ATE29623T1 - Magnetron kathodenzerstauebungssystem. - Google Patents

Magnetron kathodenzerstauebungssystem.

Info

Publication number
ATE29623T1
ATE29623T1 AT83200697T AT83200697T ATE29623T1 AT E29623 T1 ATE29623 T1 AT E29623T1 AT 83200697 T AT83200697 T AT 83200697T AT 83200697 T AT83200697 T AT 83200697T AT E29623 T1 ATE29623 T1 AT E29623T1
Authority
AT
Austria
Prior art keywords
cathode
anode
substrate
rod
field lines
Prior art date
Application number
AT83200697T
Other languages
German (de)
English (en)
Inventor
Jacobus Eduardus Crombeen
Jan Visser
Gary Evan Thomas
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Application granted granted Critical
Publication of ATE29623T1 publication Critical patent/ATE29623T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H01J37/3408—Planar magnetron sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Microwave Tubes (AREA)
  • Particle Accelerators (AREA)
AT83200697T 1982-05-21 1983-05-17 Magnetron kathodenzerstauebungssystem. ATE29623T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8202092A NL8202092A (nl) 1982-05-21 1982-05-21 Magnetronkathodesputtersysteem.
EP83200697A EP0095211B1 (en) 1982-05-21 1983-05-17 Magnetron cathode sputtering system

Publications (1)

Publication Number Publication Date
ATE29623T1 true ATE29623T1 (de) 1987-09-15

Family

ID=19839767

Family Applications (1)

Application Number Title Priority Date Filing Date
AT83200697T ATE29623T1 (de) 1982-05-21 1983-05-17 Magnetron kathodenzerstauebungssystem.

Country Status (8)

Country Link
US (1) US4427524A (en:Method)
EP (1) EP0095211B1 (en:Method)
JP (1) JPS58210167A (en:Method)
AT (1) ATE29623T1 (en:Method)
AU (1) AU557135B2 (en:Method)
CA (1) CA1193998A (en:Method)
DE (1) DE3373590D1 (en:Method)
NL (1) NL8202092A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5863399A (en) * 1996-04-13 1999-01-26 Singulus Technologies Gmbh Device for cathode sputtering

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4515675A (en) * 1983-07-06 1985-05-07 Leybold-Heraeus Gmbh Magnetron cathode for cathodic evaportion apparatus
US4508612A (en) * 1984-03-07 1985-04-02 International Business Machines Corporation Shield for improved magnetron sputter deposition into surface recesses
EP0162643B1 (en) * 1984-05-17 1989-04-12 Varian Associates, Inc. Sputter coating source having plural target rings
US4606806A (en) * 1984-05-17 1986-08-19 Varian Associates, Inc. Magnetron sputter device having planar and curved targets
JPS62287073A (ja) * 1986-06-04 1987-12-12 Sony Corp マグネトロンスパツタリング用カソ−ド装置
US4728406A (en) * 1986-08-18 1988-03-01 Energy Conversion Devices, Inc. Method for plasma - coating a semiconductor body
US4738761A (en) * 1986-10-06 1988-04-19 Microelectronics Center Of North Carolina Shared current loop, multiple field apparatus and process for plasma processing
DE3634710A1 (de) * 1986-10-11 1988-04-21 Ver Glaswerke Gmbh Vorrichtung zum vakuumbeschichten einer glasscheibe durch reaktive kathodenzerstaeubung
DE3721373A1 (de) * 1987-06-29 1989-01-12 Leybold Ag Beschichtungsvorrichtung
DE3738845A1 (de) * 1987-11-16 1989-05-24 Leybold Ag Zerstaeubungskatode nach dem magnetronprinzip
KR970002340B1 (ko) * 1988-07-15 1997-03-03 미쓰비시 가세이 가부시끼가이샤 자기 기록 매체의 제조방법
JP2934711B2 (ja) * 1989-12-07 1999-08-16 カシオ計算機株式会社 スパッタ装置
US5298720A (en) * 1990-04-25 1994-03-29 International Business Machines Corporation Method and apparatus for contamination control in processing apparatus containing voltage driven electrode
US5045166A (en) * 1990-05-21 1991-09-03 Mcnc Magnetron method and apparatus for producing high density ionic gas discharge
US5080772A (en) * 1990-08-24 1992-01-14 Materials Research Corporation Method of improving ion flux distribution uniformity on a substrate
DE4221930C2 (de) * 1991-11-21 2001-04-05 Leybold Ag Vorrichtung zur haftfesten Beschichtung eines Kunststoffsubstrats
JP2570594Y2 (ja) * 1991-12-17 1998-05-06 日新電機株式会社 薄膜形成装置
DE4202211A1 (de) * 1992-01-28 1993-07-29 Leybold Ag Sputteranlage mit wenigstens einer magnetron-kathode
NL1000139C2 (nl) * 1995-04-13 1996-10-15 Od & Me Bv Magnetronsputtersysteem.
CH691643A5 (de) 1995-10-06 2001-08-31 Unaxis Balzers Ag Magnetronzerstäubungsquelle und deren Verwendung.
DE19614595A1 (de) * 1996-04-13 1997-10-16 Singulus Technologies Gmbh Vorrichtung zur Kathodenzerstäubung
DE19614599A1 (de) * 1996-04-13 1997-10-16 Singulus Technologies Gmbh Vorrichtung zur Kathodenzerstäubung
DE19947932C1 (de) * 1999-09-28 2001-04-26 Fraunhofer Ges Forschung Einrichtung zum Magnetronzerstäuben
US6783638B2 (en) * 2001-09-07 2004-08-31 Sputtered Films, Inc. Flat magnetron
JP4563629B2 (ja) * 2001-11-19 2010-10-13 株式会社エフ・ティ・エスコーポレーション 対向ターゲット式スパッタ装置
US7381311B2 (en) * 2003-10-21 2008-06-03 The United States Of America As Represented By The Secretary Of The Air Force Filtered cathodic-arc plasma source
US8038850B2 (en) * 2006-06-23 2011-10-18 Qimonda Ag Sputter deposition method for forming integrated circuit
US20080083611A1 (en) * 2006-10-06 2008-04-10 Tegal Corporation High-adhesive backside metallization
US20090246385A1 (en) * 2008-03-25 2009-10-01 Tegal Corporation Control of crystal orientation and stress in sputter deposited thin films
US8808513B2 (en) * 2008-03-25 2014-08-19 Oem Group, Inc Stress adjustment in reactive sputtering
ES2374775B1 (es) * 2009-04-03 2013-01-03 Universidad De Castilla La Mancha Unidad de pulverización catódica de blancos circulares.
US8482375B2 (en) * 2009-05-24 2013-07-09 Oem Group, Inc. Sputter deposition of cermet resistor films with low temperature coefficient of resistance
US9127356B2 (en) * 2011-08-18 2015-09-08 Taiwan Semiconductor Manufacturing Co., Ltd. Sputtering target with reverse erosion profile surface and sputtering system and method using the same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3330752A (en) * 1964-12-31 1967-07-11 Ibm Method and apparatus for cathode sputtering including suppressing temperature rise adjacent the anode using a localized magnetic field
US3897325A (en) * 1972-10-20 1975-07-29 Nippon Electric Varian Ltd Low temperature sputtering device
US4198283A (en) * 1978-11-06 1980-04-15 Materials Research Corporation Magnetron sputtering target and cathode assembly
HU179482B (en) * 1979-02-19 1982-10-28 Mikroelektronikai Valalat Penning pulverizel source
US4362611A (en) 1981-07-27 1982-12-07 International Business Machines Corporation Quadrupole R.F. sputtering system having an anode/cathode shield and a floating target shield

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5863399A (en) * 1996-04-13 1999-01-26 Singulus Technologies Gmbh Device for cathode sputtering

Also Published As

Publication number Publication date
AU1468283A (en) 1983-11-24
EP0095211A2 (en) 1983-11-30
AU557135B2 (en) 1986-12-04
US4427524A (en) 1984-01-24
CA1193998A (en) 1985-09-24
JPS58210167A (ja) 1983-12-07
EP0095211A3 (en) 1984-05-09
JPH0227433B2 (en:Method) 1990-06-18
NL8202092A (nl) 1983-12-16
EP0095211B1 (en) 1987-09-09
DE3373590D1 (en) 1987-10-15

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee