WO2004063090A3 - High displacement bistable micro actuator - Google Patents

High displacement bistable micro actuator Download PDF

Info

Publication number
WO2004063090A3
WO2004063090A3 PCT/US2004/000667 US2004000667W WO2004063090A3 WO 2004063090 A3 WO2004063090 A3 WO 2004063090A3 US 2004000667 W US2004000667 W US 2004000667W WO 2004063090 A3 WO2004063090 A3 WO 2004063090A3
Authority
WO
WIPO (PCT)
Prior art keywords
bistable
actuator device
micro actuator
thin film
high displacement
Prior art date
Application number
PCT/US2004/000667
Other languages
French (fr)
Other versions
WO2004063090A2 (en
Inventor
Peter J Schiller
Original Assignee
Triad Sensors Inc
Peter J Schiller
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Triad Sensors Inc, Peter J Schiller filed Critical Triad Sensors Inc
Publication of WO2004063090A2 publication Critical patent/WO2004063090A2/en
Publication of WO2004063090A3 publication Critical patent/WO2004063090A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H10N30/2048—Membrane type having non-planar shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H01H2057/006—Micromechanical piezoelectric relay

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The present invention provides a bistable actuator device formed by thin films for generating mechanical motion in response to an electronic control signal. The present invention combines a thin film bistable mechanical member (1) under compressive stress with piezoelectric thin film force elements to generate improved force and displacement properties in the actuator device. Applications of the bistable actuator device include, but not limited to, a micro pump, and an electronic switch or relay.
PCT/US2004/000667 2003-01-13 2004-01-12 High displacement bistable micro actuator WO2004063090A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US43976803P 2003-01-13 2003-01-13
US60/439,768 2003-01-13

Publications (2)

Publication Number Publication Date
WO2004063090A2 WO2004063090A2 (en) 2004-07-29
WO2004063090A3 true WO2004063090A3 (en) 2004-12-23

Family

ID=32713514

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/000667 WO2004063090A2 (en) 2003-01-13 2004-01-12 High displacement bistable micro actuator

Country Status (1)

Country Link
WO (1) WO2004063090A2 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007522609A (en) * 2003-12-22 2007-08-09 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Electronic device with microelectromechanical switch made of piezoelectric material
FI20041107A (en) * 2004-08-24 2006-02-25 Zipic Oy Liquid-filled micromechanical actuator
US20100327211A1 (en) * 2007-11-02 2010-12-30 Ikerlan Centro De Investigaciones Tecnológicas, S. Method for the production of micro/nanofluidic devices for flow control and resulting device
US8853916B2 (en) * 2011-09-30 2014-10-07 GM Global Technology Operations LLC Reconfigurable bi-stable device
JP6797835B2 (en) * 2015-06-03 2020-12-09 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． Activator
US10516943B2 (en) * 2016-05-04 2019-12-24 Infineon Technologies Ag Microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device
EP3554574B1 (en) * 2016-12-19 2020-05-13 Koninklijke Philips N.V. Breast pump apparatus
DE102017126644B4 (en) * 2017-11-13 2020-11-12 Infineon Technologies Ag Membrane element assembly and method therefor
CN109263133B (en) * 2018-09-13 2021-04-09 大连海洋大学 Intelligent structure with controllable deformation mode and deformation method thereof
FR3087264B1 (en) * 2018-10-11 2020-11-06 Safran Electronics & Defense ELECTRONIC ASSEMBLY AND PRESSURE MEASURING DEVICE WITH ENHANCED DURABILITY
US20230068420A1 (en) * 2021-08-17 2023-03-02 Facebook Technologies, Llc Fluid pump having a polyvinylidene fluoride membrane

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4383195A (en) * 1980-10-24 1983-05-10 Piezo Electric Products, Inc. Piezoelectric snap actuator
EP0435653A1 (en) * 1989-12-27 1991-07-03 Seiko Epson Corporation Micropump
EP0518618A2 (en) * 1991-06-11 1992-12-16 Canon Kabushiki Kaisha Scanning tunneling microscope with cantilever type displacement element
FR2753565A1 (en) * 1996-09-13 1998-03-20 Thomson Csf ELECTRIC SWITCHING DEVICE AND DISPLAY DEVICE USING THE SWITCHING DEVICE
JP2001277194A (en) * 2000-03-29 2001-10-09 Sumitomo Metal Ind Ltd Micropump manufacturing method
WO2003014789A2 (en) * 2001-07-05 2003-02-20 International Business Machines Coporation Microsystem switches

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4383195A (en) * 1980-10-24 1983-05-10 Piezo Electric Products, Inc. Piezoelectric snap actuator
EP0435653A1 (en) * 1989-12-27 1991-07-03 Seiko Epson Corporation Micropump
EP0518618A2 (en) * 1991-06-11 1992-12-16 Canon Kabushiki Kaisha Scanning tunneling microscope with cantilever type displacement element
FR2753565A1 (en) * 1996-09-13 1998-03-20 Thomson Csf ELECTRIC SWITCHING DEVICE AND DISPLAY DEVICE USING THE SWITCHING DEVICE
JP2001277194A (en) * 2000-03-29 2001-10-09 Sumitomo Metal Ind Ltd Micropump manufacturing method
WO2003014789A2 (en) * 2001-07-05 2003-02-20 International Business Machines Coporation Microsystem switches

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 2002, no. 02 2 April 2002 (2002-04-02) *
SCHOMBURG W K ET AL: "Design optimization of bistable microdiaphragm valves", SENSORS AND ACTUATORS A, ELSEVIER SCIENCE S.A., LAUSANNE, CH, vol. 64, no. 3, 31 January 1998 (1998-01-31), pages 259 - 264, XP004116354, ISSN: 0924-4247 *

Also Published As

Publication number Publication date
WO2004063090A2 (en) 2004-07-29

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