JP4175544B2 - パルス列生成のためのqスイッチ方法 - Google Patents
パルス列生成のためのqスイッチ方法 Download PDFInfo
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- JP4175544B2 JP4175544B2 JP2003539144A JP2003539144A JP4175544B2 JP 4175544 B2 JP4175544 B2 JP 4175544B2 JP 2003539144 A JP2003539144 A JP 2003539144A JP 2003539144 A JP2003539144 A JP 2003539144A JP 4175544 B2 JP4175544 B2 JP 4175544B2
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- laser
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1123—Q-switching
- H01S3/117—Q-switching using intracavity acousto-optic devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y50/00—Data acquisition or data processing for additive manufacturing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08072—Thermal lensing or thermally induced birefringence; Compensation thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
- H01S3/09415—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10038—Amplitude control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/1068—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using an acousto-optical device
Description
一般に本発明は連続ポンピングされた固体レーザーにおけるパルス列生成に関する。本発明は特に、Qスイッチを用いてレーザーのCW操作を反復的に中断させることにより、連続ポンピング固体レーザーにパルス列を生成する方法に関する。
パルスレーザーは、微小穿孔、材料製造、立体リソグラフィ、及び生命科学などのアプリケーションに広範に用いられている。これらのアプリケーションの多くは、操作の精度と柔軟性とが共に重要である。精度は、レーザーが、安定で基本的に同一のビーム伝播特性及びパルスからパルスについて同一のレーザーパルスエネルギーを有することを要求する。柔軟性は、パルス列の間に可変な期間を持つ複雑なパルス列を与えるようにすることを含む。パルスの間の期間は、10マイクロセコンド(μs)乃至1秒又はそれ以上の範囲とすることができる。
本発明は、固体利得媒体を含む共振器を有するレーザーからのレーザー輻射のパルスのシーケンスを搬送する方法に関する。一つの観点によれば、この方法は、固体利得媒体を連続的に光学的にポンピングして、レーザー輻射を共振器内に生成できるようにすることを含む。このレーザーは、レーザー輻射が連続波(CW)モードで生成されるように操作される。従って、CW操作は、中断周期の端部において、レーザーが連続波操作を再開する前にレーザー輻射のパルスを搬送するのに充分な周期について反復的に中断される。これは、レーザーにレーザー輻射のパルスのシーケンスを搬送させて、連続的パルスの間の時間的周期が反復的中断周期の間の期間になるようにする。レーザーは連続的パルスの搬送の間の連続波モードで操作される。
ここで図面を参照すると、同様な構成は同様な参照符号により識別されている。図1は、レーザー共振器22を有する基本的な従来技術の固体レーザー20を模式的に示しており、その共振器22は固体利得媒体24及びQスイッチ26を含む。
Claims (9)
- 共振器(22)内に配置された固体利得媒体(24)及びQスイッチ(26)を有する光ポンピングレーザーを操作する方法であって、出力パルスを生成する前記方法は、
a)前記固体利得媒体を連続的にポンピングし、そのポンピングパワーは、前記Qスイッチが開放しているときに、連続レーザー出力を生成するのに充分であるように選択されており、その連続的ポンピングは以下の全ての段階に亘ってなされる段階と、
b)次いで、前記開放している前記Qスイッチを第1周期(T2)に亘って閉止する段階と、
c)その後、前記閉止しているQスイッチを第2周期(77乃至87)に亘って再開放し、その第1周期の開始と第2周期の開始との間の時間は第2周期の開始の近傍で出力パルスを生成するのに充分である段階とからなり、
d)段階b)及びc)を複数回繰り返して、複数の出力パルスを生成させ、第2周期(77乃至87)は第1周期(T2)よりも長く、第2周期の各々の開始と、それに続く第1周期の各々の開始との間の時間が、第2周期(T5)の後半部分の間に連続波形出力を生成するのに充分であって、且つ時間周期を前記共振器内における熱レンズ形成における変化を最小化するように制御する方法。 - 請求項1に記載の方法において、前記出力パルスは、ワークピースを処理するのに充分なエネルギを有し、且つ前記連続波形出力は前記ワークピースを処理するのに必要なエネルギを下回るエネルギを有する方法。
- 請求項1に記載の方法において、前記レーザー出力が周波数変換されており、且つ周波数変換出力パルスがワークピースを処理するのに充分なエネルギを有し、前記連続波形出力は前記ワークピースを処理するのに必要なエネルギを下回るエネルギを有する方法。
- 請求項1乃至3の何れか一項に記載の方法において、前記Qスイッチの連続する複数の開放の間の時間間隔(T1)が変化する方法。
- 請求項1乃至4の何れか一項に記載の方法において、前記Qスイッチの連続する複数の開放の間の時間(T1)と第1周期(T2)との比が、関係T1/T2≧3を満足する方法。
- 請求項5の方法において、前記比が、T1/T2≧10である方法。
- 請求項1乃至6の何れか一項に記載の方法において、前記出力パルスのピークパワーが、前記連続波形出力のピークパワーよりも少なくとも百倍以上である方法。
- 請求項1乃至7の何れか一項に記載の方法において、前記パルスにおける前記共振器から搬送された平均輻射パワー及び連続波形モードが、異なる出力パルス繰り返し周波数についてのものとほぼ同様になるように選択されている方法。
- 請求項1乃至8の何れか一項に記載の方法において、前記Qスイッチ(26)の連続する複数の開放の間の時間間隔(T1)に対する第1周期(T2)の比は、レーザーパワー出力が前記連続する複数の開放の間の時間間隔(T1)が変化する場合とほぼ同様になるように、充分小さい方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/001,681 US6683893B2 (en) | 2001-10-25 | 2001-10-25 | Q-switching method for pulse train generation |
PCT/US2002/029896 WO2003036769A1 (en) | 2001-10-25 | 2002-09-20 | Q-switching method for pulse train generation |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005539365A JP2005539365A (ja) | 2005-12-22 |
JP4175544B2 true JP4175544B2 (ja) | 2008-11-05 |
Family
ID=21697283
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003539144A Expired - Lifetime JP4175544B2 (ja) | 2001-10-25 | 2002-09-20 | パルス列生成のためのqスイッチ方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6683893B2 (ja) |
EP (1) | EP1438773B1 (ja) |
JP (1) | JP4175544B2 (ja) |
AT (1) | ATE328382T1 (ja) |
DE (1) | DE60211933T2 (ja) |
WO (1) | WO2003036769A1 (ja) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
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US6697408B2 (en) * | 2001-04-04 | 2004-02-24 | Coherent, Inc. | Q-switched cavity dumped CO2 laser for material processing |
EP1384293B1 (en) * | 2001-04-04 | 2009-12-23 | Coherent Deos | Q-switched co 2 laser for material processing |
JP3838064B2 (ja) * | 2001-09-28 | 2006-10-25 | 松下電器産業株式会社 | レーザ制御方法 |
US7113529B2 (en) * | 2003-03-14 | 2006-09-26 | Coherent, Inc. | Pulsed CO2 laser including an optical damage resistant electro-optical switching arrangement |
US7039079B2 (en) * | 2003-03-14 | 2006-05-02 | Coherent, Inc. | Pulsed CO2 laser including an optical damage resistant electro-optical switching arrangement |
US6930274B2 (en) * | 2003-03-26 | 2005-08-16 | Siemens Vdo Automotive Corporation | Apparatus and method of maintaining a generally constant focusing spot size at different average laser power densities |
EP1462206A1 (fr) * | 2003-03-26 | 2004-09-29 | Lasag Ag | dispositif laser pour percer des trous dans des composants d'un dispositif d'injection d'un fluide |
US6931035B2 (en) * | 2003-04-14 | 2005-08-16 | Coherent, Inc. | Q-switching method for pulse train generation |
US7068688B2 (en) | 2003-11-04 | 2006-06-27 | Boston Applied Technologies, Incorporated | Electro-optic Q-switch |
US7352784B2 (en) * | 2004-07-20 | 2008-04-01 | Jds Uniphase Corporation | Laser burst boosting method and apparatus |
US7372878B2 (en) * | 2004-08-06 | 2008-05-13 | Electro Scientific Industries, Inc. | Method and system for preventing excessive energy build-up in a laser cavity |
US7227098B2 (en) * | 2004-08-06 | 2007-06-05 | Electro Scientific Industries, Inc. | Method and system for decreasing the effective pulse repetition frequency of a laser |
US7916764B2 (en) * | 2006-10-25 | 2011-03-29 | Coherent, Inc. | Output power control for harmonic-generating laser |
US7649924B2 (en) * | 2006-11-15 | 2010-01-19 | Coherent, Inc. | First-pulse suppression in a regenerative amplifier |
