DE69605840D1 - Magnetron Zerstäubungssystem - Google Patents
Magnetron ZerstäubungssystemInfo
- Publication number
- DE69605840D1 DE69605840D1 DE69605840T DE69605840T DE69605840D1 DE 69605840 D1 DE69605840 D1 DE 69605840D1 DE 69605840 T DE69605840 T DE 69605840T DE 69605840 T DE69605840 T DE 69605840T DE 69605840 D1 DE69605840 D1 DE 69605840D1
- Authority
- DE
- Germany
- Prior art keywords
- atomization system
- magnetron atomization
- magnetron
- atomization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3438—Electrodes other than cathode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
- H01J37/3408—Planar magnetron sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3464—Operating strategies
- H01J37/347—Thickness uniformity of coated layers or desired profile of target erosion
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL1000139A NL1000139C2 (nl) | 1995-04-13 | 1995-04-13 | Magnetronsputtersysteem. |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69605840D1 true DE69605840D1 (de) | 2000-02-03 |
DE69605840T2 DE69605840T2 (de) | 2000-05-18 |
Family
ID=19760879
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69605840T Expired - Fee Related DE69605840T2 (de) | 1995-04-13 | 1996-04-04 | Magnetron Zerstäubungssystem |
Country Status (5)
Country | Link |
---|---|
US (1) | US5868914A (de) |
EP (1) | EP0737999B1 (de) |
JP (1) | JPH08296040A (de) |
DE (1) | DE69605840T2 (de) |
NL (1) | NL1000139C2 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19757353C1 (de) * | 1997-12-22 | 1999-07-29 | Fraunhofer Ges Forschung | Einrichtung zum Betreiben einer Niederdruckentladung |
US6500321B1 (en) | 1999-05-26 | 2002-12-31 | Novellus Systems, Inc. | Control of erosion profile and process characteristics in magnetron sputtering by geometrical shaping of the sputtering target |
DE60135100D1 (de) | 2000-03-24 | 2008-09-11 | Cymbet Corp | E mit ultradünnem elektrolyten |
US6663754B2 (en) | 2001-04-13 | 2003-12-16 | Applied Materials, Inc. | Tubular magnet as center pole in unbalanced sputtering magnetron |
US6906436B2 (en) | 2003-01-02 | 2005-06-14 | Cymbet Corporation | Solid state activity-activated battery device and method |
US20040131760A1 (en) * | 2003-01-02 | 2004-07-08 | Stuart Shakespeare | Apparatus and method for depositing material onto multiple independently moving substrates in a chamber |
US7294209B2 (en) * | 2003-01-02 | 2007-11-13 | Cymbet Corporation | Apparatus and method for depositing material onto a substrate using a roll-to-roll mask |
US7603144B2 (en) * | 2003-01-02 | 2009-10-13 | Cymbet Corporation | Active wireless tagging system on peel and stick substrate |
US7211351B2 (en) | 2003-10-16 | 2007-05-01 | Cymbet Corporation | Lithium/air batteries with LiPON as separator and protective barrier and method |
CN1957487A (zh) * | 2004-01-06 | 2007-05-02 | Cymbet公司 | 具有一个或者更多个可限定层的层式阻挡物结构和方法 |
US20070012244A1 (en) * | 2005-07-15 | 2007-01-18 | Cymbet Corporation | Apparatus and method for making thin-film batteries with soft and hard electrolyte layers |
WO2007011900A1 (en) * | 2005-07-15 | 2007-01-25 | Cymbet Corporation | Thin-film batteries with soft and hard electrolyte layers and method |
US7776478B2 (en) * | 2005-07-15 | 2010-08-17 | Cymbet Corporation | Thin-film batteries with polymer and LiPON electrolyte layers and method |
WO2011009105A1 (en) * | 2009-07-16 | 2011-01-20 | Woodward Bewley Technology Development Llc | Novel alloy and method of making and using same |
WO2011077653A1 (ja) * | 2009-12-25 | 2011-06-30 | キヤノンアネルバ株式会社 | 電子デバイスの製造方法、およびスパッタリング装置 |
US11527774B2 (en) | 2011-06-29 | 2022-12-13 | Space Charge, LLC | Electrochemical energy storage devices |
US10658705B2 (en) | 2018-03-07 | 2020-05-19 | Space Charge, LLC | Thin-film solid-state energy storage devices |
US10601074B2 (en) | 2011-06-29 | 2020-03-24 | Space Charge, LLC | Rugged, gel-free, lithium-free, high energy density solid-state electrochemical energy storage devices |
US11996517B2 (en) | 2011-06-29 | 2024-05-28 | Space Charge, LLC | Electrochemical energy storage devices |
US9853325B2 (en) | 2011-06-29 | 2017-12-26 | Space Charge, LLC | Rugged, gel-free, lithium-free, high energy density solid-state electrochemical energy storage devices |
CN116752112B (zh) * | 2023-08-17 | 2023-11-10 | 上海陛通半导体能源科技股份有限公司 | 射频磁控溅射设备 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4461688A (en) * | 1980-06-23 | 1984-07-24 | Vac-Tec Systems, Inc. | Magnetically enhanced sputtering device having a plurality of magnetic field sources including improved plasma trapping device and method |
NL8202092A (nl) * | 1982-05-21 | 1983-12-16 | Philips Nv | Magnetronkathodesputtersysteem. |
JPS61204371A (ja) * | 1985-03-06 | 1986-09-10 | Ulvac Corp | 陰極スパツタリング用磁気回路装置 |
US4892633A (en) * | 1988-11-14 | 1990-01-09 | Vac-Tec Systems, Inc. | Magnetron sputtering cathode |
JPH0774439B2 (ja) * | 1989-01-30 | 1995-08-09 | 三菱化学株式会社 | マグネトロンスパッタ装置 |
DE3912295C2 (de) * | 1989-04-14 | 1997-05-28 | Leybold Ag | Katodenzerstäubungsanlage |
US5174880A (en) * | 1991-08-05 | 1992-12-29 | Hmt Technology Corporation | Magnetron sputter gun target assembly with distributed magnetic field |
-
1995
- 1995-04-13 NL NL1000139A patent/NL1000139C2/xx not_active IP Right Cessation
-
1996
- 1996-04-04 DE DE69605840T patent/DE69605840T2/de not_active Expired - Fee Related
- 1996-04-04 EP EP96200962A patent/EP0737999B1/de not_active Expired - Lifetime
- 1996-04-12 US US08/634,901 patent/US5868914A/en not_active Expired - Fee Related
- 1996-04-15 JP JP8092536A patent/JPH08296040A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
US5868914A (en) | 1999-02-09 |
JPH08296040A (ja) | 1996-11-12 |
EP0737999A1 (de) | 1996-10-16 |
EP0737999B1 (de) | 1999-12-29 |
NL1000139C2 (nl) | 1996-10-15 |
DE69605840T2 (de) | 2000-05-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: DERZEIT KEIN VERTRETER BESTELLT Free format text: DERZEIT KEIN VERTRETER BESTELLT |
|
8327 | Change in the person/name/address of the patent owner |
Owner name: OTB GROUP B.V., EINDHOVEN, NL |
|
8339 | Ceased/non-payment of the annual fee |