ATE155287T1 - Herstellungsverfahren für elektronische packungen - Google Patents
Herstellungsverfahren für elektronische packungenInfo
- Publication number
- ATE155287T1 ATE155287T1 AT91907909T AT91907909T ATE155287T1 AT E155287 T1 ATE155287 T1 AT E155287T1 AT 91907909 T AT91907909 T AT 91907909T AT 91907909 T AT91907909 T AT 91907909T AT E155287 T1 ATE155287 T1 AT E155287T1
- Authority
- AT
- Austria
- Prior art keywords
- preform
- filler material
- infiltration
- spontaneously
- metal
- Prior art date
Links
- 238000004100 electronic packaging Methods 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000463 material Substances 0.000 abstract 10
- 239000000945 filler Substances 0.000 abstract 5
- 230000008595 infiltration Effects 0.000 abstract 4
- 238000001764 infiltration Methods 0.000 abstract 4
- 239000002184 metal Substances 0.000 abstract 4
- 239000000919 ceramic Substances 0.000 abstract 2
- 239000003623 enhancer Substances 0.000 abstract 2
- 239000011159 matrix material Substances 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000002243 precursor Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
- C04B35/65—Reaction sintering of free metal- or free silicon-containing compositions
- C04B35/652—Directional oxidation or solidification, e.g. Lanxide process
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/10—Alloys containing non-metals
- C22C1/1005—Pretreatment of the non-metallic additives
- C22C1/1015—Pretreatment of the non-metallic additives by preparing or treating a non-metallic additive preform
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/10—Alloys containing non-metals
- C22C1/1036—Alloys containing non-metals starting from a melt
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/10—Alloys containing non-metals
- C22C1/1036—Alloys containing non-metals starting from a melt
- C22C1/1057—Reactive infiltration
- C22C1/1063—Gas reaction, e.g. lanxide
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C47/00—Making alloys containing metallic or non-metallic fibres or filaments
- C22C47/02—Pretreatment of the fibres or filaments
- C22C47/06—Pretreatment of the fibres or filaments by forming the fibres or filaments into a preformed structure, e.g. using a temporary binder to form a mat-like element
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3733—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon having a heterogeneous or anisotropic structure, e.g. powder or fibres in a matrix, wire mesh, porous structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Structural Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacture Of Alloys Or Alloy Compounds (AREA)
- Liquid Crystal Substances (AREA)
- Packages (AREA)
- Glass Compositions (AREA)
- Formation Of Insulating Films (AREA)
- Apparatus For Radiation Diagnosis (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US48457590A | 1990-02-23 | 1990-02-23 | |
US07/520,936 US5163499A (en) | 1988-11-10 | 1990-05-09 | Method of forming electronic packages |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE155287T1 true ATE155287T1 (de) | 1997-07-15 |
Family
ID=27048059
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT91907909T ATE155287T1 (de) | 1990-02-23 | 1991-02-25 | Herstellungsverfahren für elektronische packungen |
Country Status (9)
Country | Link |
---|---|
US (1) | US5163499A (de) |
EP (1) | EP0516765B1 (de) |
JP (1) | JPH05504659A (de) |
AT (1) | ATE155287T1 (de) |
AU (1) | AU651822B2 (de) |
BR (1) | BR9106055A (de) |
CA (1) | CA2076637A1 (de) |
DE (1) | DE69126773D1 (de) |
WO (1) | WO1991013462A2 (de) |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5526867A (en) * | 1988-11-10 | 1996-06-18 | Lanxide Technology Company, Lp | Methods of forming electronic packages |
US5406029A (en) * | 1991-02-08 | 1995-04-11 | Pcc Composites, Inc. | Electronic package having a pure metal skin |
US5614043A (en) | 1992-09-17 | 1997-03-25 | Coors Ceramics Company | Method for fabricating electronic components incorporating ceramic-metal composites |
US6338906B1 (en) | 1992-09-17 | 2002-01-15 | Coorstek, Inc. | Metal-infiltrated ceramic seal |
US6143421A (en) * | 1992-09-17 | 2000-11-07 | Coorstek, Inc. | Electronic components incorporating ceramic-metal composites |
JPH06236819A (ja) * | 1993-01-11 | 1994-08-23 | Boam R & D Co Ltd | フェライト磁性体チップビード構造及びその製造方法 |
US5650592A (en) * | 1993-04-05 | 1997-07-22 | Olin Corporation | Graphite composites for electronic packaging |
US5657811A (en) * | 1993-06-04 | 1997-08-19 | Pcc Composites, Inc. | Cast-in hermetic electrical feed-throughs |
US5465481A (en) * | 1993-10-04 | 1995-11-14 | Motorola, Inc. | Method for fabricating a semiconductor package |
US5455118A (en) * | 1994-02-01 | 1995-10-03 | Pcc Composites, Inc. | Plating for metal matrix composites |
US5480727A (en) * | 1994-02-03 | 1996-01-02 | Motorola, Inc. | Electronic device assembly and method for making |
AT404083B (de) * | 1995-04-18 | 1998-08-25 | Electrovac | Verfahren zum herstellen von gehäusen |
AT405039B (de) * | 1996-02-08 | 1999-04-26 | Electrovac | Verbundbauteil |
JP3314141B2 (ja) * | 1996-03-26 | 2002-08-12 | マツダ株式会社 | 複合化用予備成形体並びにこれが複合化された複合アルミニウム系金属部品及びこれらの製造方法 |
US6018188A (en) * | 1997-03-28 | 2000-01-25 | Nec Corporation | Semiconductor device |
US6261872B1 (en) | 1997-09-18 | 2001-07-17 | Trw Inc. | Method of producing an advanced RF electronic package |
US5998733A (en) * | 1997-10-06 | 1999-12-07 | Northrop Grumman Corporation | Graphite aluminum metal matrix composite microelectronic package |
JP4304749B2 (ja) * | 1998-02-24 | 2009-07-29 | 住友電気工業株式会社 | 半導体装置用部材の製造方法 |
JP2000106391A (ja) | 1998-07-28 | 2000-04-11 | Ngk Insulators Ltd | 半導体支持装置、その製造方法、接合体の製造方法および接合体 |
US6270601B1 (en) | 1998-11-02 | 2001-08-07 | Coorstek, Inc. | Method for producing filled vias in electronic components |
US6355362B1 (en) | 1999-04-30 | 2002-03-12 | Pacific Aerospace & Electronics, Inc. | Electronics packages having a composite structure and methods for manufacturing such electronics packages |
US6284389B1 (en) | 1999-04-30 | 2001-09-04 | Pacific Aerospace & Electronics, Inc. | Composite materials and methods for manufacturing composite materials |
AT408345B (de) * | 1999-11-17 | 2001-10-25 | Electrovac | Verfahren zur festlegung eines aus metall-matrix- composite-(mmc-) materiales gebildeten körpers auf einem keramischen körper |
US6378755B1 (en) * | 2000-11-08 | 2002-04-30 | General Electric Company | Joined structure utilizing a ceramic foam bonding element, and its fabrication |
DE10125815C1 (de) * | 2001-05-26 | 2002-08-01 | Daimler Chrysler Ag | Metall-Keramik-Verbundwerkstoff und seine Verwendung |
US6551551B1 (en) | 2001-11-16 | 2003-04-22 | Caterpillar Inc | Sinter bonding using a bonding agent |
US7141310B2 (en) * | 2002-04-17 | 2006-11-28 | Ceramics Process Systems Corporation | Metal matrix composite structure and method |
DE102005030862B4 (de) * | 2005-07-01 | 2009-12-24 | Sintec Keramik Gmbh | Erstbenetzungshilfsmaterial für einen Verdampferkörper, seine Verwendung zum Herrichten der Verdampferfläche eines Verdampferkörpers und ein elektrisch beheizbarer keramischer Verdampferkörper |
US7910855B2 (en) * | 2005-09-23 | 2011-03-22 | Lasx Industries, Inc. | No gap laser welding of coated steel |
TWI403576B (zh) * | 2008-12-31 | 2013-08-01 | Ind Tech Res Inst | 含碳金屬複合材料及其製作方法 |
FR2940857B1 (fr) | 2009-01-07 | 2011-02-11 | Commissariat Energie Atomique | Procede de fabrication d'un electrolyseur haute temperature ou d'une pile a combustible haute temperature comprenant un empilement de cellules elementaires |
MY153686A (en) * | 2009-08-17 | 2015-03-13 | Univ Sains Malaysia | A process for producing a metal-matrix composite of significant ?cte between the hard base-metal and the soft matrix |
US9272324B2 (en) * | 2009-12-08 | 2016-03-01 | Siemens Energy, Inc. | Investment casting process for hollow components |
US20110239933A1 (en) * | 2010-04-01 | 2011-10-06 | Bernhard Freudenberg | Device and method for the production of silicon blocks |
CN102802834B (zh) * | 2010-12-07 | 2016-06-22 | 西门子能源有限公司 | 使用柔性蜡模工具的熔模铸造 |
US10100402B2 (en) * | 2011-10-07 | 2018-10-16 | International Business Machines Corporation | Substrate holder for graphene film synthesis |
KR101472416B1 (ko) * | 2013-10-17 | 2014-12-12 | 고려대학교 산학협력단 | 3차원 스트레쳐블 전자소자 및 이의 제조 방법 |
WO2017081635A1 (en) * | 2015-11-10 | 2017-05-18 | Ecole Polytechnique Federale De Lausanne (Epfl) | Small-scale metal castings, small-scale metal/transparent composite structures and process to produce same |
JP6477800B2 (ja) * | 2017-08-02 | 2019-03-06 | 三菱マテリアル株式会社 | ヒートシンク |
US11284510B2 (en) | 2018-04-17 | 2022-03-22 | Board Of Trustees Of Michigan State University | Controlled wetting and spreading of metals on substrates using porous interlayers and related articles |
