ATE496282T1 - Scale- und readhead-system - Google Patents
Scale- und readhead-systemInfo
- Publication number
- ATE496282T1 ATE496282T1 AT06808419T AT06808419T ATE496282T1 AT E496282 T1 ATE496282 T1 AT E496282T1 AT 06808419 T AT06808419 T AT 06808419T AT 06808419 T AT06808419 T AT 06808419T AT E496282 T1 ATE496282 T1 AT E496282T1
- Authority
- AT
- Austria
- Prior art keywords
- scale
- incremental
- readhead
- detector
- output signal
- Prior art date
Links
- 238000005259 measurement Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/366—Particular pulse shapes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34776—Absolute encoders with analogue or digital scales
- G01D5/34784—Absolute encoders with analogue or digital scales with only analogue scales or both analogue and incremental scales
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Vehicle Body Suspensions (AREA)
- Television Signal Processing For Recording (AREA)
- Blow-Moulding Or Thermoforming Of Plastics Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Magnetic Heads (AREA)
- Signal Processing For Digital Recording And Reproducing (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB0522651.9A GB0522651D0 (en) | 2005-11-07 | 2005-11-07 | Scale and readhead system |
| PCT/GB2006/004122 WO2007052052A1 (en) | 2005-11-07 | 2006-11-06 | Scale and readhead system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE496282T1 true ATE496282T1 (de) | 2011-02-15 |
Family
ID=35516453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT06808419T ATE496282T1 (de) | 2005-11-07 | 2006-11-06 | Scale- und readhead-system |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US7624513B2 (de) |
| EP (1) | EP1946048B1 (de) |
| JP (1) | JP5017275B2 (de) |
| CN (1) | CN101300463B (de) |
| AT (1) | ATE496282T1 (de) |
| DE (1) | DE602006019765D1 (de) |
| ES (1) | ES2359941T3 (de) |
| GB (1) | GB0522651D0 (de) |
| WO (1) | WO2007052052A1 (de) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5747342B2 (ja) * | 2010-11-15 | 2015-07-15 | セイコーNpc株式会社 | 光学式エンコーダ |
| JP6087722B2 (ja) | 2013-05-16 | 2017-03-01 | 株式会社ミツトヨ | 原点信号発生装置及び原点信号発生システム |
| JP2014224745A (ja) | 2013-05-16 | 2014-12-04 | 株式会社ミツトヨ | 原点信号発生装置及び原点信号発生システム |
| JP7153997B2 (ja) | 2013-10-01 | 2022-10-17 | レニショウ パブリック リミテッド カンパニー | 基準マーク検出器配列 |
| EP3052897B1 (de) | 2013-10-01 | 2019-07-17 | Renishaw PLC | Messungscodierer |
| WO2015049172A1 (en) | 2013-10-01 | 2015-04-09 | Renishaw Plc | Position measurement encoder |
| CN105899912B (zh) * | 2013-11-05 | 2019-05-03 | 瑞尼斯豪公司 | 位置测量编码器校准 |
| WO2015078860A1 (en) | 2013-11-26 | 2015-06-04 | Renishaw Plc | Metrological scale |
| JP2019517004A (ja) * | 2016-05-25 | 2019-06-20 | レニショウ パブリック リミテッド カンパニーRenishaw Public Limited Company | 適応性のある基準マーク検出プロセス |
| JP7705815B2 (ja) * | 2022-03-03 | 2025-07-10 | 住友重機械工業株式会社 | 測位装置、駆動装置、測位方法、測位プログラム |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4168911A (en) | 1975-05-07 | 1979-09-25 | Diffracto, Ltd. | Diffractographic and other sensors utilizing diffraction waves |
| JPS5385449A (en) * | 1977-01-05 | 1978-07-27 | Meidensha Electric Mfg Co Ltd | Zero point detecting system |
| JPS5648501A (en) * | 1979-09-28 | 1981-05-01 | Sumitomo Electric Ind Ltd | Length measuring device |
| DE3018496A1 (de) * | 1980-05-14 | 1981-11-19 | Walter Dipl.-Ing. Dr.-Ing. 8012 Ottobrunn Mehnert | Verfahren und vorrichtung zur messung eines winkels |
| EP0843159A3 (de) | 1991-11-06 | 1999-06-02 | Renishaw Transducer Systems Limited | Opto-elektronischer Skalenableseapparat |
| GB9605278D0 (en) * | 1996-03-13 | 1996-05-15 | Renishaw Plc | Opto-electronic scale reading apparatus |
| US5844814A (en) * | 1996-09-27 | 1998-12-01 | International Business Machines Corporation | Optical position sensing device and method for sub-micron measurement |
| DE19754595B4 (de) * | 1997-12-10 | 2011-06-01 | Dr. Johannes Heidenhain Gmbh | Lichtelektrische Positionsmeßeinrichtung |
| CN1144063C (zh) * | 1998-03-09 | 2004-03-31 | 葛莱特有限公司 | 光学平移测量 |
| US6029363A (en) * | 1998-04-03 | 2000-02-29 | Mitutoyo Corporation | Self-calibrating position transducer system and method |
| EP1006342B1 (de) * | 1998-12-03 | 2003-09-03 | Schneeberger Holding AG | Markierungsverfahren von Messspuren |
| GB0103582D0 (en) | 2001-02-14 | 2001-03-28 | Renishaw Plc | Position determination system |
| US6922907B2 (en) * | 2001-04-05 | 2005-08-02 | Anton Rodi | Measuring system for recording absolute angular or position values |
| JP4274751B2 (ja) * | 2001-07-03 | 2009-06-10 | オリンパス株式会社 | エンコーダ |
| JP3912779B2 (ja) * | 2002-05-08 | 2007-05-09 | 松下電器産業株式会社 | 磁気式位置検出装置 |
| JP4265929B2 (ja) * | 2003-05-20 | 2009-05-20 | 株式会社ミツトヨ | 変位測定装置 |
| GB0413827D0 (en) * | 2004-06-21 | 2004-07-21 | Renishaw Plc | Scale reading apparatus |
| GB0523273D0 (en) * | 2005-11-16 | 2005-12-21 | Renishaw Plc | Scale and readhead apparatus and method |
-
2005
- 2005-11-07 GB GBGB0522651.9A patent/GB0522651D0/en not_active Ceased
-
2006
- 2006-11-06 WO PCT/GB2006/004122 patent/WO2007052052A1/en not_active Ceased
- 2006-11-06 CN CN2006800413900A patent/CN101300463B/zh not_active Expired - Fee Related
- 2006-11-06 EP EP06808419A patent/EP1946048B1/de active Active
- 2006-11-06 DE DE602006019765T patent/DE602006019765D1/de active Active
- 2006-11-06 ES ES06808419T patent/ES2359941T3/es active Active
- 2006-11-06 AT AT06808419T patent/ATE496282T1/de not_active IP Right Cessation
- 2006-11-06 US US12/083,531 patent/US7624513B2/en active Active
- 2006-11-06 JP JP2008539488A patent/JP5017275B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| GB0522651D0 (en) | 2005-12-14 |
| JP2009515182A (ja) | 2009-04-09 |
| WO2007052052A1 (en) | 2007-05-10 |
| EP1946048B1 (de) | 2011-01-19 |
| DE602006019765D1 (en) | 2011-03-03 |
| US20090064524A1 (en) | 2009-03-12 |
| CN101300463A (zh) | 2008-11-05 |
| US7624513B2 (en) | 2009-12-01 |
| EP1946048A1 (de) | 2008-07-23 |
| ES2359941T3 (es) | 2011-05-30 |
| JP5017275B2 (ja) | 2012-09-05 |
| CN101300463B (zh) | 2010-08-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2006003452A3 (en) | Scale reading apparatus | |
| EP2587224B1 (de) | Verschiebungserkennungsvorrichtung, Skalakalibrierverfahren und Skalakalibrierprogramm | |
| CN102138060B (zh) | 光学位置测量设备 | |
| ATE496282T1 (de) | Scale- und readhead-system | |
| EP2458441A3 (de) | Messverfahren, Vorrichtung und Substrat | |
| SG153747A1 (en) | Alignment method, alignment system and product with alignment mark | |
| DE10326770B4 (de) | Sensorsystem zum Bestimmen der Breite eines Objekts | |
| DE502008002966D1 (de) | Kalibrierung einer positionsmesseinrichtung einer optischen einrichtung | |
| DE50311354D1 (de) | Positionsmessverfahren und positionsmesssystem zur signalperioden-vervielfachung | |
| DE602005022244D1 (de) | Methode zur Messung einer physikalischen Grösse mittels eines optischen Brillouin Fasersensors. | |
| ATE464578T1 (de) | Verfahren und vorrichtung für redundante abstandsmessung und für das aufheben von phasenversatz | |
| SG158187A1 (en) | Lithographic apparatus with multiple alignment arrangements and alignment measurement method | |
| ATE401552T1 (de) | Positionsmesseinrichtung und verfahren zum betrieb einer positionsmesseinrichtung | |
| JP2005345375A (ja) | 電磁誘導式absエンコーダ | |
| DE502004009814D1 (de) | Optische Positionsmesseinrichtung | |
| ATE427476T1 (de) | Vorrichtung und verfahren zur koordinatenmessung | |
| DE10332413B3 (de) | Positionsmessvorrichtung zum Ermitteln von Winkel- oder Längenpositionen | |
| EP0375097A3 (de) | Profilierung eines Strahlungsbündels für Stereolithographie | |
| TW200716973A (en) | Drift calibration method and device for the potentiometric sensor | |
| ATE281963T1 (de) | Verfahren zur bestimmung der von einem körper zurückgelegten wegstrecke sowie vorrichtung hierfür | |
| DE60308230D1 (de) | Verfahren und vorrichtung für einen leistungsverstärker mit hoher genauigkeit eines ausgangssignals | |
| EP1541992A4 (de) | Messinstrument für nichtlineare komplexe empfindlichkeit mit zeitauflösung | |
| ATE497607T1 (de) | Verfahren und vorrichtung zum messen von signalphasenverschiebungen | |
| JP2009271076A6 (ja) | 位置および/または速度を検出する測定装置 | |
| EP4506654A4 (de) | Vorrichtung zur messung dreidimensionaler informationen und messverfahren sowie elektronische vorrichtung |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |