MX9800527A - Sistema de interferometria muare y metodo con profundidad de formacion de imagen extendida. - Google Patents

Sistema de interferometria muare y metodo con profundidad de formacion de imagen extendida.

Info

Publication number
MX9800527A
MX9800527A MX9800527A MX9800527A MX9800527A MX 9800527 A MX9800527 A MX 9800527A MX 9800527 A MX9800527 A MX 9800527A MX 9800527 A MX9800527 A MX 9800527A MX 9800527 A MX9800527 A MX 9800527A
Authority
MX
Mexico
Prior art keywords
grating
interferometry system
imaging lens
moire
moire interferometry
Prior art date
Application number
MX9800527A
Other languages
English (en)
Inventor
Kevin G Harding
Original Assignee
Ind Technology Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Technology Inst filed Critical Ind Technology Inst
Publication of MX9800527A publication Critical patent/MX9800527A/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

Se proporciona un sistema de interferometría muaré y un método, para lograr el contorno superficial de campo completo con una profundidad de vision de imagen extendida. El sistema de interferometría muaré incluye un sistema de proyeccion generalmente formado de una fuente de luz, un lente formador de imagen, y un patron de rejilla de onda cuadrada. El lente formador de imagen se configura para filtrar los rayos de luz de orden más alto que pasan a través del patron de rejilla de onda cuadrada, para proyectar un patron de tipo de onda senoidal sobre una superficie deseada. El sistema de interferometría muaré también incluye un sistema de vision generalmente formado de un lente formador de imagen, una rejilla submaestra, y una cámara. La rejilla submaestra de preferencia es una rejilla hecha a la medida que se puede producir mediante el registro de un patron de rejilla en relacion con una superficie de referencia. La cámara puede ver una imagen en cualquier parte dentro de la profundidad de imagen extendida. y puede analizar las franjas muaré. Una determinacion de la desviacion entre una parte de prueba y una superficie de referencia, proporciona un sistema de inspeccion de la parte.
MX9800527A 1995-07-18 1998-01-16 Sistema de interferometria muare y metodo con profundidad de formacion de imagen extendida. MX9800527A (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US50370795A 1995-07-18 1995-07-18

Publications (1)

Publication Number Publication Date
MX9800527A true MX9800527A (es) 1998-11-29

Family

ID=24003185

Family Applications (1)

Application Number Title Priority Date Filing Date
MX9800527A MX9800527A (es) 1995-07-18 1998-01-16 Sistema de interferometria muare y metodo con profundidad de formacion de imagen extendida.

Country Status (10)

Country Link
US (1) US5835218A (es)
EP (1) EP0839314A1 (es)
JP (1) JPH11510248A (es)
KR (1) KR19990029064A (es)
CN (1) CN1196791A (es)
AU (1) AU728407B2 (es)
BR (1) BR9609697A (es)
CA (1) CA2227183A1 (es)
MX (1) MX9800527A (es)
WO (1) WO1997004285A1 (es)

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Also Published As

Publication number Publication date
US5835218A (en) 1998-11-10
CA2227183A1 (en) 1997-02-06
BR9609697A (pt) 1999-12-21
AU6499296A (en) 1997-02-18
JPH11510248A (ja) 1999-09-07
CN1196791A (zh) 1998-10-21
AU728407B2 (en) 2001-01-11
EP0839314A1 (en) 1998-05-06
WO1997004285A1 (en) 1997-02-06
KR19990029064A (ko) 1999-04-15

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