ATE352048T1 - Belichtungsvorrichtung mit einem optischen element aus isometrischem kristall - Google Patents

Belichtungsvorrichtung mit einem optischen element aus isometrischem kristall

Info

Publication number
ATE352048T1
ATE352048T1 AT02736104T AT02736104T ATE352048T1 AT E352048 T1 ATE352048 T1 AT E352048T1 AT 02736104 T AT02736104 T AT 02736104T AT 02736104 T AT02736104 T AT 02736104T AT E352048 T1 ATE352048 T1 AT E352048T1
Authority
AT
Austria
Prior art keywords
optical element
exposure device
element made
isometric crystal
isometric
Prior art date
Application number
AT02736104T
Other languages
English (en)
Inventor
Seiji Takeuchi
Yasuyuki Unno
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26619804&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE352048(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE352048T1 publication Critical patent/ATE352048T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
    • G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties
    • G03F7/70966—Birefringence
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/12—Halides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/918—Single-crystal waveguide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Lenses (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Polarising Elements (AREA)
  • Pressure Sensors (AREA)
  • Liquid Crystal (AREA)
AT02736104T 2001-06-27 2002-06-13 Belichtungsvorrichtung mit einem optischen element aus isometrischem kristall ATE352048T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001234254 2001-06-27
JP2001244970A JP3639807B2 (ja) 2001-06-27 2001-07-06 光学素子及び製造方法

Publications (1)

Publication Number Publication Date
ATE352048T1 true ATE352048T1 (de) 2007-02-15

Family

ID=26619804

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02736104T ATE352048T1 (de) 2001-06-27 2002-06-13 Belichtungsvorrichtung mit einem optischen element aus isometrischem kristall

Country Status (8)

Country Link
US (2) US7102828B2 (de)
EP (1) EP1399766B1 (de)
JP (1) JP3639807B2 (de)
KR (1) KR100544394B1 (de)
AT (1) ATE352048T1 (de)
DE (1) DE60217673T2 (de)
TW (1) TWI244679B (de)
WO (1) WO2003003072A2 (de)

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WO2003003072A2 (en) 2003-01-09
DE60217673T2 (de) 2007-10-18
US20040136084A1 (en) 2004-07-15
KR20040015179A (ko) 2004-02-18
TWI244679B (en) 2005-12-01
EP1399766A2 (de) 2004-03-24
KR100544394B1 (ko) 2006-01-23
EP1399766B1 (de) 2007-01-17
JP2003131002A (ja) 2003-05-08
WO2003003072A3 (en) 2003-10-30
JP3639807B2 (ja) 2005-04-20
US7262920B2 (en) 2007-08-28

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