ATE520005T1 - Vorrichtung und verfahren zur optischen distanzmessung - Google Patents
Vorrichtung und verfahren zur optischen distanzmessungInfo
- Publication number
- ATE520005T1 ATE520005T1 AT07108013T AT07108013T ATE520005T1 AT E520005 T1 ATE520005 T1 AT E520005T1 AT 07108013 T AT07108013 T AT 07108013T AT 07108013 T AT07108013 T AT 07108013T AT E520005 T1 ATE520005 T1 AT E520005T1
- Authority
- AT
- Austria
- Prior art keywords
- light
- structured
- detector system
- light beam
- circular
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/383,089 US20070263228A1 (en) | 2006-05-12 | 2006-05-12 | Device and process for optical distance measurement |
US11/737,408 US7768629B2 (en) | 2006-05-12 | 2007-04-19 | Device and process for optical distance measurement |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE520005T1 true ATE520005T1 (de) | 2011-08-15 |
Family
ID=38066589
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT07108013T ATE520005T1 (de) | 2006-05-12 | 2007-05-11 | Vorrichtung und verfahren zur optischen distanzmessung |
Country Status (3)
Country | Link |
---|---|
US (1) | US7768629B2 (de) |
EP (1) | EP1855083B1 (de) |
AT (1) | ATE520005T1 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010510485A (ja) * | 2006-11-17 | 2010-04-02 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 外部ビームスプリッタを有しない自己混合光コヒーレンス検出器 |
GB2451442B (en) * | 2007-07-30 | 2013-03-06 | Lein Applied Diagnostics Ltd | Optical measurement apparatus and method therefor |
CA2884632C (en) * | 2007-08-31 | 2016-10-25 | Abb Ltd. | Web thickness measurement device |
US8194233B2 (en) | 2008-04-11 | 2012-06-05 | Microsoft Corporation | Method and system to reduce stray light reflection error in time-of-flight sensor arrays |
KR101026030B1 (ko) * | 2008-10-21 | 2011-03-30 | 삼성전기주식회사 | 거리 측정 장치 |
DE102010029144A1 (de) | 2009-07-02 | 2011-01-05 | Voith Patent Gmbh | Verfahren zur berührungslosen Bestimmung der Dicke einer Materialbahn |
EP2449338B1 (de) | 2009-07-02 | 2013-08-14 | Voith Patent GmbH | Verfahren und vorrichtung zur berührungslosen bestimmung der dicke einer materialbahn mit korrektur des ausrichtfehlers |
DE102009027425A1 (de) | 2009-07-02 | 2011-01-05 | Voith Patent Gmbh | Verfahren zur Standardisierung eines optischen Dickensensors |
DE102009027421A1 (de) | 2009-07-02 | 2011-01-05 | Voith Patent Gmbh | Verfahren und Vorrichtung zur berührungslosen Bestimmung der Dicke einer Materialbahn |
DE102009027424A1 (de) | 2009-07-02 | 2011-01-05 | Voith Patent Gmbh | Verfahren zum Kalibrieren eines optischen Dickensensors |
DE102009027430A1 (de) | 2009-07-02 | 2011-01-05 | Voith Patent Gmbh | Verfahren zur berührungslosen Bestimmung der Dicke einer Materialbahn |
DE102009027428A1 (de) | 2009-07-02 | 2011-01-05 | Voith Patent Gmbh | Verfahren zum Kalibrieren einer optischen Dickensensors |
NO336546B1 (no) * | 2010-09-24 | 2015-09-21 | Tomra Sorting As | Apparat og fremgangsmåte for inspeksjon av materie |
DE102011076491A1 (de) * | 2011-05-26 | 2012-11-29 | Esw Gmbh | Messeinrichtung zur Distanzmessung |
US9062964B1 (en) * | 2012-05-07 | 2015-06-23 | Clearwater Paper Corporation | Laser caliper measurement of paper material |
US9885878B2 (en) * | 2013-04-10 | 2018-02-06 | Fei Efa, Inc. | Apparatus and method for annular optical power management |
DE112017007344T5 (de) * | 2017-03-31 | 2019-12-12 | Sony Corporation | Abstandsmessvorrichtung und fahrzeug |
US10976151B2 (en) | 2018-12-26 | 2021-04-13 | Industrial Technology Research Institute | Optical interferometer with reference arm longer than sample arm |
CN109916347A (zh) * | 2019-04-16 | 2019-06-21 | 合肥工业大学 | 一种基于近红外低相干光掺杂硅晶片表面形貌测量方法 |
KR20220123177A (ko) | 2020-06-11 | 2022-09-06 | 에이리더 비전 테크놀로지 코포레이션 리미티드 | 분광 공초점 측정장치 및 그 측정 방법 |
CN113359146A (zh) * | 2021-07-05 | 2021-09-07 | 上海钊晟传感技术有限公司 | 一种环形反射结构的激光三角测距传感器 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1595422A (en) | 1977-04-28 | 1981-08-12 | Nat Res Dev | Scaning microscopes |
JPH0652171B2 (ja) * | 1987-02-10 | 1994-07-06 | 株式会社オカダ | 光学式非接触位置測定装置 |
US4844617A (en) * | 1988-01-20 | 1989-07-04 | Tencor Instruments | Confocal measuring microscope with automatic focusing |
EP0534288A1 (de) | 1991-09-26 | 1993-03-31 | Tesa S.A. | Optoelektronische Messanordnung einer Abmessung |
US5737084A (en) * | 1995-09-29 | 1998-04-07 | Takaoka Electric Mtg. Co., Ltd. | Three-dimensional shape measuring apparatus |
JPH09113523A (ja) * | 1995-10-23 | 1997-05-02 | Canon Inc | ドップラー速度計及び駆動システム |
US5831736A (en) * | 1996-08-29 | 1998-11-03 | Washington University | Method and apparatus for generating a three-dimensional topographical image of a microscopic specimen |
JP3438855B2 (ja) * | 1997-01-23 | 2003-08-18 | 横河電機株式会社 | 共焦点装置 |
EP1329690A1 (de) * | 2002-01-22 | 2003-07-23 | Leica Geosystems AG | Verfahren und Vorrichtung zum automatischen Auffinden von Zielmarken |
JP2004037317A (ja) * | 2002-07-04 | 2004-02-05 | Murata Mfg Co Ltd | 三次元形状測定方法、三次元形状測定装置 |
US6904199B2 (en) * | 2002-08-14 | 2005-06-07 | Infraredx, Inc. | Optical catheter with double-clad fiber |
US7102761B2 (en) * | 2003-06-13 | 2006-09-05 | Zygo Corporation | Scanning interferometry |
DE10361161A1 (de) | 2003-12-22 | 2005-07-21 | Voith Paper Patent Gmbh | Messvorrichtung |
US20060232790A1 (en) * | 2005-04-18 | 2006-10-19 | Lee Chase | Confocal measurement method and apparatus in a paper machine |
-
2007
- 2007-04-19 US US11/737,408 patent/US7768629B2/en not_active Expired - Fee Related
- 2007-05-11 EP EP07108013A patent/EP1855083B1/de not_active Not-in-force
- 2007-05-11 AT AT07108013T patent/ATE520005T1/de active
Also Published As
Publication number | Publication date |
---|---|
EP1855083B1 (de) | 2011-08-10 |
US7768629B2 (en) | 2010-08-03 |
US20070263203A1 (en) | 2007-11-15 |
EP1855083A1 (de) | 2007-11-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
UEP | Publication of translation of european patent specification |
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