ATE220132T1 - Verfahren zum zur herstellung von objekten durch epitaktisches wachstum und vorrichtung - Google Patents

Verfahren zum zur herstellung von objekten durch epitaktisches wachstum und vorrichtung

Info

Publication number
ATE220132T1
ATE220132T1 AT96933699T AT96933699T ATE220132T1 AT E220132 T1 ATE220132 T1 AT E220132T1 AT 96933699 T AT96933699 T AT 96933699T AT 96933699 T AT96933699 T AT 96933699T AT E220132 T1 ATE220132 T1 AT E220132T1
Authority
AT
Austria
Prior art keywords
producing objects
epitactic growth
epitactic
growth
objects
Prior art date
Application number
AT96933699T
Other languages
English (en)
Inventor
Olle Kordina
Christer Hallin
Erik Janzen
Asko Vehanen
Rositza Yakimova
Marko Tuominen
Original Assignee
Abb Research Ltd
Okmetic Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from SE9503428A external-priority patent/SE9503428D0/xx
Application filed by Abb Research Ltd, Okmetic Ltd filed Critical Abb Research Ltd
Application granted granted Critical
Publication of ATE220132T1 publication Critical patent/ATE220132T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/36—Carbides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/38—Nitrides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
AT96933699T 1995-10-04 1996-10-02 Verfahren zum zur herstellung von objekten durch epitaktisches wachstum und vorrichtung ATE220132T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9503428A SE9503428D0 (sv) 1995-10-04 1995-10-04 A method for epitaxially growing objects and a device for such a growth
PCT/SE1996/001232 WO1997013013A1 (en) 1995-10-04 1996-10-02 A method for epitaxially growing objects and a device for such a growth

Publications (1)

Publication Number Publication Date
ATE220132T1 true ATE220132T1 (de) 2002-07-15

Family

ID=20399689

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96933699T ATE220132T1 (de) 1995-10-04 1996-10-02 Verfahren zum zur herstellung von objekten durch epitaktisches wachstum und vorrichtung

Country Status (3)

Country Link
JP (1) JP4222630B2 (de)
AT (1) ATE220132T1 (de)
DE (1) DE69622182T3 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4664464B2 (ja) * 2000-04-06 2011-04-06 新日本製鐵株式会社 モザイク性の小さな炭化珪素単結晶ウエハ
JP2002012500A (ja) * 2000-06-21 2002-01-15 Showa Denko Kk 炭化珪素単結晶の製造方法、製造装置および炭化珪素単結晶
JP5152293B2 (ja) * 2010-10-08 2013-02-27 新日鐵住金株式会社 モザイク性の小さな炭化珪素単結晶ウエハの製造方法
CN113026099A (zh) * 2021-03-05 2021-06-25 广州爱思威科技股份有限公司 碳化硅单晶生长控制装置及控制方法

Also Published As

Publication number Publication date
JPH11513353A (ja) 1999-11-16
JP4222630B2 (ja) 2009-02-12
DE69622182T3 (de) 2007-03-01
DE69622182D1 (de) 2002-08-08
DE69622182T2 (de) 2003-01-30

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