ATE518615T1 - Verfahren zum bonden von flächen mittels eines klebstoffes, der mit laser gehartet wird - Google Patents
Verfahren zum bonden von flächen mittels eines klebstoffes, der mit laser gehartet wirdInfo
- Publication number
- ATE518615T1 ATE518615T1 AT06744034T AT06744034T ATE518615T1 AT E518615 T1 ATE518615 T1 AT E518615T1 AT 06744034 T AT06744034 T AT 06744034T AT 06744034 T AT06744034 T AT 06744034T AT E518615 T1 ATE518615 T1 AT E518615T1
- Authority
- AT
- Austria
- Prior art keywords
- laser
- curable adhesive
- bonding surfaces
- heat
- adhesive
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00269—Bonding of solid lids or wafers to the substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
- B29C65/14—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
- B29C65/16—Laser beams
- B29C65/1603—Laser beams characterised by the type of electromagnetic radiation
- B29C65/1612—Infrared [IR] radiation, e.g. by infrared lasers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
- B29C65/14—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
- B29C65/16—Laser beams
- B29C65/1603—Laser beams characterised by the type of electromagnetic radiation
- B29C65/1612—Infrared [IR] radiation, e.g. by infrared lasers
- B29C65/1616—Near infrared radiation [NIR], e.g. by YAG lasers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
- B29C65/14—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
- B29C65/16—Laser beams
- B29C65/1696—Laser beams making use of masks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/03—Bonding two components
- B81C2203/032—Gluing
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
- Micromachines (AREA)
- Semiconductor Lasers (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0510873.3A GB0510873D0 (en) | 2005-05-27 | 2005-05-27 | Laser assisted bonding of surfaces |
PCT/GB2006/001971 WO2006126015A1 (en) | 2005-05-27 | 2006-05-30 | Laser assisted system and method for bonding of surfaces ; microcavity for packaging mems devices |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE518615T1 true ATE518615T1 (de) | 2011-08-15 |
Family
ID=34834766
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT06744034T ATE518615T1 (de) | 2005-05-27 | 2006-05-30 | Verfahren zum bonden von flächen mittels eines klebstoffes, der mit laser gehartet wird |
Country Status (5)
Country | Link |
---|---|
US (1) | US20110061884A1 (de) |
EP (1) | EP1907160B1 (de) |
AT (1) | ATE518615T1 (de) |
GB (1) | GB0510873D0 (de) |
WO (1) | WO2006126015A1 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2480270T3 (es) * | 2010-01-18 | 2014-07-25 | Homag Holzbearbeitungssysteme Ag | Dispositivo y procedimiento para el revestimiento de piezas de trabajo |
SG184064A1 (en) * | 2010-03-15 | 2012-10-30 | Agency Science Tech & Res | A process for forming a laminated structure |
KR20130118491A (ko) * | 2012-04-20 | 2013-10-30 | 삼성디스플레이 주식회사 | 레이저 실링 장치 및 이를 이용한 유기 발광 표시 장치의 제조 방법 |
EP2747129A1 (de) * | 2012-12-18 | 2014-06-25 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Härten eines wärmehärtbaren Werkstoffs in einer eingebetteten Härtezone |
US9416003B2 (en) * | 2014-02-24 | 2016-08-16 | Freescale Semiconductor, Inc. | Semiconductor die with high pressure cavity |
DE102015202575A1 (de) * | 2015-02-12 | 2016-08-18 | Robert Bosch Gmbh | Vorrichtung zum Bearbeiten eines Substrats |
US9832867B2 (en) * | 2015-11-23 | 2017-11-28 | Medtronic, Inc. | Embedded metallic structures in glass |
CN108746996A (zh) * | 2018-08-10 | 2018-11-06 | 深圳市联华材料技术有限公司 | 一种基于激光射线的材料粘合方法和装置 |
KR102182781B1 (ko) * | 2019-01-04 | 2020-11-25 | 주식회사 프로텍 | 레이저 본딩 장치용 마스크 교체 유닛 |
KR20200136698A (ko) * | 2019-05-28 | 2020-12-08 | 코닝 인코포레이티드 | 유리 라미네이트 제조 방법 및 장치 |
US20210398936A1 (en) * | 2020-06-23 | 2021-12-23 | Amkor Technology Singapore Holding Pte. Ltd. | Laser bonded devices, laser bonding tools, and related methods |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3741916C2 (de) * | 1987-12-10 | 1996-07-18 | Resma Gmbh Fuegetechnik Indust | Verfahren zum Aushärten von Klebstoffen auf Kunststoffbasis |
JPH05241168A (ja) * | 1992-02-27 | 1993-09-21 | Nec Kagoshima Ltd | 液晶パネルの製造方法 |
JPH05290490A (ja) * | 1992-04-10 | 1993-11-05 | Fujitsu Ltd | 磁気ヘッドの製造方法 |
US6072148A (en) * | 1996-12-10 | 2000-06-06 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Device for producing connections between two respective contact elements by means of laser energy |
US6624003B1 (en) * | 2002-02-06 | 2003-09-23 | Teravicta Technologies, Inc. | Integrated MEMS device and package |
US6908791B2 (en) * | 2002-04-29 | 2005-06-21 | Texas Instruments Incorporated | MEMS device wafer-level package |
FR2850390B1 (fr) * | 2003-01-24 | 2006-07-14 | Soitec Silicon On Insulator | Procede d'elimination d'une zone peripherique de colle lors de la fabrication d'un substrat composite |
-
2005
- 2005-05-27 GB GBGB0510873.3A patent/GB0510873D0/en not_active Ceased
-
2006
- 2006-05-30 WO PCT/GB2006/001971 patent/WO2006126015A1/en active Application Filing
- 2006-05-30 EP EP06744034A patent/EP1907160B1/de not_active Not-in-force
- 2006-05-30 US US11/915,630 patent/US20110061884A1/en not_active Abandoned
- 2006-05-30 AT AT06744034T patent/ATE518615T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US20110061884A1 (en) | 2011-03-17 |
WO2006126015A1 (en) | 2006-11-30 |
EP1907160A1 (de) | 2008-04-09 |
GB0510873D0 (en) | 2005-07-06 |
EP1907160B1 (de) | 2011-08-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |