ATE511939T1 - Positionierverfahren und -vorrichtung - Google Patents

Positionierverfahren und -vorrichtung

Info

Publication number
ATE511939T1
ATE511939T1 AT04725100T AT04725100T ATE511939T1 AT E511939 T1 ATE511939 T1 AT E511939T1 AT 04725100 T AT04725100 T AT 04725100T AT 04725100 T AT04725100 T AT 04725100T AT E511939 T1 ATE511939 T1 AT E511939T1
Authority
AT
Austria
Prior art keywords
path
workpiece
datum position
laser
transport system
Prior art date
Application number
AT04725100T
Other languages
English (en)
Inventor
Robert Bann
Neil Sykes
Original Assignee
Oerlikon Solar Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Solar Ag filed Critical Oerlikon Solar Ag
Application granted granted Critical
Publication of ATE511939T1 publication Critical patent/ATE511939T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B23K26/0861—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane in at least in three axial directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
AT04725100T 2003-04-03 2004-04-01 Positionierverfahren und -vorrichtung ATE511939T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0307723A GB2400063B (en) 2003-04-03 2003-04-03 Positioning method and apparatus and a product thereof
PCT/GB2004/001432 WO2004087363A1 (en) 2003-04-03 2004-04-01 Positioning method, apparatus and a product thereof

Publications (1)

Publication Number Publication Date
ATE511939T1 true ATE511939T1 (de) 2011-06-15

Family

ID=9956127

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04725100T ATE511939T1 (de) 2003-04-03 2004-04-01 Positionierverfahren und -vorrichtung

Country Status (7)

Country Link
US (2) US7371993B2 (de)
EP (1) EP1613445B1 (de)
JP (1) JP4934762B2 (de)
KR (1) KR101043370B1 (de)
AT (1) ATE511939T1 (de)
GB (1) GB2400063B (de)
WO (1) WO2004087363A1 (de)

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GB0427104D0 (en) 2004-12-10 2005-01-12 Exitech Ltd Positioning device
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US20060236721A1 (en) * 2005-04-20 2006-10-26 United States Of America As Represented By The Dept Of The Army Method of manufacture for a compound eye
US8278590B2 (en) * 2005-05-27 2012-10-02 Resonetics, LLC Apparatus for minimizing a heat affected zone during laser micro-machining
JP2007021528A (ja) * 2005-07-15 2007-02-01 Matsushita Electric Ind Co Ltd レーザ加工装置およびその調整方法
US8176650B2 (en) * 2005-12-13 2012-05-15 Kimberly-Clark Worldwide, Inc. Method for warming up or cooling down a through-air dryer
JP2007203335A (ja) * 2006-02-02 2007-08-16 Sumitomo Heavy Ind Ltd レーザ加工装置及び加工方法
GB2439529A (en) * 2006-06-12 2008-01-02 Exitech Ltd Positioning device for laser micro-machining
US20090181553A1 (en) * 2008-01-11 2009-07-16 Blake Koelmel Apparatus and method of aligning and positioning a cold substrate on a hot surface
US8288678B2 (en) * 2008-12-18 2012-10-16 Ppg Industries Ohio, Inc. Device for and method of maintaining a constant distance between a cutting edge and a reference surface
WO2010114654A1 (en) * 2009-04-03 2010-10-07 Research Triangle Institute Cantilever-based mems optical scanning apparatus, system, and method
TWI383855B (zh) * 2009-12-01 2013-02-01 Ind Tech Res Inst 雷射掃描裝置及其方法
CN102861913A (zh) * 2012-09-25 2013-01-09 江苏大学 一种阻抗匹配飞片及其在激光驱动飞片柔性成形中的应用
EP3668461A4 (de) * 2017-08-18 2021-04-28 Ellex Medical PTY Ltd Ophthalmischer mehrpunktlaser
US11205562B2 (en) 2018-10-25 2021-12-21 Tokyo Electron Limited Hybrid electron beam and RF plasma system for controlled content of radicals and ions

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Also Published As

Publication number Publication date
KR101043370B1 (ko) 2011-06-21
US7371993B2 (en) 2008-05-13
US8263901B2 (en) 2012-09-11
WO2004087363A1 (en) 2004-10-14
GB2400063B (en) 2006-02-15
KR20050111790A (ko) 2005-11-28
US20060196852A1 (en) 2006-09-07
US20080237206A1 (en) 2008-10-02
GB0307723D0 (en) 2003-05-07
JP2006521930A (ja) 2006-09-28
GB2400063A (en) 2004-10-06
EP1613445B1 (de) 2011-06-08
JP4934762B2 (ja) 2012-05-16
EP1613445A1 (de) 2006-01-11

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