ATE290687T1 - Phasenmessung in einem strahlungsfeld - Google Patents

Phasenmessung in einem strahlungsfeld

Info

Publication number
ATE290687T1
ATE290687T1 AT99957223T AT99957223T ATE290687T1 AT E290687 T1 ATE290687 T1 AT E290687T1 AT 99957223 T AT99957223 T AT 99957223T AT 99957223 T AT99957223 T AT 99957223T AT E290687 T1 ATE290687 T1 AT E290687T1
Authority
AT
Austria
Prior art keywords
representation
integral transform
produce
measure
applying
Prior art date
Application number
AT99957223T
Other languages
English (en)
Inventor
Keith Nugent
David Paganin
Anton Barty
Original Assignee
Univ Melbourne
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Melbourne filed Critical Univ Melbourne
Application granted granted Critical
Publication of ATE290687T1 publication Critical patent/ATE290687T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02084—Processing in the Fourier or frequency domain when not imaged in the frequency domain
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/44—Electric circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/46—Systems using spatial filters
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/10—Image enhancement or restoration using non-spatial domain filtering
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00—Image enhancement or restoration
    • G06T5/70—Denoising; Smoothing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G01J2003/282—Modified CCD or like
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G01J2009/0203—Phased array of beams
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20048—Transform domain processing
    • G06T2207/20056—Discrete and fast Fourier transform, [DFT, FFT]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Signal Processing (AREA)
  • Theoretical Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Inorganic Insulating Materials (AREA)
  • Control Of High-Frequency Heating Circuits (AREA)
  • Power Steering Mechanism (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Radiation (AREA)
AT99957223T 1998-11-02 1999-11-01 Phasenmessung in einem strahlungsfeld ATE290687T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPP6900A AUPP690098A0 (en) 1998-11-02 1998-11-02 Phase determination of a radiation wave field
PCT/AU1999/000949 WO2000026622A1 (en) 1998-11-02 1999-11-01 Phase determination of a radiation wave field

Publications (1)

Publication Number Publication Date
ATE290687T1 true ATE290687T1 (de) 2005-03-15

Family

ID=3811114

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99957223T ATE290687T1 (de) 1998-11-02 1999-11-01 Phasenmessung in einem strahlungsfeld

Country Status (15)

Country Link
US (2) US6885442B1 (de)
EP (2) EP1127252B1 (de)
JP (1) JP4391698B2 (de)
KR (1) KR100642388B1 (de)
CN (1) CN100402996C (de)
AT (1) ATE290687T1 (de)
AU (1) AUPP690098A0 (de)
BR (1) BR9914976A (de)
CA (1) CA2348912C (de)
DE (1) DE69924136T2 (de)
ES (1) ES2239854T3 (de)
RU (1) RU2237871C2 (de)
TW (1) TW487810B (de)
WO (1) WO2000026622A1 (de)
ZA (1) ZA200103169B (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AUPR672601A0 (en) * 2001-07-31 2001-08-23 Iatia Imaging Pty Ltd Apparatus and method of imaging an object
AUPR830801A0 (en) * 2001-10-16 2001-11-08 Iatia Imaging Pty Ltd Phase determination of a radiation wavefield
US20070182844A1 (en) * 2003-03-09 2007-08-09 Latia Imaging Pty Ltd Optical system for producing differently focused images
EP1668595A4 (de) * 2003-09-23 2007-01-03 Iatia Imaging Pty Ltd Verfahren und vorrichtung zur bestimmung der fläche oder konfluenz einer probe
JP2007526457A (ja) * 2004-03-01 2007-09-13 イアティア イメージング プロプライアタリー リミティド 深度情報を含む画像の生成方法と装置
GB0409572D0 (en) * 2004-04-29 2004-06-02 Univ Sheffield High resolution imaging
US20080094634A1 (en) * 2004-10-01 2008-04-24 Jacob Rubinstein Phase Determination System and Method
FR2881520B1 (fr) * 2005-02-03 2007-10-12 Lyuboshenko Igor Obtention d'une image de phase a partir d'une image d'intensite
DE102007009661A1 (de) * 2006-08-31 2008-03-13 Carl Zeiss Sms Gmbh Verfahren und Vorrichtung zur ortsaufgelösten Bestimmung der Phase und Amplitude des elektromagnetischen Feldes in der Bildebene einer Abbildung eines Objektes
DE102006061978A1 (de) * 2006-12-21 2008-06-26 Forschungszentrum Jülich GmbH Elektronenmikroskop und Verfahren zur Messung der Defokusstreuung
US7564545B2 (en) * 2007-03-15 2009-07-21 Kla-Tencor Technologies Corp. Inspection methods and systems for lithographic masks
US8917901B2 (en) * 2007-07-18 2014-12-23 Iatia Imaging Pty Ltd. Method and apparatus for determining the surface profile of an object
ES2369432B2 (es) * 2007-09-27 2012-05-03 Universidade De Santiago De Compostela Procedimiento para la optimización de la medida de la derivada direccional de la intensidad de radiación electromagnética y dispositivo para su puesta en pr�?ctica.
JP2009186679A (ja) * 2008-02-05 2009-08-20 Olympus Corp 観察装置
DE102009019514A1 (de) * 2009-04-30 2010-11-11 Siemens Aktiengesellschaft CT-System und Verfahren zur Phasenkontrast- und Absorptionsbildgebung
GB2495537B (en) 2011-10-14 2017-02-15 Solentim Ltd Method of and apparatus for analysis of a sample of biological tissue cells
US9423307B2 (en) 2013-02-20 2016-08-23 Mesa Photonics, LLC Method and apparatus for determining wave characteristics using interaction with a known wave
DE102016203275B4 (de) * 2016-02-29 2019-07-18 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren und Vorrichtung zur Bestimmung eines Defokussierungswerts und Verfahren und Vorrichtung zur bildbasierten Bestimmung einer dimensionellen Größe
DE102016114375A1 (de) 2016-08-03 2018-02-08 Humboldt-Universität Zu Berlin Vorrichtung zur Erzeugung einer Bildserie
JP2018180296A (ja) * 2017-04-13 2018-11-15 横河電機株式会社 顕微鏡システム、顕微鏡、処理装置、及び顕微鏡用カメラ
CN107942147B (zh) * 2017-11-15 2019-09-20 北京邮电大学 一种天线的远场方向图的测量方法和装置
US10274378B1 (en) 2018-04-26 2019-04-30 Mesa Photonics, LLC Method and apparatus for determining wave characteristics using constrained interactions of waves
FR3091347B1 (fr) 2018-12-26 2021-11-05 Commissariat Energie Atomique Procédé de caractérisation d'un échantillon par imagerie de phase
US11501420B2 (en) 2019-09-26 2022-11-15 Perkinelmer Cellular Technologies Germany Gmbh Reconstructing phase images with deep learning
US11362481B2 (en) 2020-05-01 2022-06-14 Mesa Photonics, LLC Method and apparatus for measuring optical pulses
US11237059B1 (en) * 2020-12-14 2022-02-01 Gerchberg Ophthalmic Dispensing, PLLC Totagraphy: Coherent diffractive/digital information reconstruction by iterative phase recovery using special masks
CN112540460A (zh) * 2020-12-29 2021-03-23 华东交通大学 基于tir与微透镜阵列组合的光学系统设计方法
CN113376448B (zh) * 2021-04-29 2023-02-28 北京邮电大学 一种用于紧缩场测试中静区相位恢复的方法及装置
WO2023039702A1 (en) * 2021-09-14 2023-03-23 Shenzhen Xpectvision Technology Co., Ltd. X-ray imaging in expansion microscopy
WO2023165667A1 (en) * 2022-03-01 2023-09-07 Danmarks Tekniske Universitet Light-field imaging based on tilt-aberration
CN116399551B (zh) * 2023-06-06 2023-08-04 中国航空工业集团公司沈阳空气动力研究所 一种用于高超声速风洞的模型三维密度场测量方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4309602A (en) * 1979-11-01 1982-01-05 Eikonix Corportation Wavefront sensing by phase retrieval
US4690555A (en) * 1985-11-01 1987-09-01 Hughes Aircraft Company Solid-state wavefront slope determination
CH678663A5 (de) 1988-06-09 1991-10-15 Zeiss Carl Fa
JP2563134B2 (ja) 1989-01-25 1996-12-11 日本電子株式会社 走査透過型位相差電子顕微鏡
JP3039563B2 (ja) 1990-11-29 2000-05-08 株式会社日立製作所 走査電子顕微鏡及び走査電子顕微方法
US5367375A (en) * 1992-02-07 1994-11-22 Hughes Aircraft Company Spatial wavefront evaluation by intensity relationship
KR960019415A (ko) * 1994-11-23 1996-06-17 윤종용 플라즈마 표시 패널
US5633714A (en) 1994-12-19 1997-05-27 International Business Machines Corporation Preprocessing of image amplitude and phase data for CD and OL measurement
AUPN201295A0 (en) 1995-03-28 1995-04-27 Commonwealth Scientific And Industrial Research Organisation Simplified conditions and configurations for phase-contrast imaging with hard x-rays
JPH09187455A (ja) 1996-01-10 1997-07-22 Hitachi Ltd 位相型ｘ線ｃｔ装置
JP4436459B2 (ja) * 1996-12-24 2010-03-24 エックスアールティ・リミテッド 位相回収式の位相コントラスト画像
US5841125A (en) * 1997-06-06 1998-11-24 Trw Inc. High energy laser focal sensor (HELFS)
US6219142B1 (en) * 1997-10-17 2001-04-17 Southwest Sciences Incorporated Method and apparatus for determining wave characteristics from wave phenomena

Also Published As

Publication number Publication date
EP1127252A4 (de) 2002-03-13
ES2239854T3 (es) 2005-10-01
CN100402996C (zh) 2008-07-16
KR20010080375A (ko) 2001-08-22
WO2000026622A1 (en) 2000-05-11
CN1334916A (zh) 2002-02-06
BR9914976A (pt) 2001-07-24
RU2237871C2 (ru) 2004-10-10
CA2348912A1 (en) 2000-05-11
EP1127252A1 (de) 2001-08-29
DE69924136T2 (de) 2006-04-13
EP1505376B1 (de) 2015-05-27
TW487810B (en) 2002-05-21
EP1127252B1 (de) 2005-03-09
DE69924136D1 (de) 2005-04-14
US6885442B1 (en) 2005-04-26
JP2002529689A (ja) 2002-09-10
EP1505376A1 (de) 2005-02-09
US7039553B2 (en) 2006-05-02
CA2348912C (en) 2008-01-08
JP4391698B2 (ja) 2009-12-24
ZA200103169B (en) 2002-08-19
US20050062957A1 (en) 2005-03-24
AUPP690098A0 (en) 1998-11-26
KR100642388B1 (ko) 2006-11-03

Similar Documents

Publication Publication Date Title
DE69924136D1 (de) Phasenmessung in einem strahlungsfeld
US6229913B1 (en) Apparatus and methods for determining the three-dimensional shape of an object using active illumination and relative blurring in two-images due to defocus
RU2001115107A (ru) Определение фазы излучаемого волнового поля
MX9800527A (es) Sistema de interferometria muare y metodo con profundidad de formacion de imagen extendida.
WO2003023383A8 (en) Imaging apparatus and method
WO2001078011A3 (en) An optical transform method and system
TW200712480A (en) Unevenness inspecting apparatus and unevenness inspecting method
US20100054626A1 (en) Method of fast image reconstruction
EP0831298A3 (de) Verfahren und Vorrichtungen zum Messen der Abweichung einer Oberfläche
Biretta et al. A search for motion and flux variations in the M87 jet
AU4293799A (en) Interferometer
EP0185730B1 (de) Vorrichtung zur steuerung der intensität eines laserstrahles
JP2000275107A5 (de)
Kobanov The study of velocity oscillations in the solar photosphere using the velocity substraction technique
DE60123568D1 (de) Verwendung von Verzerrungsoptiken in Bilderzeugungssystemen
JPS61260108A (ja) ３次元計測方法
EP1351097A2 (de) System und Methode zur Kalibrierung eines Laserlinien-Beleuchtungssystems zur Verwendung in abbildenden Systemen
EP0851268A3 (de) Akustooptischer abstimmbarer Filter
Anupama Fourier smoothing of digital photographic spectra
RU2029980C1 (ru) Лазерное проекционное устройство формирования изображения топологии интегральных схем
SU1672405A1 (ru) Способ измерени функции передачи модул ции фотоматериалов
Weinstein et al. Visualization and image processing of aircraft shock wave structures
SU1660216A1 (ru) Способ формировани сигнала изображени изолинии рельефа местности
Baker et al. The variation of speckle size with film density: An example of Babinet's principle
DE2447914A1 (de) Vorrichtung zum messen der bildschaerfe sowie zum regeln der scharfeinstellung von kameras und projektoren u. dgl.

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties