ATE492027T1 - Elektrische vorrichtung mit einem wärmeerzeugenden elektrischen widerstandselement und wärmeableitungsmitteln dafür - Google Patents
Elektrische vorrichtung mit einem wärmeerzeugenden elektrischen widerstandselement und wärmeableitungsmitteln dafürInfo
- Publication number
- ATE492027T1 ATE492027T1 AT05254890T AT05254890T ATE492027T1 AT E492027 T1 ATE492027 T1 AT E492027T1 AT 05254890 T AT05254890 T AT 05254890T AT 05254890 T AT05254890 T AT 05254890T AT E492027 T1 ATE492027 T1 AT E492027T1
- Authority
- AT
- Austria
- Prior art keywords
- resistive element
- electrical device
- resistance element
- dissipation means
- heat dissipation
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C1/00—Details
- H01C1/08—Cooling, heating or ventilating arrangements
- H01C1/084—Cooling, heating or ventilating arrangements using self-cooling, e.g. fins, heat sinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C3/00—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids
- H01C3/10—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids the resistive element having zig-zag or sinusoidal configuration
- H01C3/12—Non-adjustable metal resistors made of wire or ribbon, e.g. coiled, woven or formed as grids the resistive element having zig-zag or sinusoidal configuration lying in one plane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/006—Thin film resistors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/26—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
- H05B3/265—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base the insulating base being an inorganic material, e.g. ceramic
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
- H05B2203/003—Heaters using a particular layout for the resistive material or resistive elements using serpentine layout
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Computer Hardware Design (AREA)
- Non-Adjustable Resistors (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Physical Vapour Deposition (AREA)
- Electronic Switches (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Thermistors And Varistors (AREA)
- Resistance Heating (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0418218.4A GB0418218D0 (en) | 2004-08-16 | 2004-08-16 | Electrical device having a heat generating electrically resistive element and heat dissipating means therefor |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE492027T1 true ATE492027T1 (de) | 2011-01-15 |
Family
ID=33017558
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05254890T ATE492027T1 (de) | 2004-08-16 | 2005-08-05 | Elektrische vorrichtung mit einem wärmeerzeugenden elektrischen widerstandselement und wärmeableitungsmitteln dafür |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1628331B1 (de) |
JP (1) | JP2006114881A (de) |
AT (1) | ATE492027T1 (de) |
DE (1) | DE602005025294D1 (de) |
GB (1) | GB0418218D0 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5665542B2 (ja) * | 2007-09-27 | 2015-02-04 | ヴィシェイ デール エレクトロニクス インコーポレイテッド | 電力抵抗器とその製造方法 |
US7843309B2 (en) | 2007-09-27 | 2010-11-30 | Vishay Dale Electronics, Inc. | Power resistor |
CN103093908B (zh) * | 2007-09-27 | 2017-04-26 | 韦沙戴尔电子公司 | 功率电阻器 |
WO2012081369A1 (ja) * | 2010-12-17 | 2012-06-21 | 新日鐵化学株式会社 | 電磁波ノイズ抑制体、その使用方法及び電子機器 |
JP2014241451A (ja) * | 2014-09-18 | 2014-12-25 | 住友金属鉱山株式会社 | 銅導電体層付き抵抗薄膜素子 |
CN206059059U (zh) * | 2016-09-07 | 2017-03-29 | 南京南瑞继保电气有限公司 | 一种平面电阻器的外壳结构 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4498071A (en) * | 1982-09-30 | 1985-02-05 | Dale Electronics, Inc. | High resistance film resistor |
US5355281A (en) | 1993-06-29 | 1994-10-11 | E.B.G. Elektronische Bauelemente Gesellschaft M.B.H. | Electrical device having a bonded ceramic-copper heat transfer medium |
CA2252113A1 (en) * | 1997-10-29 | 1999-04-29 | Yoshihiko Numata | Substrate and process for producing the same |
GB2360530A (en) | 2000-03-25 | 2001-09-26 | Plasma Quest Ltd | High target utilisation sputtering system with remote plasma source |
US7106167B2 (en) * | 2002-06-28 | 2006-09-12 | Heetronix | Stable high temperature sensor system with tungsten on AlN |
-
2004
- 2004-08-16 GB GBGB0418218.4A patent/GB0418218D0/en not_active Ceased
-
2005
- 2005-08-05 EP EP05254890A patent/EP1628331B1/de active Active
- 2005-08-05 AT AT05254890T patent/ATE492027T1/de active
- 2005-08-05 DE DE602005025294T patent/DE602005025294D1/de active Active
- 2005-08-15 JP JP2005235395A patent/JP2006114881A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
DE602005025294D1 (de) | 2011-01-27 |
EP1628331B1 (de) | 2010-12-15 |
GB0418218D0 (en) | 2004-09-15 |
JP2006114881A (ja) | 2006-04-27 |
EP1628331A1 (de) | 2006-02-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ATE492027T1 (de) | Elektrische vorrichtung mit einem wärmeerzeugenden elektrischen widerstandselement und wärmeableitungsmitteln dafür | |
Park et al. | Thermally assisted nanotransfer printing with sub–20-nm resolution and 8-inch wafer scalability | |
WO2007070868A3 (en) | Method and apparatus for low-temperature plasma sintering | |
CN109923405A (zh) | 环境敏感薄膜设备的能量脉冲清除 | |
Seo et al. | Direct graphene transfer and its application to transfer printing using mechanically controlled, large area graphene/copper freestanding layer | |
KR20200043452A (ko) | 3d 그래핀 | |
WO2006061785A3 (en) | Combustion chemical vapor deposition on temperature-sensitive substrates | |
GB2429955A (en) | Resistor protective layer for micro-fluid ejection devices | |
Haque et al. | On-chip deposition of carbon nanotubes using CMOS microhotplates | |
WO2010001686A1 (ja) | グラフェン・グラファイト膜を用いる半導体装置及びその製造方法 | |
Jung et al. | Ultrathin, Organic, Semiconductor/Polymer Blends by Scanning Corona‐Discharge Coating for High‐Performance Organic Thin‐Film Transistors | |
ATE301917T1 (de) | Keramisches heizelement | |
US9000764B2 (en) | Method for the production of printed magnetic functional elements for resistive sensors and printed magnetic functional elements | |
Hao et al. | Magnetron sputtering electrode on the BaTiO3-based PTCR ceramics and the effect of heat treatment on their properties | |
JP2007136689A (ja) | 金属調軟質高分子成形体 | |
Gierczak et al. | Fabrication and characterization of mixed thin-/thick-film thermoelectric microgenerator based on constantan/chromium and silver arms | |
JP3623938B2 (ja) | 静電チャックの製造方法 | |
JP3602067B2 (ja) | 静電チャック | |
Zhang et al. | The oxidation process of NiSi x film at high temperature in air and the antioxidant effect of SiO x N y/NiSi x film | |
JPH03276589A (ja) | ヒータの製法 | |
Watanabe | Shrink‐induced striped pattern on a thin gold film and switching of its orientation | |
Zdunek | Impulse plasma deposition of alumina oxide thin coatings | |
TWM538240U (zh) | 用於積體電路的散熱片 | |
KR100862162B1 (ko) | 매립형의 전기 저항성 박막체 및 이의 증착 방법 | |
Zhai et al. | Fabrication and characterization of NiCr-based films with high resistivity and low temperature coefficient of resistance |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
UEP | Publication of translation of european patent specification |
Ref document number: 1628331 Country of ref document: EP |