ATE440802T1 - Azeotropische zusammensetzungen von iodheptafluorid und fluorwasserstoff - Google Patents

Azeotropische zusammensetzungen von iodheptafluorid und fluorwasserstoff

Info

Publication number
ATE440802T1
ATE440802T1 AT04810338T AT04810338T ATE440802T1 AT E440802 T1 ATE440802 T1 AT E440802T1 AT 04810338 T AT04810338 T AT 04810338T AT 04810338 T AT04810338 T AT 04810338T AT E440802 T1 ATE440802 T1 AT E440802T1
Authority
AT
Austria
Prior art keywords
hydrogen fluoride
iodheptafluoride
azeotropic compositions
iodine heptafluoride
compositions
Prior art date
Application number
AT04810338T
Other languages
English (en)
Inventor
Matthew Luly
Rajiv Singh
George Cook
Original Assignee
Honeywell Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Int Inc filed Critical Honeywell Int Inc
Application granted granted Critical
Publication of ATE440802T1 publication Critical patent/ATE440802T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/191—Hydrogen fluoride
    • C01B7/195—Separation; Purification
    • C01B7/196—Separation; Purification by distillation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/191—Hydrogen fluoride
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/24—Inter-halogen compounds
AT04810338T 2003-11-05 2004-11-05 Azeotropische zusammensetzungen von iodheptafluorid und fluorwasserstoff ATE440802T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/701,574 US7141094B2 (en) 2003-11-05 2003-11-05 Azeotrope-like compositions of iodine heptafluoride and hydrogen fluoride
PCT/US2004/036815 WO2005044726A1 (en) 2003-11-05 2004-11-05 Azeotrope-like composition of iodine heptafluoride and hydrogen fluoride

Publications (1)

Publication Number Publication Date
ATE440802T1 true ATE440802T1 (de) 2009-09-15

Family

ID=34551456

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04810338T ATE440802T1 (de) 2003-11-05 2004-11-05 Azeotropische zusammensetzungen von iodheptafluorid und fluorwasserstoff

Country Status (9)

Country Link
US (1) US7141094B2 (de)
EP (1) EP1678077B1 (de)
JP (1) JP2007510616A (de)
KR (1) KR20060125786A (de)
CN (1) CN1886336A (de)
AT (1) ATE440802T1 (de)
DE (1) DE602004022844D1 (de)
RU (1) RU2367592C2 (de)
WO (1) WO2005044726A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7141094B2 (en) * 2003-11-05 2006-11-28 Honeywell International Inc. Azeotrope-like compositions of iodine heptafluoride and hydrogen fluoride
CN102044934B (zh) * 2009-10-21 2014-10-22 德昌电机(深圳)有限公司 电机驱动组件
US8883707B2 (en) * 2010-06-30 2014-11-11 Honeywell International Inc. Azeotrope-like composition of PF5 and HF
CN103449371B (zh) * 2013-09-04 2015-03-18 核工业理化工程研究院华核新技术开发公司 一种提纯五氟化碘的工艺方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3928821A (en) * 1971-05-26 1975-12-23 Us Energy High energy chemical laser system
US5648017A (en) 1991-03-28 1997-07-15 E. I. Du Pont De Nemours And Company Azeotropic and azeotrope-like compositions of 1,1,2,2-tetrafluoroethane and (iso) butane
US5182040A (en) 1991-03-28 1993-01-26 E. I. Du Pont De Nemours And Company Azeotropic and azeotrope-like compositions of 1,1,2,2-tetrafluoroethane
JP3381076B2 (ja) 1992-11-24 2003-02-24 ソニー株式会社 ドライエッチング方法
US6749717B1 (en) * 1997-02-04 2004-06-15 Micron Technology, Inc. Device for in-situ cleaning of an inductively-coupled plasma chambers
JP2000265276A (ja) 1999-01-12 2000-09-26 Central Glass Co Ltd クリーニングガス
EP2093187A1 (de) 2001-06-01 2009-08-26 Honeywell International Inc. Verfahren zur Entfernung von 1,1,1,3,3-Pentafluorbutan
US7141094B2 (en) * 2003-11-05 2006-11-28 Honeywell International Inc. Azeotrope-like compositions of iodine heptafluoride and hydrogen fluoride

Also Published As

Publication number Publication date
US20050096247A1 (en) 2005-05-05
RU2006119527A (ru) 2007-12-27
US7141094B2 (en) 2006-11-28
DE602004022844D1 (de) 2009-10-08
RU2367592C2 (ru) 2009-09-20
CN1886336A (zh) 2006-12-27
EP1678077B1 (de) 2009-08-26
KR20060125786A (ko) 2006-12-06
WO2005044726A1 (en) 2005-05-19
EP1678077A1 (de) 2006-07-12
JP2007510616A (ja) 2007-04-26

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Legal Events

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