ATE459117T1 - Sehr schmalbandiges gasentladungslasersystem mit zwei kammern und hoher wiederholungsrate - Google Patents

Sehr schmalbandiges gasentladungslasersystem mit zwei kammern und hoher wiederholungsrate

Info

Publication number
ATE459117T1
ATE459117T1 AT02797839T AT02797839T ATE459117T1 AT E459117 T1 ATE459117 T1 AT E459117T1 AT 02797839 T AT02797839 T AT 02797839T AT 02797839 T AT02797839 T AT 02797839T AT E459117 T1 ATE459117 T1 AT E459117T1
Authority
AT
Austria
Prior art keywords
pulse
chambers
laser system
discharge
master oscillator
Prior art date
Application number
AT02797839T
Other languages
English (en)
Inventor
David Knowles
Daniel Brown
Herve Besaucele
David Myers
Alexander Ershov
William Partlo
Richard Sandstrom
Plash Das
Stuart Anderson
Igor Fomenkov
Richard Ujazdowski
Eckehard Onkels
Richard Ness
Scott Smith
William Hulburd
Jeffrey Oicles
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/943,343 external-priority patent/US6567450B2/en
Priority claimed from US10/006,913 external-priority patent/US6535531B1/en
Priority claimed from US10/012,002 external-priority patent/US6625191B2/en
Application filed by Cymer Inc filed Critical Cymer Inc
Application granted granted Critical
Publication of ATE459117T1 publication Critical patent/ATE459117T1/de

Links

Landscapes

  • Lasers (AREA)
AT02797839T 2001-08-29 2002-08-28 Sehr schmalbandiges gasentladungslasersystem mit zwei kammern und hoher wiederholungsrate ATE459117T1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US09/943,343 US6567450B2 (en) 1999-12-10 2001-08-29 Very narrow band, two chamber, high rep rate gas discharge laser system
US10/006,913 US6535531B1 (en) 2001-11-29 2001-11-29 Gas discharge laser with pulse multiplier
US10/012,002 US6625191B2 (en) 1999-12-10 2001-11-30 Very narrow band, two chamber, high rep rate gas discharge laser system
PCT/US2002/027925 WO2003021728A2 (en) 2001-08-29 2002-08-28 Very narrow band, two chamber, high rep rate gas discharge laser system

Publications (1)

Publication Number Publication Date
ATE459117T1 true ATE459117T1 (de) 2010-03-15

Family

ID=41795371

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02797839T ATE459117T1 (de) 2001-08-29 2002-08-28 Sehr schmalbandiges gasentladungslasersystem mit zwei kammern und hoher wiederholungsrate

Country Status (3)

Country Link
AT (1) ATE459117T1 (de)
DE (1) DE60235480D1 (de)
MY (1) MY136595A (de)

Also Published As

Publication number Publication date
DE60235480D1 (de) 2010-04-08
MY136595A (en) 2008-10-31

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Legal Events

Date Code Title Description
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