ATE285484T1 - Verfahren und vorrichtung zum beschichten eines substrats - Google Patents
Verfahren und vorrichtung zum beschichten eines substratsInfo
- Publication number
- ATE285484T1 ATE285484T1 AT96203211T AT96203211T ATE285484T1 AT E285484 T1 ATE285484 T1 AT E285484T1 AT 96203211 T AT96203211 T AT 96203211T AT 96203211 T AT96203211 T AT 96203211T AT E285484 T1 ATE285484 T1 AT E285484T1
- Authority
- AT
- Austria
- Prior art keywords
- target
- substrate
- coating
- surface layer
- chamber
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BE9501052A BE1009838A3 (fr) | 1995-12-20 | 1995-12-20 | Procede et dispositif pour la formation d'un revetement sur un substrat. |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE285484T1 true ATE285484T1 (de) | 2005-01-15 |
Family
ID=3889362
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT96203211T ATE285484T1 (de) | 1995-12-20 | 1996-11-19 | Verfahren und vorrichtung zum beschichten eines substrats |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP0780486B1 (de) |
AT (1) | ATE285484T1 (de) |
BE (1) | BE1009838A3 (de) |
DE (1) | DE69634071T2 (de) |
DK (1) | DK0780486T3 (de) |
ES (1) | ES2235178T3 (de) |
PT (1) | PT780486E (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6432281B2 (en) | 1995-12-20 | 2002-08-13 | Recherche Et Developpement Due Groupe Cockerill Sambre | Process for formation of a coating on a substrate |
ATE242545T1 (de) * | 1997-10-08 | 2003-06-15 | Cockerill Rech & Dev | Vorrichtung zur kondensationserzeugung eines schichtes auf einem substrat |
EP1182272A1 (de) * | 2000-08-23 | 2002-02-27 | Cold Plasma Applications C.P.A. | Verfahren und Vorrichtung zur kontinuierlichen Kaltplasma-Abscheidung von Metallschichten |
EP1947210A1 (de) | 2007-01-16 | 2008-07-23 | ARCELOR France | Verfahren zur Beschichtung eines Substrats, Anlage zur Umsetzung des Verfahrens und Vorrichtung zur Metallzuführung zu einer solchen Anlage |
KR102214385B1 (ko) | 2014-04-04 | 2021-02-09 | 아르셀러미탈 | 다층 기판 및 제조 방법 |
US11459651B2 (en) | 2017-02-07 | 2022-10-04 | Applied Materials, Inc. | Paste method to reduce defects in dielectric sputtering |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3799862A (en) * | 1971-11-19 | 1974-03-26 | United Aircraft Corp | Apparatus for sputtering |
DE2528108B2 (de) * | 1975-06-24 | 1977-11-03 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum aufbringen von elektrisch leitenden schichten auf eine unterlage |
JPH0219466A (ja) * | 1988-07-07 | 1990-01-23 | Matsushita Electric Ind Co Ltd | 繊維・フィルム連続蒸着装置 |
US5211824A (en) * | 1991-10-31 | 1993-05-18 | Siemens Solar Industries L.P. | Method and apparatus for sputtering of a liquid |
US5507931A (en) | 1993-12-30 | 1996-04-16 | Deposition Technologies, Inc. | Sputter deposition process |
BE1008303A3 (fr) * | 1994-06-02 | 1996-04-02 | Cockerill Rech & Dev | Procede et dispositif pour la formation d'un revetement sur un substrat par pulverisation cathodique. |
-
1995
- 1995-12-20 BE BE9501052A patent/BE1009838A3/fr active
-
1996
- 1996-11-19 EP EP96203211A patent/EP0780486B1/de not_active Expired - Lifetime
- 1996-11-19 AT AT96203211T patent/ATE285484T1/de active
- 1996-11-19 DK DK96203211T patent/DK0780486T3/da active
- 1996-11-19 ES ES96203211T patent/ES2235178T3/es not_active Expired - Lifetime
- 1996-11-19 DE DE69634071T patent/DE69634071T2/de not_active Expired - Lifetime
- 1996-11-19 PT PT96203211T patent/PT780486E/pt unknown
Also Published As
Publication number | Publication date |
---|---|
PT780486E (pt) | 2005-04-29 |
DK0780486T3 (da) | 2005-04-25 |
ES2235178T3 (es) | 2005-07-01 |
DE69634071T2 (de) | 2005-12-08 |
DE69634071D1 (de) | 2005-01-27 |
EP0780486A1 (de) | 1997-06-25 |
BE1009838A3 (fr) | 1997-10-07 |
EP0780486B1 (de) | 2004-12-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
UEP | Publication of translation of european patent specification |
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