2008054411A8 (en) Directed assembly of carbon nanotubes and nanoparticles using nanotemplates with nanotrenches
ATE545064T1 (de) Verfahren zur aufbringung einer struktur aus metall, metalloxid und/oder halbleitermaterial auf einem träger
ATE304786T1 (de) Elektrolumineszente vorrichtung und herstellungsverfahren
FI20075431A0 (fi) Nanopartikkeleihin perustuvat rakenteet ja menetelmät niiden valmistamiseksi
DE502004000594D1 (de) Quantenpunkt aus elektrisch leitendem kohlenstoff, verfahren zur herstellung und anwendung
ATE370536T1 (de) Verfahren zur herstellung einer mehrschicht- kohlebürste
FI20075428A0 (fi) Nanopertikkelisysteemeihin liittyvä menetelmä ja laite
ATE392696T1 (de) Nanometervorrichtung zur messung der leitfähigkeit und quanteneffekte einzelner moleküle sowie verfahren zur herstellung und verwendung
EP1636826A2 (de) Verbindung zur bildung einer selbstorganisierenden monolage, schichtstruktur, halbleiterbauelement mit einer schichtstruktur und verfahren zur herstellung einer schichtstruktur
ATE515390T1 (de) Verfahren zur herstellung eines erwärmungselements durch ablagerung dünner schichten auf einem isolationssubstrat, daraus resultierendes element und benutzung des letzten
DK1991716T3 (da) Element
ATE476775T1 (de) Vorrichtung zur elektrischen feldsteuerung
ATE444570T1 (de) Vorrichtung auf organischer basis und herstellungsverfahren dafür
EP4219397A4 (de) Wässrige kohlenstoffnanoröhrchendispersion, leitfähiger film, elektrode und solarzelle und verfahren zur herstellung davon
DE60330788D1 (de) Verfahren zur herstellung einer drahtförmigen nanostruktur aus einer halbleitenden schicht
RU2006140760A (ru) Гетероструктура для фотокатода

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties