ATE380777T1 - Elektrostatischer bimorpher aktor - Google Patents

Elektrostatischer bimorpher aktor

Info

Publication number
ATE380777T1
ATE380777T1 AT03002122T AT03002122T ATE380777T1 AT E380777 T1 ATE380777 T1 AT E380777T1 AT 03002122 T AT03002122 T AT 03002122T AT 03002122 T AT03002122 T AT 03002122T AT E380777 T1 ATE380777 T1 AT E380777T1
Authority
AT
Austria
Prior art keywords
bimorph
substrate
bimorph arm
arm
electrostatic
Prior art date
Application number
AT03002122T
Other languages
German (de)
English (en)
Inventor
Michael J Sinclair
Original Assignee
Microsoft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microsoft Corp filed Critical Microsoft Corp
Application granted granted Critical
Publication of ATE380777T1 publication Critical patent/ATE380777T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0054—For holding or placing an element in a given position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/032—Bimorph and unimorph actuators, e.g. piezo and thermo
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/038—Microengines and actuators not provided for in B81B2201/031 - B81B2201/037
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
AT03002122T 2002-03-29 2003-01-30 Elektrostatischer bimorpher aktor ATE380777T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/112,369 US7053519B2 (en) 2002-03-29 2002-03-29 Electrostatic bimorph actuator

Publications (1)

Publication Number Publication Date
ATE380777T1 true ATE380777T1 (de) 2007-12-15

Family

ID=28041017

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03002122T ATE380777T1 (de) 2002-03-29 2003-01-30 Elektrostatischer bimorpher aktor

Country Status (5)

Country Link
US (2) US7053519B2 (https=)
EP (1) EP1350758B1 (https=)
JP (1) JP4544826B2 (https=)
AT (1) ATE380777T1 (https=)
DE (1) DE60317959T2 (https=)

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Also Published As

Publication number Publication date
DE60317959D1 (de) 2008-01-24
EP1350758A3 (en) 2004-12-15
DE60317959T2 (de) 2008-12-11
EP1350758A2 (en) 2003-10-08
EP1350758B1 (en) 2007-12-12
JP4544826B2 (ja) 2010-09-15
JP2004001196A (ja) 2004-01-08
US20030184189A1 (en) 2003-10-02
US20040227428A1 (en) 2004-11-18
US7249856B2 (en) 2007-07-31
US7053519B2 (en) 2006-05-30

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