ATE360833T1 - Monolitische elektronische mehrlagenanordnung und deren herstellungsverfahren - Google Patents
Monolitische elektronische mehrlagenanordnung und deren herstellungsverfahrenInfo
- Publication number
- ATE360833T1 ATE360833T1 AT02791901T AT02791901T ATE360833T1 AT E360833 T1 ATE360833 T1 AT E360833T1 AT 02791901 T AT02791901 T AT 02791901T AT 02791901 T AT02791901 T AT 02791901T AT E360833 T1 ATE360833 T1 AT E360833T1
- Authority
- AT
- Austria
- Prior art keywords
- monolitic
- production method
- layer arrangement
- electronic multi
- layer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12061—Silicon
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12078—Gallium arsenide or alloys (GaAs, GaAlAs, GaAsP, GaInAs)
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12178—Epitaxial growth
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Optical Integrated Circuits (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Bipolar Transistors (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0114784A FR2832224B1 (fr) | 2001-11-15 | 2001-11-15 | Dispositif electronique monolithique multicouches et procede de realisation d'un tel dispositif |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE360833T1 true ATE360833T1 (de) | 2007-05-15 |
Family
ID=8869429
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT02791901T ATE360833T1 (de) | 2001-11-15 | 2002-11-13 | Monolitische elektronische mehrlagenanordnung und deren herstellungsverfahren |
Country Status (6)
Country | Link |
---|---|
US (1) | US20040252931A1 (de) |
EP (1) | EP1444541B1 (de) |
AT (1) | ATE360833T1 (de) |
DE (1) | DE60219815T2 (de) |
FR (1) | FR2832224B1 (de) |
WO (1) | WO2003042741A2 (de) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7442629B2 (en) | 2004-09-24 | 2008-10-28 | President & Fellows Of Harvard College | Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate |
US7057256B2 (en) | 2001-05-25 | 2006-06-06 | President & Fellows Of Harvard College | Silicon-based visible and near-infrared optoelectric devices |
WO2005071452A1 (en) * | 2004-01-23 | 2005-08-04 | Koninklijke Philips Electronics, N.V. | Seamlessly integrated optical wave guide for light generated by a semiconductor light source |
TW200537143A (en) * | 2004-02-11 | 2005-11-16 | Koninkl Philips Electronics Nv | Integrated optical wave guide for light generated by a bipolar transistor |
US7391801B1 (en) * | 2005-11-25 | 2008-06-24 | The United States Of America As Represented By The Secretary Of The Air Force | Electrically pumped Group IV semiconductor micro-ring laser |
US7608538B2 (en) * | 2007-01-05 | 2009-10-27 | International Business Machines Corporation | Formation of vertical devices by electroplating |
FR2912552B1 (fr) * | 2007-02-14 | 2009-05-22 | Soitec Silicon On Insulator | Structure multicouche et son procede de fabrication. |
US7927975B2 (en) | 2009-02-04 | 2011-04-19 | Micron Technology, Inc. | Semiconductor material manufacture |
US9911781B2 (en) | 2009-09-17 | 2018-03-06 | Sionyx, Llc | Photosensitive imaging devices and associated methods |
US9673243B2 (en) | 2009-09-17 | 2017-06-06 | Sionyx, Llc | Photosensitive imaging devices and associated methods |
WO2011119618A2 (en) * | 2010-03-24 | 2011-09-29 | Sionyx, Inc. | Devices having enhanced electromagnetic radiation detection and associated methods |
US8692198B2 (en) | 2010-04-21 | 2014-04-08 | Sionyx, Inc. | Photosensitive imaging devices and associated methods |
WO2011160130A2 (en) | 2010-06-18 | 2011-12-22 | Sionyx, Inc | High speed photosensitive devices and associated methods |
US9496308B2 (en) | 2011-06-09 | 2016-11-15 | Sionyx, Llc | Process module for increasing the response of backside illuminated photosensitive imagers and associated methods |
WO2013010127A2 (en) | 2011-07-13 | 2013-01-17 | Sionyx, Inc. | Biometric imaging devices and associated methods |
US9064764B2 (en) | 2012-03-22 | 2015-06-23 | Sionyx, Inc. | Pixel isolation elements, devices, and associated methods |
WO2014020387A1 (en) | 2012-07-31 | 2014-02-06 | Soitec | Methods of forming semiconductor structures including mems devices and integrated circuits on opposing sides of substrates, and related structures and devices |
WO2014127376A2 (en) | 2013-02-15 | 2014-08-21 | Sionyx, Inc. | High dynamic range cmos image sensor having anti-blooming properties and associated methods |
WO2014151093A1 (en) | 2013-03-15 | 2014-09-25 | Sionyx, Inc. | Three dimensional imaging utilizing stacked imager devices and associated methods |
US9002156B2 (en) * | 2013-04-29 | 2015-04-07 | International Business Machines Corporation | Vertically curved waveguide |
WO2014209421A1 (en) | 2013-06-29 | 2014-12-31 | Sionyx, Inc. | Shallow trench textured regions and associated methods |
KR102296915B1 (ko) * | 2014-07-30 | 2021-09-02 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 |
FR3058830B1 (fr) | 2016-11-14 | 2018-11-30 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede de realisation collective d’une pluralite de puces optoelectroniques |
CN110703382B (zh) * | 2019-01-10 | 2020-10-09 | 济南晶正电子科技有限公司 | 一种高集成度铌酸锂/氮化硅光波导集成结构及其制备方法 |
US10955614B1 (en) * | 2020-01-14 | 2021-03-23 | Globalfoundries U.S. Inc. | Optical fiber coupler structure having manufacturing variation-sensitive transmission blocking region |
CN111983750B (zh) * | 2020-08-28 | 2022-08-19 | 济南晶正电子科技有限公司 | 一种二氧化硅加载条型光波导集成结构及其制备方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5818072A (en) * | 1992-05-12 | 1998-10-06 | North Carolina State University | Integrated heterostructure of group II-VI semiconductor materials including epitaxial ohmic contact and method of fabricating same |
DE19616932A1 (de) * | 1996-04-27 | 1997-10-30 | Bosch Gmbh Robert | Optisches, strahlteilendes Bauelement sowie Verfahren zur Herstellung einer Prismenträgerplatte für ein solches Bauelement |
US5761350A (en) * | 1997-01-22 | 1998-06-02 | Koh; Seungug | Method and apparatus for providing a seamless electrical/optical multi-layer micro-opto-electro-mechanical system assembly |
DE19720784A1 (de) * | 1997-05-17 | 1998-11-26 | Deutsche Telekom Ag | Integrierte optische Schaltung |
US6195367B1 (en) * | 1997-12-31 | 2001-02-27 | Nortel Networks Limited | Architectural arrangement for bandwidth management in large central offices |
SE513858C2 (sv) * | 1998-03-06 | 2000-11-13 | Ericsson Telefon Ab L M | Flerskiktsstruktur samt förfarande för att tillverka flerskiktsmoduler |
DE19826648B4 (de) * | 1998-06-16 | 2005-07-28 | Siemens Ag | Schaltungsträger mit einer optischen Schicht und optoelektronisches Bauelement |
US6734453B2 (en) * | 2000-08-08 | 2004-05-11 | Translucent Photonics, Inc. | Devices with optical gain in silicon |
US20030035607A1 (en) * | 2001-08-15 | 2003-02-20 | Motorola, Inc. | Apparatus for effecting conversion between communication signals in a first signal-form and communication signals in a second signal-form and method of manufacture therefor |
US7043106B2 (en) * | 2002-07-22 | 2006-05-09 | Applied Materials, Inc. | Optical ready wafers |
-
2001
- 2001-11-15 FR FR0114784A patent/FR2832224B1/fr not_active Expired - Fee Related
-
2002
- 2002-11-13 AT AT02791901T patent/ATE360833T1/de not_active IP Right Cessation
- 2002-11-13 US US10/495,313 patent/US20040252931A1/en not_active Abandoned
- 2002-11-13 DE DE60219815T patent/DE60219815T2/de not_active Expired - Lifetime
- 2002-11-13 WO PCT/FR2002/003880 patent/WO2003042741A2/fr active IP Right Grant
- 2002-11-13 EP EP02791901A patent/EP1444541B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US20040252931A1 (en) | 2004-12-16 |
DE60219815D1 (de) | 2007-06-06 |
EP1444541A2 (de) | 2004-08-11 |
WO2003042741A3 (fr) | 2004-01-22 |
FR2832224B1 (fr) | 2004-01-16 |
FR2832224A1 (fr) | 2003-05-16 |
WO2003042741A2 (fr) | 2003-05-22 |
DE60219815T2 (de) | 2008-01-17 |
EP1444541B1 (de) | 2007-04-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |