ATE484065T1 - Rf hybrid mems-schalter mit parallelem halbleiter-schalter - Google Patents

Rf hybrid mems-schalter mit parallelem halbleiter-schalter

Info

Publication number
ATE484065T1
ATE484065T1 AT03787237T AT03787237T ATE484065T1 AT E484065 T1 ATE484065 T1 AT E484065T1 AT 03787237 T AT03787237 T AT 03787237T AT 03787237 T AT03787237 T AT 03787237T AT E484065 T1 ATE484065 T1 AT E484065T1
Authority
AT
Austria
Prior art keywords
switches
switch
solid
mems
parallel
Prior art date
Application number
AT03787237T
Other languages
English (en)
Inventor
Eliav Zipper
Qing Ma
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Application granted granted Critical
Publication of ATE484065T1 publication Critical patent/ATE484065T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H9/00—Details of switching devices, not covered by groups H01H1/00 - H01H7/00
    • H01H9/54—Circuit arrangements not adapted to a particular application of the switching device and for which no provision exists elsewhere
    • H01H9/541—Contacts shunted by semiconductor devices
    • H01H9/542—Contacts shunted by static switch means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H9/00—Details of switching devices, not covered by groups H01H1/00 - H01H7/00
    • H01H9/54—Circuit arrangements not adapted to a particular application of the switching device and for which no provision exists elsewhere
    • H01H9/541—Contacts shunted by semiconductor devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Transceivers (AREA)
  • Electronic Switches (AREA)
  • Variable-Direction Aerials And Aerial Arrays (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Optical Communication System (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Waveguide Switches, Polarizers, And Phase Shifters (AREA)
AT03787237T 2002-12-17 2003-12-03 Rf hybrid mems-schalter mit parallelem halbleiter-schalter ATE484065T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/322,290 US6940363B2 (en) 2002-12-17 2002-12-17 Switch architecture using MEMS switches and solid state switches in parallel
PCT/US2003/038217 WO2004061882A1 (en) 2002-12-17 2003-12-03 Switch arcitecture using mems switches and solid state switches in parallel

Publications (1)

Publication Number Publication Date
ATE484065T1 true ATE484065T1 (de) 2010-10-15

Family

ID=32507262

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03787237T ATE484065T1 (de) 2002-12-17 2003-12-03 Rf hybrid mems-schalter mit parallelem halbleiter-schalter

Country Status (7)

Country Link
US (1) US6940363B2 (de)
EP (1) EP1573762B1 (de)
CN (1) CN100458992C (de)
AT (1) ATE484065T1 (de)
AU (1) AU2003296019A1 (de)
DE (1) DE60334492D1 (de)
WO (1) WO2004061882A1 (de)

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Also Published As

Publication number Publication date
EP1573762B1 (de) 2010-10-06
WO2004061882A1 (en) 2004-07-22
EP1573762A1 (de) 2005-09-14
AU2003296019A1 (en) 2004-07-29
DE60334492D1 (de) 2010-11-18
CN1726571A (zh) 2006-01-25
CN100458992C (zh) 2009-02-04
US20040113713A1 (en) 2004-06-17
US6940363B2 (en) 2005-09-06

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