ATE239308T1 - Oberflächenemittierender laser mit vertikalem hauptresonator (vcsel) und gekoppeltem nichtlichtleitenden nebenresonator - Google Patents

Oberflächenemittierender laser mit vertikalem hauptresonator (vcsel) und gekoppeltem nichtlichtleitenden nebenresonator

Info

Publication number
ATE239308T1
ATE239308T1 AT00963273T AT00963273T ATE239308T1 AT E239308 T1 ATE239308 T1 AT E239308T1 AT 00963273 T AT00963273 T AT 00963273T AT 00963273 T AT00963273 T AT 00963273T AT E239308 T1 ATE239308 T1 AT E239308T1
Authority
AT
Austria
Prior art keywords
phase shifting
region
resonator
shifting region
mirror stack
Prior art date
Application number
AT00963273T
Other languages
English (en)
Inventor
Ralph Herbert Johnson
Andrew Clark
James Gunter
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Application granted granted Critical
Publication of ATE239308T1 publication Critical patent/ATE239308T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
    • H01S5/18311—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement using selective oxidation
    • H01S5/18313—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement using selective oxidation by oxidizing at least one of the DBR layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2301/00—Functional characteristics
    • H01S2301/16—Semiconductor lasers with special structural design to influence the modes, e.g. specific multimode
    • H01S2301/166—Single transverse or lateral mode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18361—Structure of the reflectors, e.g. hybrid mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
  • Lasers (AREA)
AT00963273T 1999-08-31 2000-08-28 Oberflächenemittierender laser mit vertikalem hauptresonator (vcsel) und gekoppeltem nichtlichtleitenden nebenresonator ATE239308T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/387,424 US6411638B1 (en) 1999-08-31 1999-08-31 Coupled cavity anti-guided vertical-cavity surface-emitting laser
PCT/US2000/023499 WO2001017078A1 (en) 1999-08-31 2000-08-28 Coupled cavity anti-guided vertical cavity surface emitting laser (vcsel)

Publications (1)

Publication Number Publication Date
ATE239308T1 true ATE239308T1 (de) 2003-05-15

Family

ID=23529808

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00963273T ATE239308T1 (de) 1999-08-31 2000-08-28 Oberflächenemittierender laser mit vertikalem hauptresonator (vcsel) und gekoppeltem nichtlichtleitenden nebenresonator

Country Status (8)

Country Link
US (2) US6411638B1 (de)
EP (1) EP1208622B1 (de)
JP (1) JP2003508928A (de)
KR (1) KR20020032559A (de)
AT (1) ATE239308T1 (de)
AU (1) AU7471000A (de)
DE (1) DE60002478T2 (de)
WO (1) WO2001017078A1 (de)

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Also Published As

Publication number Publication date
AU7471000A (en) 2001-03-26
EP1208622B1 (de) 2003-05-02
US6678300B2 (en) 2004-01-13
DE60002478D1 (de) 2003-06-05
EP1208622A1 (de) 2002-05-29
JP2003508928A (ja) 2003-03-04
US6411638B1 (en) 2002-06-25
DE60002478T2 (de) 2004-03-18
WO2001017078A1 (en) 2001-03-08
KR20020032559A (ko) 2002-05-03
US20020163950A1 (en) 2002-11-07

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