ATE429660T1 - Bimorpher spiegel mit zwei piezoelektrischen schichten - Google Patents

Bimorpher spiegel mit zwei piezoelektrischen schichten

Info

Publication number
ATE429660T1
ATE429660T1 AT07009490T AT07009490T ATE429660T1 AT E429660 T1 ATE429660 T1 AT E429660T1 AT 07009490 T AT07009490 T AT 07009490T AT 07009490 T AT07009490 T AT 07009490T AT E429660 T1 ATE429660 T1 AT E429660T1
Authority
AT
Austria
Prior art keywords
mirror
piezoelectric layers
layers
bimorphic
ceramic layers
Prior art date
Application number
AT07009490T
Other languages
English (en)
Inventor
Jean-Francois Carre
Jean-Jacques Ferme
Original Assignee
Seso
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seso filed Critical Seso
Application granted granted Critical
Publication of ATE429660T1 publication Critical patent/ATE429660T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
AT07009490T 2004-02-06 2005-01-13 Bimorpher spiegel mit zwei piezoelektrischen schichten ATE429660T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0401194A FR2866122B1 (fr) 2004-02-06 2004-02-06 Miroir bimorphe.

Publications (1)

Publication Number Publication Date
ATE429660T1 true ATE429660T1 (de) 2009-05-15

Family

ID=34778585

Family Applications (2)

Application Number Title Priority Date Filing Date
AT07009490T ATE429660T1 (de) 2004-02-06 2005-01-13 Bimorpher spiegel mit zwei piezoelektrischen schichten
AT05717410T ATE434201T1 (de) 2004-02-06 2005-01-13 Bimorpher spiegel mit zwei durch einen zentralkern aus halb-flexiblem material getrennten piezoelektrischen schichten

Family Applications After (1)

Application Number Title Priority Date Filing Date
AT05717410T ATE434201T1 (de) 2004-02-06 2005-01-13 Bimorpher spiegel mit zwei durch einen zentralkern aus halb-flexiblem material getrennten piezoelektrischen schichten

Country Status (14)

Country Link
US (1) US7618149B2 (de)
EP (2) EP1723461B1 (de)
JP (1) JP4739237B2 (de)
KR (1) KR101109526B1 (de)
CN (1) CN1918502B (de)
AT (2) ATE429660T1 (de)
AU (1) AU2005218206B2 (de)
BR (1) BRPI0507502B1 (de)
CA (1) CA2555806C (de)
DE (2) DE602005014136D1 (de)
DK (2) DK1723461T3 (de)
ES (2) ES2328831T3 (de)
FR (1) FR2866122B1 (de)
WO (1) WO2005085931A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5756982B2 (ja) 2009-12-28 2015-07-29 株式会社ジェイテック Ｘ線集光方法、反射面形状制御ミラー装置及び反射面形状制御ミラーの製造方法
FR2956220B1 (fr) * 2010-02-05 2012-03-23 Europ De Systemes Optiques Soc Element optique bimorphe
US8593036B2 (en) 2010-02-26 2013-11-26 Mcb Clean Room Solutions, Llc High-efficiency MEMS micro-vibrational energy harvester and process for manufacturing same
DE102010021867A1 (de) * 2010-05-28 2011-12-01 Eurocopter Deutschland Gmbh Kraftgenerator zur Anbringung an einer Struktur
US8469527B2 (en) 2011-07-01 2013-06-25 Societe Europeenne De Systemes Optiques Bimorph optical element
JP7324989B2 (ja) * 2019-07-30 2023-08-14 株式会社ジェイテックコーポレーション 形状可変ミラー
WO2023054157A1 (ja) * 2021-10-01 2023-04-06 国立大学法人東海国立大学機構 形状可変ミラーおよびｘ線装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4257686A (en) * 1978-12-14 1981-03-24 Itek Corporation Multiple layer piezoelectric wavefront modulator
FR2453423A1 (fr) * 1979-04-04 1980-10-31 Quantel Sa Element optique epais a courbure variable
GB2238880A (en) * 1989-12-06 1991-06-12 Marconi Gec Ltd Optical correction apparatus
RU1808159C (ru) * 1989-12-19 1993-04-07 А. В. Икрамов, А. В. Кудр шов, А. Г. Сафронов. С. В. Романов, И. М. Рощупкин и А. О. Сулимов Адаптивное биморфное зеркало
US6098460A (en) * 1995-10-09 2000-08-08 Matsushita Electric Industrial Co., Ltd. Acceleration sensor and shock detecting device using the same
RU2068191C1 (ru) * 1996-02-12 1996-10-20 Йелстаун Корпорейшн Н.В. Многослойное пьезоэлектрическое деформируемое биморфное зеркало
US6874897B2 (en) * 2000-01-27 2005-04-05 Aoptix Technologies, Inc. Deformable curvature mirror with unipolar-wiring

Also Published As

Publication number Publication date
CN1918502B (zh) 2010-10-06
US20070279775A1 (en) 2007-12-06
KR101109526B1 (ko) 2012-01-31
EP1818711A1 (de) 2007-08-15
KR20070020213A (ko) 2007-02-20
DK1723461T3 (da) 2009-10-26
WO2005085931B1 (fr) 2005-11-03
ATE434201T1 (de) 2009-07-15
AU2005218206B2 (en) 2010-06-24
CA2555806C (fr) 2013-04-02
WO2005085931A1 (fr) 2005-09-15
DE602005014136D1 (de) 2009-06-04
ES2325040T3 (es) 2009-08-24
FR2866122A1 (fr) 2005-08-12
CN1918502A (zh) 2007-02-21
EP1723461A1 (de) 2006-11-22
JP4739237B2 (ja) 2011-08-03
FR2866122B1 (fr) 2006-05-19
BRPI0507502B1 (pt) 2017-04-11
DK1818711T3 (da) 2009-07-27
CA2555806A1 (fr) 2005-09-15
EP1818711B1 (de) 2009-04-22
JP2007527030A (ja) 2007-09-20
US7618149B2 (en) 2009-11-17
EP1723461B1 (de) 2009-06-17
DE602005014945D1 (de) 2009-07-30
BRPI0507502A (pt) 2007-06-26
AU2005218206A1 (en) 2005-09-15
ES2328831T3 (es) 2009-11-18

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Legal Events

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