US7692854B2 (en) * | 2007-10-22 | 2010-04-06 | Coherent, Inc. | Repetitively pulsed laser and amplifier with dual resonator for pulse-energy management |
JP5192213B2 (ja) * | 2007-11-02 | 2013-05-08 | 株式会社ディスコ | レーザー加工装置 |
US8509272B2 (en) * | 2009-06-10 | 2013-08-13 | Lee Laser, Inc. | Laser beam combining and power scaling device |
FR2957559B1 (fr) * | 2010-03-16 | 2012-07-27 | Sc2N Sa | Dispositif de communitation pour haut de colonne de direction de vehicule automobile |
US8717670B2 (en) | 2011-06-17 | 2014-05-06 | Coherent, Inc. | Fiber-MOPA apparatus for delivering pulses on demand |
GB201113076D0 (en) | 2011-07-29 | 2011-09-14 | Ellison Vera J | Method and apparatus for laser pulse control |
JP5895543B2 (ja) * | 2012-01-16 | 2016-03-30 | 株式会社島津製作所 | パルスレーザ装置 |
US8767291B2 (en) * | 2012-03-16 | 2014-07-01 | Kla-Tencor Corporation | Suppression of parasitic optical feedback in pulse laser systems |
US8995052B1 (en) * | 2013-09-09 | 2015-03-31 | Coherent Kaiserslautern GmbH | Multi-stage MOPA with first-pulse suppression |
JP6687999B2 (ja) * | 2015-02-06 | 2020-04-28 | スペクトロニクス株式会社 | レーザ光源装置及びレーザパルス光生成方法 |
CN105305216B (zh) * | 2015-10-22 | 2016-09-28 | 深圳市创鑫激光股份有限公司 | 一种脉冲激光器的输出方法和装置 |
US9570877B1 (en) * | 2015-12-31 | 2017-02-14 | Lumentum Operations Llc | Gain control for arbitrary triggering of short pulse lasers |
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DE3885992T2 (de) * | 1987-09-22 | 1994-06-09 | Hitachi Maxell | Optisches Informationsaufzeichnungs-/wiedergabegerät. |
JPH01165034A (ja) * | 1987-09-22 | 1989-06-29 | Hitachi Maxell Ltd | 光学情報記録再生装置 |
US5022033A (en) * | 1989-10-30 | 1991-06-04 | The United States Of America As Represented By The United States Department Of Energy | Ring laser having an output at a single frequency |
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US6654391B2 (en) * | 2001-03-30 | 2003-11-25 | Lightwave Electronics | Method for operating Q-switched lasers with intracavity frequency conversion |
-
2001
- 2001-10-25 US US10/001,681 patent/US6683893B2/en not_active Expired - Lifetime
-
2002
- 2002-09-20 DE DE60211933T patent/DE60211933T2/de not_active Expired - Lifetime
- 2002-09-20 AT AT02775903T patent/ATE328382T1/de not_active IP Right Cessation
- 2002-09-20 JP JP2003539144A patent/JP4175544B2/ja not_active Expired - Lifetime
- 2002-09-20 EP EP02775903A patent/EP1438773B1/en not_active Expired - Lifetime
- 2002-09-20 WO PCT/US2002/029896 patent/WO2003036769A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
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JP2005539365A (ja) | 2005-12-22 |
EP1438773A1 (en) | 2004-07-21 |
US6683893B2 (en) | 2004-01-27 |
DE60211933D1 (de) | 2006-07-06 |
ATE328382T1 (de) | 2006-06-15 |
EP1438773B1 (en) | 2006-05-31 |
DE60211933T2 (de) | 2007-06-06 |
US20030081636A1 (en) | 2003-05-01 |
WO2003036769A1 (en) | 2003-05-01 |
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