ATE390561T1 - Vakuumpumpsystem - Google Patents

Vakuumpumpsystem

Info

Publication number
ATE390561T1
ATE390561T1 AT03028333T AT03028333T ATE390561T1 AT E390561 T1 ATE390561 T1 AT E390561T1 AT 03028333 T AT03028333 T AT 03028333T AT 03028333 T AT03028333 T AT 03028333T AT E390561 T1 ATE390561 T1 AT E390561T1
Authority
AT
Austria
Prior art keywords
vacuum pump
pump system
high vacuum
pump
series
Prior art date
Application number
AT03028333T
Other languages
English (en)
Inventor
Armin Conrad
Peter Fahrenbach
Matthias Maedler
Original Assignee
Pfeiffer Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=32520090&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE390561(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum Gmbh filed Critical Pfeiffer Vacuum Gmbh
Application granted granted Critical
Publication of ATE390561T1 publication Critical patent/ATE390561T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Jet Pumps And Other Pumps (AREA)
AT03028333T 2003-01-24 2003-12-10 Vakuumpumpsystem ATE390561T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10302764A DE10302764A1 (de) 2003-01-24 2003-01-24 Vakuumpumpsystem

Publications (1)

Publication Number Publication Date
ATE390561T1 true ATE390561T1 (de) 2008-04-15

Family

ID=32520090

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03028333T ATE390561T1 (de) 2003-01-24 2003-12-10 Vakuumpumpsystem

Country Status (4)

Country Link
US (1) US7033142B2 (de)
EP (1) EP1441128B1 (de)
AT (1) ATE390561T1 (de)
DE (2) DE10302764A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0214273D0 (en) * 2002-06-20 2002-07-31 Boc Group Plc Apparatus for controlling the pressure in a process chamber and method of operating same
JP4633370B2 (ja) * 2004-02-17 2011-02-16 財団法人国際科学振興財団 真空装置
US20050186099A1 (en) * 2004-02-19 2005-08-25 Graeme Huntley Active vibration reduction
GB0411426D0 (en) * 2004-05-21 2004-06-23 Boc Group Plc Pumping arrangement
GB0418771D0 (en) * 2004-08-20 2004-09-22 Boc Group Plc Evacuation of a load lock enclosure
GB0505500D0 (en) * 2005-03-17 2005-04-27 Boc Group Plc Vacuum pumping arrangement
US8147222B2 (en) * 2007-05-15 2012-04-03 Agilent Technologies, Inc. Vacuum divider for differential pumping of a vacuum system
DE102007057944A1 (de) * 2007-12-01 2009-06-04 Inficon Gmbh Verfahren und Vorrichtung zur Dichtheitsprüfung
GB2472638B (en) * 2009-08-14 2014-03-19 Edwards Ltd Vacuum system
DE202012012359U1 (de) * 2012-12-22 2014-03-24 Oerlikon Leybold Vacuum Gmbh Pumpstand zum Pumpen leichter Gase
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
WO2016188569A1 (en) * 2015-05-26 2016-12-01 Rasco Gmbh A boat, assembly & method for handling electronic components
FR3070489B1 (fr) * 2017-08-29 2020-10-23 Pfeiffer Vacuum Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester
FR3072774B1 (fr) * 2017-10-19 2019-11-15 Pfeiffer Vacuum Detecteur de fuites pour le controle de l'etancheite d'un objet a tester
US20220260156A1 (en) * 2021-02-12 2022-08-18 Kla Corporation Dual Vacuum Seal
EP4224015A1 (de) * 2022-02-07 2023-08-09 Siemens Energy Global GmbH & Co. KG Wasserstoff-verdichter

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
DD96304A1 (de) * 1972-02-29 1973-03-12
CH625598A5 (de) * 1977-12-01 1981-09-30 Balzers Hochvakuum
DE3639512A1 (de) * 1986-11-20 1988-06-01 Alcatel Hochvakuumtechnik Gmbh Vakuumpumpsystem mit einer waelzkolbenpumpe
FR2621141B1 (fr) * 1987-09-25 1989-12-01 Cit Alcatel Procede de demarrage de pompes a vide couplees en serie, et dispositif permettant la mise en oeuvre de ce procede
US4850806A (en) * 1988-05-24 1989-07-25 The Boc Group, Inc. Controlled by-pass for a booster pump
DE3865012D1 (de) * 1988-06-01 1991-10-24 Leybold Ag Pumpsystem fuer ein lecksuchgeraet.
DE3828608A1 (de) * 1988-08-23 1990-03-08 Alcatel Hochvakuumtechnik Gmbh Vakuumpumpvorrichtung
DE4213763B4 (de) * 1992-04-27 2004-11-25 Unaxis Deutschland Holding Gmbh Verfahren zum Evakuieren einer Vakuumkammer und einer Hochvakuumkammer sowie Hochvakuumanlage zu seiner Durchführung
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE4410903A1 (de) * 1994-03-29 1995-10-05 Leybold Ag System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen
DE4442174A1 (de) * 1994-11-26 1996-05-30 Leybold Ag Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu
DE19639733A1 (de) * 1996-09-27 1998-04-16 Linde Ag Verfahren zum Verdichten eines Gases
DE19704234B4 (de) * 1997-02-05 2006-05-11 Pfeiffer Vacuum Gmbh Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen
JP3763193B2 (ja) * 1997-09-22 2006-04-05 アイシン精機株式会社 多段式真空ポンプ
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor

Also Published As

Publication number Publication date
DE10302764A1 (de) 2004-07-29
DE50309460D1 (de) 2008-05-08
US20040146410A1 (en) 2004-07-29
EP1441128A3 (de) 2004-09-01
EP1441128B1 (de) 2008-03-26
EP1441128A2 (de) 2004-07-28
US7033142B2 (en) 2006-04-25

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee