ATE302997T1 - Verfahren zur unterbrechung von metalldrähten - Google Patents

Verfahren zur unterbrechung von metalldrähten

Info

Publication number
ATE302997T1
ATE302997T1 AT99913015T AT99913015T ATE302997T1 AT E302997 T1 ATE302997 T1 AT E302997T1 AT 99913015 T AT99913015 T AT 99913015T AT 99913015 T AT99913015 T AT 99913015T AT E302997 T1 ATE302997 T1 AT E302997T1
Authority
AT
Austria
Prior art keywords
metal
hole
ablated
metal wires
pulsed
Prior art date
Application number
AT99913015T
Other languages
English (en)
Inventor
Paul Alan Basore
Neil Barrett
Trevor Young
Original Assignee
Csg Solar Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Csg Solar Ag filed Critical Csg Solar Ag
Application granted granted Critical
Publication of ATE302997T1 publication Critical patent/ATE302997T1/de

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/362Laser etching
    • B23K26/364Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • B23K26/382Removing material by boring or cutting by boring
    • B23K26/389Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Photovoltaic Devices (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
AT99913015T 1998-04-09 1999-04-09 Verfahren zur unterbrechung von metalldrähten ATE302997T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPP2903A AUPP290398A0 (en) 1998-04-09 1998-04-09 Aluminium film interrupting process
PCT/AU1999/000268 WO1999053554A1 (en) 1998-04-09 1999-04-09 Metal film interrupting process

Publications (1)

Publication Number Publication Date
ATE302997T1 true ATE302997T1 (de) 2005-09-15

Family

ID=3807162

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99913015T ATE302997T1 (de) 1998-04-09 1999-04-09 Verfahren zur unterbrechung von metalldrähten

Country Status (6)

Country Link
EP (1) EP1090430B1 (de)
AT (1) ATE302997T1 (de)
AU (1) AUPP290398A0 (de)
DE (1) DE69926891T2 (de)
ES (1) ES2244184T3 (de)
WO (1) WO1999053554A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AUPQ385899A0 (en) 1999-11-04 1999-11-25 Pacific Solar Pty Limited Formation of contacts on thin films
PT2031082E (pt) * 2007-08-31 2014-11-04 Ecole Polytech Substrato metálico texturizado cristalograficamente, dispositivvo texturizado cristalograficamente, célula e módulo fotovoltaico que compreendem um tal dispositivo e processo de deposição de camadas finas

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4783421A (en) * 1985-04-15 1988-11-08 Solarex Corporation Method for manufacturing electrical contacts for a thin-film semiconductor device
DE3514824A1 (de) * 1985-04-24 1986-11-06 Siemens Ag Verfahren zur bildung von schmalen, metallfreien streifen in der metallschicht von kunststoffolien
DE3705500A1 (de) * 1987-02-20 1988-09-01 Siemens Ag Verfahren zur strukturierung von solarzellen mit hilfe eines lasers im pulsbetrieb
NL8801553A (nl) * 1988-06-17 1990-01-16 Tno Werkwijze voor het, onder toepassing van een laserbundel, micro-bewerken van het oppervlak van een werkstuk.
JP3150322B2 (ja) * 1990-05-18 2001-03-26 株式会社日立製作所 レーザによる配線切断加工方法及びレーザ加工装置
AUPN736195A0 (en) * 1995-12-29 1996-01-25 Pacific Solar Pty Limited Improved laser grooving method

Also Published As

Publication number Publication date
ES2244184T3 (es) 2005-12-01
AUPP290398A0 (en) 1998-05-07
DE69926891T2 (de) 2006-06-14
WO1999053554A1 (en) 1999-10-21
EP1090430B1 (de) 2005-08-24
EP1090430A4 (de) 2004-05-26
EP1090430A1 (de) 2001-04-11
DE69926891D1 (de) 2005-09-29

Similar Documents

Publication Publication Date Title
KR840002159A (ko) 단결정막의 제조 방법
BR9405973A (pt) Remoção de contaminantes superficiais por irradiação
DK0679052T3 (da) Fremgangsmåde til struktureret metallisering af substratoverflader
TW335503B (en) Semiconductor thin film and manufacturing method and semiconductor device and its manufacturing method
GB2396962B (en) Mask for sequential lateral solidification and and crystallization method using thereof
EP0398374A3 (de) Verfahren und Apparatur zur Herstellung eines oxydsupraleitenden Drahtes
KR970060380A (ko) 금속 박막과 이의 제조 방법. 및 금속 박막을 사용하는 탄성 표면파 장치와 이의 형성 방법
ES2159541T3 (es) Metodo de fabricacion de peliculas ultra-gruesas para controlar las propiedades termicas y de conduccion de corriente en circuitos hibridos.
WO1999039371A3 (fr) PROCEDE DE REALISATION D'UNE STRUCTURE DE TYPE SEMI-CONDUCTEUR SUR ISOLANT ET EN PARTICULIER SiCOI
MY134849A (en) Laser annealing method and semiconductor device fabricating method
EP1302979A3 (de) Verfahren zur Herstellung eines Durchganglochs oder eines Grabens in einem Siliziumsubstrat
AU2001228195A1 (en) Method for locally removing a coat applied on a translucent or transparent substrate
KR960703266A (ko) 피막 경화 방법(Method of curing a film)
MY128008A (en) Substrate fabrication method and device
KR950008721A (ko) 표면에 구조를 갖는 금속도금을 제조하는 방법
DK1218248T3 (da) Laser-ætset trækflig til beholderåbningsindretning og fremgangsmåde til fremstilling deraf
RU99127463A (ru) Маркирование алмаза
ATE302997T1 (de) Verfahren zur unterbrechung von metalldrähten
DE69605652D1 (de) Oberflächebehandlung
HK1057129A1 (en) Metal pattern formation.
AU7267800A (en) Method for producing a conductor pattern on a dielectric substrate
DK0923457T3 (da) Metallisk genstand med visuelt kontrasterende områder
JPS5815226A (ja) レ−ザアニ−リング法
DK0800886T3 (da) Opbygning af trådelektrode til elektroerosion, fremgangsmåde til fremstilling af den samt anvendelse til elektroerosion
JPS574139A (en) Semiconductor device and manufacturing process therefor

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties