DE602005014136D1 - Bimorpher Spiegel mit zwei piezoelektrischen Schichten - Google Patents

Bimorpher Spiegel mit zwei piezoelektrischen Schichten

Info

Publication number
DE602005014136D1
DE602005014136D1 DE602005014136T DE602005014136T DE602005014136D1 DE 602005014136 D1 DE602005014136 D1 DE 602005014136D1 DE 602005014136 T DE602005014136 T DE 602005014136T DE 602005014136 T DE602005014136 T DE 602005014136T DE 602005014136 D1 DE602005014136 D1 DE 602005014136D1
Authority
DE
Germany
Prior art keywords
mirror
piezoelectric layers
bimorph mirror
layers
ceramic layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005014136T
Other languages
English (en)
Inventor
Jean-Francois Carre
Jean-Jacques Ferme
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SESO
Europeenne de Systemes Optiques S E S O Ste
Original Assignee
SESO
Europeenne de Systemes Optiques S E S O Ste
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SESO, Europeenne de Systemes Optiques S E S O Ste filed Critical SESO
Publication of DE602005014136D1 publication Critical patent/DE602005014136D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
DE602005014136T 2004-02-06 2005-01-13 Bimorpher Spiegel mit zwei piezoelektrischen Schichten Active DE602005014136D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0401194A FR2866122B1 (fr) 2004-02-06 2004-02-06 Miroir bimorphe.

Publications (1)

Publication Number Publication Date
DE602005014136D1 true DE602005014136D1 (de) 2009-06-04

Family

ID=34778585

Family Applications (2)

Application Number Title Priority Date Filing Date
DE602005014136T Active DE602005014136D1 (de) 2004-02-06 2005-01-13 Bimorpher Spiegel mit zwei piezoelektrischen Schichten
DE602005014945T Active DE602005014945D1 (de) 2004-02-06 2005-01-13 Bimorpher spiegel mit zwei durch einen zentralkern aus halb-flexiblem material getrennten piezoelektrischen schichten

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE602005014945T Active DE602005014945D1 (de) 2004-02-06 2005-01-13 Bimorpher spiegel mit zwei durch einen zentralkern aus halb-flexiblem material getrennten piezoelektrischen schichten

Country Status (14)

Country Link
US (1) US7618149B2 (de)
EP (2) EP1818711B1 (de)
JP (1) JP4739237B2 (de)
KR (1) KR101109526B1 (de)
CN (1) CN1918502B (de)
AT (2) ATE434201T1 (de)
AU (1) AU2005218206B2 (de)
BR (1) BRPI0507502B1 (de)
CA (1) CA2555806C (de)
DE (2) DE602005014136D1 (de)
DK (2) DK1818711T3 (de)
ES (2) ES2325040T3 (de)
FR (1) FR2866122B1 (de)
WO (1) WO2005085931A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5756982B2 (ja) 2009-12-28 2015-07-29 株式会社ジェイテック Ｘ線集光方法、反射面形状制御ミラー装置及び反射面形状制御ミラーの製造方法
FR2956220B1 (fr) * 2010-02-05 2012-03-23 Europ De Systemes Optiques Soc Element optique bimorphe
US8593036B2 (en) 2010-02-26 2013-11-26 Mcb Clean Room Solutions, Llc High-efficiency MEMS micro-vibrational energy harvester and process for manufacturing same
DE102010021867A1 (de) * 2010-05-28 2011-12-01 Eurocopter Deutschland Gmbh Kraftgenerator zur Anbringung an einer Struktur
US8469527B2 (en) 2011-07-01 2013-06-25 Societe Europeenne De Systemes Optiques Bimorph optical element
JP7324989B2 (ja) * 2019-07-30 2023-08-14 株式会社ジェイテックコーポレーション 形状可変ミラー
CN117941011A (zh) * 2021-10-01 2024-04-26 国立大学法人东海国立大学机构 可变形镜以及x射线装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4257686A (en) * 1978-12-14 1981-03-24 Itek Corporation Multiple layer piezoelectric wavefront modulator
FR2453423A1 (fr) * 1979-04-04 1980-10-31 Quantel Sa Element optique epais a courbure variable
GB2238880A (en) * 1989-12-06 1991-06-12 Marconi Gec Ltd Optical correction apparatus
RU1808159C (ru) * 1989-12-19 1993-04-07 А. В. Икрамов, А. В. Кудр шов, А. Г. Сафронов. С. В. Романов, И. М. Рощупкин и А. О. Сулимов Адаптивное биморфное зеркало
EP0768532B1 (de) * 1995-10-09 2003-04-23 Matsushita Electric Industrial Co., Ltd Beschleunigungssensor und Herstellungsverfahren hierfür, sowie Schockdetektor, der einen solchen Sensor verwendet
RU2068191C1 (ru) * 1996-02-12 1996-10-20 Йелстаун Корпорейшн Н.В. Многослойное пьезоэлектрическое деформируемое биморфное зеркало
US6874897B2 (en) * 2000-01-27 2005-04-05 Aoptix Technologies, Inc. Deformable curvature mirror with unipolar-wiring

Also Published As

Publication number Publication date
ES2328831T3 (es) 2009-11-18
ATE434201T1 (de) 2009-07-15
EP1723461A1 (de) 2006-11-22
DK1818711T3 (da) 2009-07-27
DK1723461T3 (da) 2009-10-26
JP2007527030A (ja) 2007-09-20
BRPI0507502A (pt) 2007-06-26
ES2325040T3 (es) 2009-08-24
ATE429660T1 (de) 2009-05-15
US20070279775A1 (en) 2007-12-06
FR2866122A1 (fr) 2005-08-12
KR20070020213A (ko) 2007-02-20
FR2866122B1 (fr) 2006-05-19
AU2005218206B2 (en) 2010-06-24
DE602005014945D1 (de) 2009-07-30
WO2005085931A1 (fr) 2005-09-15
CA2555806A1 (fr) 2005-09-15
BRPI0507502B1 (pt) 2017-04-11
CN1918502B (zh) 2010-10-06
AU2005218206A1 (en) 2005-09-15
US7618149B2 (en) 2009-11-17
EP1818711B1 (de) 2009-04-22
CA2555806C (fr) 2013-04-02
JP4739237B2 (ja) 2011-08-03
EP1723461B1 (de) 2009-06-17
CN1918502A (zh) 2007-02-21
KR101109526B1 (ko) 2012-01-31
WO2005085931B1 (fr) 2005-11-03
EP1818711A1 (de) 2007-08-15

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Legal Events

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