ATE361380T1 - Verfahren zur herstellung dünner, schwer löslicher beschichtungen - Google Patents

Verfahren zur herstellung dünner, schwer löslicher beschichtungen

Info

Publication number
ATE361380T1
ATE361380T1 AT02798256T AT02798256T ATE361380T1 AT E361380 T1 ATE361380 T1 AT E361380T1 AT 02798256 T AT02798256 T AT 02798256T AT 02798256 T AT02798256 T AT 02798256T AT E361380 T1 ATE361380 T1 AT E361380T1
Authority
AT
Austria
Prior art keywords
solid
starting materials
starting material
starting
solid mixture
Prior art date
Application number
AT02798256T
Other languages
English (en)
Inventor
Hans-Juergen Muffler
Marcus Baer
Felix Mueller
Christian-Herbert Fischer
Martha Christina Lux-Steiner
Original Assignee
Hahn Meitner Inst Berlin Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hahn Meitner Inst Berlin Gmbh filed Critical Hahn Meitner Inst Berlin Gmbh
Application granted granted Critical
Publication of ATE361380T1 publication Critical patent/ATE361380T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02—Pretreatment of the material to be coated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemically Coating (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Chemical Vapour Deposition (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Compounds Of Unknown Constitution (AREA)
AT02798256T 2001-11-30 2002-11-29 Verfahren zur herstellung dünner, schwer löslicher beschichtungen ATE361380T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10160504A DE10160504C2 (de) 2001-11-30 2001-11-30 Verfahren zur Herstellung dünner, schwer löslicher Beschichtungen

Publications (1)

Publication Number Publication Date
ATE361380T1 true ATE361380T1 (de) 2007-05-15

Family

ID=7708607

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02798256T ATE361380T1 (de) 2001-11-30 2002-11-29 Verfahren zur herstellung dünner, schwer löslicher beschichtungen

Country Status (5)

Country Link
EP (1) EP1448808B1 (de)
AT (1) ATE361380T1 (de)
DE (2) DE10160504C2 (de)
ES (1) ES2284972T3 (de)
WO (1) WO2003048404A2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0524066D0 (en) * 2005-11-25 2006-01-04 Chiron Srl 741 ii
DE102009037371B3 (de) * 2009-08-13 2011-03-17 Helmholtz-Zentrum Berlin Für Materialien Und Energie Gmbh Beschichtungsvorrichtung mit Ultraschallzerstäuber
DE102011050684A1 (de) 2011-05-27 2012-11-29 Karlsruher Institut für Technologie Vorrichtung und Verfahren zur Herstellung von hoch porösen, kristallinen Oberflächenbeschichtungen

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5908608A (en) * 1996-11-08 1999-06-01 Spectra Science Corporation Synthesis of metal chalcogenide quantum
JPH1167677A (ja) * 1997-08-15 1999-03-09 Star Micronics Co Ltd オキシ硫化錫膜及びその製造方法
DE19831214C2 (de) * 1998-03-19 2003-07-03 Hahn Meitner Inst Berlin Gmbh Verfahren und Anordnung zur Herstellung dünner Metallchalkogenid-Schichten
DE19916403C1 (de) * 1999-04-06 2000-10-12 Hahn Meitner Inst Berlin Gmbh Verfahren zur Herstellung dünner, schwer löslicher Beschichtungen

Also Published As

Publication number Publication date
EP1448808A2 (de) 2004-08-25
DE50210087D1 (de) 2007-06-14
WO2003048404A2 (de) 2003-06-12
EP1448808B1 (de) 2007-05-02
WO2003048404A3 (de) 2003-11-27
DE10160504A1 (de) 2003-06-12
DE10160504C2 (de) 2003-11-13
ES2284972T3 (es) 2007-11-16

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Legal Events

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