NL1000139C2 - Magnetronsputtersysteem. - Google Patents

Magnetronsputtersysteem.

Info

Publication number
NL1000139C2
NL1000139C2 NL1000139A NL1000139A NL1000139C2 NL 1000139 C2 NL1000139 C2 NL 1000139C2 NL 1000139 A NL1000139 A NL 1000139A NL 1000139 A NL1000139 A NL 1000139A NL 1000139 C2 NL1000139 C2 NL 1000139C2
Authority
NL
Netherlands
Prior art keywords
sputtering system
microwave sputtering
microwave
sputtering
Prior art date
Application number
NL1000139A
Other languages
English (en)
Inventor
Jeroen Franciscus Landsbergen
Jan Visser
Original Assignee
Od & Me Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Od & Me Bv filed Critical Od & Me Bv
Priority to NL1000139A priority Critical patent/NL1000139C2/nl
Priority to EP96200962A priority patent/EP0737999B1/en
Priority to DE69605840T priority patent/DE69605840T2/de
Priority to US08/634,901 priority patent/US5868914A/en
Priority to JP8092536A priority patent/JPH08296040A/ja
Application granted granted Critical
Publication of NL1000139C2 publication Critical patent/NL1000139C2/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3438—Electrodes other than cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H01J37/3408—Planar magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3464—Operating strategies
    • H01J37/347—Thickness uniformity of coated layers or desired profile of target erosion
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
NL1000139A 1995-04-13 1995-04-13 Magnetronsputtersysteem. NL1000139C2 (nl)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NL1000139A NL1000139C2 (nl) 1995-04-13 1995-04-13 Magnetronsputtersysteem.
EP96200962A EP0737999B1 (en) 1995-04-13 1996-04-04 A magnetron sputtering system
DE69605840T DE69605840T2 (de) 1995-04-13 1996-04-04 Magnetron Zerstäubungssystem
US08/634,901 US5868914A (en) 1995-04-13 1996-04-12 Magnetron sputtering system
JP8092536A JPH08296040A (ja) 1995-04-13 1996-04-15 マグネトロンスパッタリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL1000139A NL1000139C2 (nl) 1995-04-13 1995-04-13 Magnetronsputtersysteem.

Publications (1)

Publication Number Publication Date
NL1000139C2 true NL1000139C2 (nl) 1996-10-15

Family

ID=19760879

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1000139A NL1000139C2 (nl) 1995-04-13 1995-04-13 Magnetronsputtersysteem.

Country Status (5)

Country Link
US (1) US5868914A (nl)
EP (1) EP0737999B1 (nl)
JP (1) JPH08296040A (nl)
DE (1) DE69605840T2 (nl)
NL (1) NL1000139C2 (nl)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19757353C1 (de) * 1997-12-22 1999-07-29 Fraunhofer Ges Forschung Einrichtung zum Betreiben einer Niederdruckentladung
US6500321B1 (en) 1999-05-26 2002-12-31 Novellus Systems, Inc. Control of erosion profile and process characteristics in magnetron sputtering by geometrical shaping of the sputtering target
US7433655B2 (en) 2000-03-24 2008-10-07 Cymbet Corporation Battery-operated wireless-communication apparatus and method
US6663754B2 (en) 2001-04-13 2003-12-16 Applied Materials, Inc. Tubular magnet as center pole in unbalanced sputtering magnetron
US6906436B2 (en) * 2003-01-02 2005-06-14 Cymbet Corporation Solid state activity-activated battery device and method
US7294209B2 (en) * 2003-01-02 2007-11-13 Cymbet Corporation Apparatus and method for depositing material onto a substrate using a roll-to-roll mask
US7603144B2 (en) * 2003-01-02 2009-10-13 Cymbet Corporation Active wireless tagging system on peel and stick substrate
US20040131760A1 (en) * 2003-01-02 2004-07-08 Stuart Shakespeare Apparatus and method for depositing material onto multiple independently moving substrates in a chamber
US7211351B2 (en) 2003-10-16 2007-05-01 Cymbet Corporation Lithium/air batteries with LiPON as separator and protective barrier and method
EP1714333A2 (en) * 2004-01-06 2006-10-25 Cymbet Corporation Layered barrier structure having one or more definable layers and method
US7776478B2 (en) * 2005-07-15 2010-08-17 Cymbet Corporation Thin-film batteries with polymer and LiPON electrolyte layers and method
EP1911118B1 (en) * 2005-07-15 2014-03-05 Cymbet Corporation Thin-film batteries with soft and hard electrolyte layers
US20070012244A1 (en) * 2005-07-15 2007-01-18 Cymbet Corporation Apparatus and method for making thin-film batteries with soft and hard electrolyte layers
WO2011009105A1 (en) * 2009-07-16 2011-01-20 Woodward Bewley Technology Development Llc Novel alloy and method of making and using same
WO2011077653A1 (ja) * 2009-12-25 2011-06-30 キヤノンアネルバ株式会社 電子デバイスの製造方法、およびスパッタリング装置
US11527774B2 (en) 2011-06-29 2022-12-13 Space Charge, LLC Electrochemical energy storage devices
US11996517B2 (en) 2011-06-29 2024-05-28 Space Charge, LLC Electrochemical energy storage devices
US10601074B2 (en) 2011-06-29 2020-03-24 Space Charge, LLC Rugged, gel-free, lithium-free, high energy density solid-state electrochemical energy storage devices
US9853325B2 (en) 2011-06-29 2017-12-26 Space Charge, LLC Rugged, gel-free, lithium-free, high energy density solid-state electrochemical energy storage devices
US10658705B2 (en) 2018-03-07 2020-05-19 Space Charge, LLC Thin-film solid-state energy storage devices
CN116752112B (zh) * 2023-08-17 2023-11-10 上海陛通半导体能源科技股份有限公司 射频磁控溅射设备

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0095211A2 (en) * 1982-05-21 1983-11-30 Koninklijke Philips Electronics N.V. Magnetron cathode sputtering system
JPS61204371A (ja) * 1985-03-06 1986-09-10 Ulvac Corp 陰極スパツタリング用磁気回路装置
EP0645798A1 (en) * 1989-01-30 1995-03-29 Mitsubishi Kasei Corporation Magnetron sputtering apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4461688A (en) * 1980-06-23 1984-07-24 Vac-Tec Systems, Inc. Magnetically enhanced sputtering device having a plurality of magnetic field sources including improved plasma trapping device and method
US4892633A (en) * 1988-11-14 1990-01-09 Vac-Tec Systems, Inc. Magnetron sputtering cathode
DE3912295C2 (de) * 1989-04-14 1997-05-28 Leybold Ag Katodenzerstäubungsanlage
US5174880A (en) * 1991-08-05 1992-12-29 Hmt Technology Corporation Magnetron sputter gun target assembly with distributed magnetic field

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0095211A2 (en) * 1982-05-21 1983-11-30 Koninklijke Philips Electronics N.V. Magnetron cathode sputtering system
JPS61204371A (ja) * 1985-03-06 1986-09-10 Ulvac Corp 陰極スパツタリング用磁気回路装置
EP0645798A1 (en) * 1989-01-30 1995-03-29 Mitsubishi Kasei Corporation Magnetron sputtering apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 011, no. 038 (C - 401) 4 February 1987 (1987-02-04) *

Also Published As

Publication number Publication date
DE69605840D1 (de) 2000-02-03
DE69605840T2 (de) 2000-05-18
US5868914A (en) 1999-02-09
EP0737999B1 (en) 1999-12-29
EP0737999A1 (en) 1996-10-16
JPH08296040A (ja) 1996-11-12

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Legal Events

Date Code Title Description
PD2B A search report has been drawn up
SD Assignments of patents

Owner name: OTB GROUP B.V.

VD1 Lapsed due to non-payment of the annual fee

Effective date: 20021101