ATE404990T1 - Ladungsträgerteilchenstrahlsystem mit dynamischer fokusierung - Google Patents
Ladungsträgerteilchenstrahlsystem mit dynamischer fokusierungInfo
- Publication number
- ATE404990T1 ATE404990T1 AT00105805T AT00105805T ATE404990T1 AT E404990 T1 ATE404990 T1 AT E404990T1 AT 00105805 T AT00105805 T AT 00105805T AT 00105805 T AT00105805 T AT 00105805T AT E404990 T1 ATE404990 T1 AT E404990T1
- Authority
- AT
- Austria
- Prior art keywords
- lens
- particle beam
- charge carrier
- beam system
- focus coil
- Prior art date
Links
- 239000002245 particle Substances 0.000 title abstract 2
- 230000004907 flux Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/3175—Lithography
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Analytical Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Electron Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Particle Accelerators (AREA)
- Developing Agents For Electrophotography (AREA)
- Photoreceptors In Electrophotography (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/290,784 US6130432A (en) | 1999-04-13 | 1999-04-13 | Particle beam system with dynamic focusing |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE404990T1 true ATE404990T1 (de) | 2008-08-15 |
Family
ID=23117550
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT00105805T ATE404990T1 (de) | 1999-04-13 | 2000-03-18 | Ladungsträgerteilchenstrahlsystem mit dynamischer fokusierung |
Country Status (5)
Country | Link |
---|---|
US (1) | US6130432A (de) |
EP (1) | EP1045424B1 (de) |
JP (1) | JP3480829B2 (de) |
AT (1) | ATE404990T1 (de) |
DE (1) | DE60039810D1 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6768117B1 (en) * | 2000-07-25 | 2004-07-27 | Applied Materials, Inc. | Immersion lens with magnetic shield for charged particle beam system |
JP2002343295A (ja) * | 2001-05-21 | 2002-11-29 | Canon Inc | 電子線露光装置、縮小投影系及びデバイス製造方法 |
US6852982B1 (en) * | 2003-07-14 | 2005-02-08 | Fei Company | Magnetic lens |
EP1501115B1 (de) | 2003-07-14 | 2009-07-01 | FEI Company | Zweistrahlsystem |
US6979820B2 (en) * | 2003-07-29 | 2005-12-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | CD SEM automatic focus methodology and apparatus for constant electron beam dosage control |
GB2404782B (en) * | 2003-08-01 | 2005-12-07 | Leica Microsys Lithography Ltd | Pattern-writing equipment |
GB2412232A (en) * | 2004-03-15 | 2005-09-21 | Ims Nanofabrication Gmbh | Particle-optical projection system |
EP2019414B1 (de) * | 2007-07-27 | 2010-06-30 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Magnetische Linsenanordnung |
US7705298B2 (en) * | 2007-10-26 | 2010-04-27 | Hermes Microvision, Inc. (Taiwan) | System and method to determine focus parameters during an electron beam inspection |
JP5702552B2 (ja) * | 2009-05-28 | 2015-04-15 | エフ イー アイ カンパニFei Company | デュアルビームシステムの制御方法 |
CN109175371A (zh) * | 2018-11-02 | 2019-01-11 | 西安赛隆金属材料有限责任公司 | 一种磁聚焦器及粉床电子束选区熔化成形设备 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4544846A (en) * | 1983-06-28 | 1985-10-01 | International Business Machines Corporation | Variable axis immersion lens electron beam projection system |
US4544847A (en) * | 1983-07-28 | 1985-10-01 | Varian Associates, Inc. | Multi-gap magnetic imaging lens for charged particle beams |
NL8801208A (nl) * | 1988-05-09 | 1989-12-01 | Philips Nv | Geladen deeltjes bundel apparaat. |
-
1999
- 1999-04-13 US US09/290,784 patent/US6130432A/en not_active Expired - Lifetime
-
2000
- 2000-03-18 DE DE60039810T patent/DE60039810D1/de not_active Expired - Lifetime
- 2000-03-18 EP EP00105805A patent/EP1045424B1/de not_active Expired - Lifetime
- 2000-03-18 AT AT00105805T patent/ATE404990T1/de not_active IP Right Cessation
- 2000-04-11 JP JP2000109631A patent/JP3480829B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP3480829B2 (ja) | 2003-12-22 |
EP1045424B1 (de) | 2008-08-13 |
DE60039810D1 (de) | 2008-09-25 |
US6130432A (en) | 2000-10-10 |
JP2000331634A (ja) | 2000-11-30 |
EP1045424A3 (de) | 2001-05-30 |
EP1045424A2 (de) | 2000-10-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |