ATE242513T1 - Multidimensionales verfahren und system für statistische prozessteuerung - Google Patents

Multidimensionales verfahren und system für statistische prozessteuerung

Info

Publication number
ATE242513T1
ATE242513T1 AT99946223T AT99946223T ATE242513T1 AT E242513 T1 ATE242513 T1 AT E242513T1 AT 99946223 T AT99946223 T AT 99946223T AT 99946223 T AT99946223 T AT 99946223T AT E242513 T1 ATE242513 T1 AT E242513T1
Authority
AT
Austria
Prior art keywords
observation
control
values
observation points
anomaly
Prior art date
Application number
AT99946223T
Other languages
English (en)
Inventor
De Micheaux Daniel Lafaye
Original Assignee
De Micheaux Daniel Lafaye
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by De Micheaux Daniel Lafaye filed Critical De Micheaux Daniel Lafaye
Application granted granted Critical
Publication of ATE242513T1 publication Critical patent/ATE242513T1/de

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling

Landscapes

  • Engineering & Computer Science (AREA)
  • Business, Economics & Management (AREA)
  • Human Resources & Organizations (AREA)
  • Economics (AREA)
  • Strategic Management (AREA)
  • Entrepreneurship & Innovation (AREA)
  • Operations Research (AREA)
  • Physics & Mathematics (AREA)
  • Educational Administration (AREA)
  • Marketing (AREA)
  • Development Economics (AREA)
  • Quality & Reliability (AREA)
  • Tourism & Hospitality (AREA)
  • Game Theory and Decision Science (AREA)
  • General Business, Economics & Management (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Feedback Control In General (AREA)
  • Complex Calculations (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • General Factory Administration (AREA)
AT99946223T 1998-09-22 1999-09-22 Multidimensionales verfahren und system für statistische prozessteuerung ATE242513T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9812113A FR2783620B1 (fr) 1998-09-22 1998-09-22 Procede et systeme multidimensionnel de maitrise statistique des processus
PCT/FR1999/002254 WO2000017790A1 (fr) 1998-09-22 1999-09-22 Procede et systeme multidimensionnel de maitrise statistique des processus

Publications (1)

Publication Number Publication Date
ATE242513T1 true ATE242513T1 (de) 2003-06-15

Family

ID=9530930

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99946223T ATE242513T1 (de) 1998-09-22 1999-09-22 Multidimensionales verfahren und system für statistische prozessteuerung

Country Status (12)

Country Link
US (1) US6804563B1 (de)
EP (1) EP1116150B1 (de)
JP (1) JP4394286B2 (de)
CN (1) CN100489870C (de)
AT (1) ATE242513T1 (de)
AU (1) AU5866999A (de)
CA (1) CA2391716A1 (de)
DE (1) DE69908620T2 (de)
ES (1) ES2201771T3 (de)
FR (1) FR2783620B1 (de)
HK (1) HK1039668A1 (de)
WO (1) WO2000017790A1 (de)

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US7076695B2 (en) * 2001-07-20 2006-07-11 Opnet Technologies, Inc. System and methods for adaptive threshold determination for performance metrics
JP4584579B2 (ja) * 2001-08-24 2010-11-24 バイオ−ラッド ラボラトリーズ，インコーポレイティド バイオメトリック・クオリティ管理プロセス
DE10151250A1 (de) * 2001-10-17 2003-05-08 Bayer Ag Verfahren zur Ermittlung eines komplexen Korrelationsmusters aus Verfahrens- und Anlagendaten
US7043403B1 (en) * 2002-09-04 2006-05-09 Advanced Micro Devices, Inc. Fault detection and classification based on calculating distances between data points
FI20030622L (fi) * 2003-04-24 2004-10-25 Tietoenator Oyj Verkkopalveluihin liittyvien operaatioiden analysointi
JP4468366B2 (ja) * 2003-05-16 2010-05-26 東京エレクトロン株式会社 半導体製造過程の間にプロセスシステムをモニタする方法
DE602004025368D1 (de) * 2003-09-05 2010-03-18 Sensitech Inc Automatische aufbereitung von durch versorgungskettenprozesse überwachende sensoren akkumulierten daten
US7369913B2 (en) * 2004-04-02 2008-05-06 Siemens Medical Solutions Usa, Inc. Recipe editor and controller
DE102004052302B4 (de) * 2004-09-30 2013-05-23 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Verfahren zur Ausgabe von Messwerten und Anzeigeeinrichtung
JP4399400B2 (ja) * 2005-07-11 2010-01-13 株式会社日立ハイテクノロジーズ 検査データ解析システムと検査データ解析プログラム
KR100679721B1 (ko) * 2005-11-01 2007-02-06 (주)아이세미콘 반도체 공정장비의 변동 감지방법
PL2097794T5 (pl) * 2006-11-03 2018-01-31 Air Prod & Chem System i sposób monitorowania procesu
US7494893B1 (en) 2007-01-17 2009-02-24 Pdf Solutions, Inc. Identifying yield-relevant process parameters in integrated circuit device fabrication processes
US20080312875A1 (en) * 2007-06-12 2008-12-18 Yu Guanyuan M Monitoring and control of integrated circuit device fabrication processes
CN101251754B (zh) * 2008-03-13 2010-06-02 西安交通大学 一种多工序加工过程误差流的处理及控制方法
US8090676B2 (en) * 2008-09-11 2012-01-03 Honeywell International Inc. Systems and methods for real time classification and performance monitoring of batch processes
JP5048625B2 (ja) * 2008-10-09 2012-10-17 株式会社日立製作所 異常検知方法及びシステム
FR2939928B1 (fr) * 2008-12-15 2012-08-03 Snecma Standardisation de donnees utilisees pour la surveillance d'un moteur d'aeronef
US8392009B2 (en) * 2009-03-31 2013-03-05 Taiwan Semiconductor Manufacturing Company, Ltd. Advanced process control with novel sampling policy
US8525830B2 (en) * 2010-09-17 2013-09-03 The Boeing Company Point cloud generation system
EP2447889A1 (de) * 2010-10-29 2012-05-02 Siemens Aktiengesellschaft Verfahren zur Modellierung eines Defektmanagements in einem Herstellungsverfahren und zur Handhabung des Defekts während des Herstellungsverfahrens basierend auf dem modellierten Defektmanagement
ES2424808B1 (es) * 2011-01-25 2014-08-05 Mondragón Goi Eskola Politeknikoa José María Arizmendiarrieta, S. Coop. Método para detectar e identificar errores en procesos de fabricación
BR112014002164A2 (pt) 2011-08-04 2017-02-21 Huntsman Advanced Mat (Switzerland) Gmbh misturas de corantes reativos e seu uso
CN103488135B (zh) * 2013-08-14 2015-11-04 沈阳中科博微自动化技术有限公司 一种用于半导体生产加工过程监控的统计过程控制方法
US9070622B2 (en) * 2013-09-13 2015-06-30 Taiwan Semiconductor Manufacturing Company, Ltd. Systems and methods for similarity-based semiconductor process control
CN103935120A (zh) * 2014-03-25 2014-07-23 中山火炬职业技术学院 一种制定印刷企业质量控制参数标准的方法
BR102014015604A2 (pt) * 2014-06-24 2015-03-31 Castro Fontanella Pileggi Gisele Máquina universal de ensaios reológicos e mecânicos
US10089589B2 (en) * 2015-01-30 2018-10-02 Sap Se Intelligent threshold editor
EP3151072B1 (de) * 2015-09-29 2020-07-29 Siemens Aktiengesellschaft Verfahren und system zur fehlererkennung und überwachung bei einem elektronisch geregelten oder gesteuerten maschinenteil
DE102016225081A1 (de) * 2016-12-15 2018-06-21 Robert Bosch Gmbh Vorrichtung und Verfahren zum Bestimmen der Pinpoint-Fähigkeit möglicher Fehler einer oder mehrerer Komponenten
EP3611579A1 (de) * 2018-08-13 2020-02-19 Siemens Aktiengesellschaft Echtzeit-automatisierungseinrichtung mit einem echtzeit-datenbus
US12271390B2 (en) * 2022-03-09 2025-04-08 Health Catalysts Inc. Analysis system

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US5150289A (en) * 1990-07-30 1992-09-22 The Foxboro Company Method and apparatus for process control
US5442562A (en) * 1993-12-10 1995-08-15 Eastman Kodak Company Method of controlling a manufacturing process using multivariate analysis
US6539267B1 (en) * 1996-03-28 2003-03-25 Rosemount Inc. Device in a process system for determining statistical parameter
US6442445B1 (en) * 1999-03-19 2002-08-27 International Business Machines Corporation, User configurable multivariate time series reduction tool control method
US6424876B1 (en) * 1999-07-22 2002-07-23 Advanced Micro Devices, Inc. Statistical process control system with normalized control charting

Also Published As

Publication number Publication date
AU5866999A (en) 2000-04-10
US6804563B1 (en) 2004-10-12
DE69908620T2 (de) 2004-04-29
FR2783620B1 (fr) 2002-03-29
EP1116150B1 (de) 2003-06-04
FR2783620A1 (fr) 2000-03-24
DE69908620D1 (de) 2003-07-10
JP4394286B2 (ja) 2010-01-06
WO2000017790A1 (fr) 2000-03-30
JP2002525757A (ja) 2002-08-13
CN100489870C (zh) 2009-05-20
CN1319212A (zh) 2001-10-24
HK1039668A1 (zh) 2002-05-03
EP1116150A1 (de) 2001-07-18
CA2391716A1 (fr) 2000-03-30
ES2201771T3 (es) 2004-03-16

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