US11464135B2 (en) * | 2020-12-04 | 2022-10-04 | Schneider Electric It Corporation | Liquid cooling enclosure for circuit components |
CN114171479B (zh) * | 2022-02-14 | 2022-05-24 | 潮州三环(集团)股份有限公司 | 一种陶瓷封装基座及其制备方法和应用 |
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US2951771A (en) * | 1956-11-05 | 1960-09-06 | Owens Corning Fiberglass Corp | Method for continuously fabricating an impervious metal coated fibrous glass sheet |
US3031340A (en) * | 1957-08-12 | 1962-04-24 | Peter R Girardot | Composite ceramic-metal bodies and methods for the preparation thereof |
US3149409A (en) * | 1959-12-01 | 1964-09-22 | Daimler Benz Ag | Method of producing an engine piston with a heat insulating layer |
US3364976A (en) * | 1965-03-05 | 1968-01-23 | Dow Chemical Co | Method of casting employing self-generated vacuum |
US3396777A (en) * | 1966-06-01 | 1968-08-13 | Dow Chemical Co | Process for impregnating porous solids |
US3547180A (en) * | 1968-08-26 | 1970-12-15 | Aluminum Co Of America | Production of reinforced composites |
US3608170A (en) * | 1969-04-14 | 1971-09-28 | Abex Corp | Metal impregnated composite casting method |
JPS5013205B1 (de) * | 1969-11-08 | 1975-05-17 | ||
US3718441A (en) * | 1970-11-18 | 1973-02-27 | Us Army | Method for forming metal-filled ceramics of near theoretical density |
US3970136A (en) * | 1971-03-05 | 1976-07-20 | The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland | Method of manufacturing composite materials |
US3868267A (en) * | 1972-11-09 | 1975-02-25 | Us Army | Method of making gradient ceramic-metal material |
US3864154A (en) * | 1972-11-09 | 1975-02-04 | Us Army | Ceramic-metal systems by infiltration |
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US4033400A (en) * | 1973-07-05 | 1977-07-05 | Eaton Corporation | Method of forming a composite by infiltrating a porous preform |
US4055451A (en) * | 1973-08-31 | 1977-10-25 | Alan Gray Cockbain | Composite materials |
US4082864A (en) * | 1974-06-17 | 1978-04-04 | Fiber Materials, Inc. | Reinforced metal matrix composite |
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DE2536153B2 (de) * | 1975-08-13 | 1977-06-08 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum herstellen mehrschichtiger kontaktstuecke fuer vakuummittelspannungsleistungsschalter |
US4119363A (en) * | 1976-03-18 | 1978-10-10 | Bell Telephone Laboratories Incorporated | Package for optical devices including optical fiber-to-metal hermetic seal |
DE2819076C2 (de) * | 1978-04-29 | 1982-02-25 | Messerschmitt-Bölkow-Blohm GmbH, 8000 München | Verfahren zum Herstellen eines metallischen Mehschicht-Verbundwerkstoffes |
GB1595280A (en) * | 1978-05-26 | 1981-08-12 | Hepworth & Grandage Ltd | Composite materials and methods for their production |
JPS6053858B2 (ja) * | 1979-02-16 | 1985-11-27 | シャープ株式会社 | エレクトロクロミック表示装置の製造方法 |
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JPS57210140A (en) * | 1981-06-18 | 1982-12-23 | Honda Motor Co Ltd | Fiber reinfoced piston for internal combustion engine |
US4404262A (en) * | 1981-08-03 | 1983-09-13 | International Harvester Co. | Composite metallic and refractory article and method of manufacturing the article |
US4376803A (en) * | 1981-08-26 | 1983-03-15 | The Aerospace Corporation | Carbon-reinforced metal-matrix composites |
US4376804A (en) * | 1981-08-26 | 1983-03-15 | The Aerospace Corporation | Pyrolyzed pitch coatings for carbon fiber |
US4473103A (en) * | 1982-01-29 | 1984-09-25 | International Telephone And Telegraph Corporation | Continuous production of metal alloy composites |
JPS58144441A (ja) * | 1982-02-23 | 1983-08-27 | Nippon Denso Co Ltd | 炭素繊維強化金属複合材料の製造方法 |
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JPS5950149A (ja) * | 1982-09-14 | 1984-03-23 | Toyota Motor Corp | 繊維強化金属複合材料 |
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GB2156718B (en) * | 1984-04-05 | 1987-06-24 | Rolls Royce | A method of increasing the wettability of a surface by a molten metal |
GB8411074D0 (en) * | 1984-05-01 | 1984-06-06 | Ae Plc | Reinforced pistons |
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EP0183016B1 (de) * | 1984-10-03 | 1989-09-20 | Sumitomo Electric Industries Limited | Werkstoff für Halbleiteranordung und Verfahren zu seiner Herstellung |
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US4673435A (en) * | 1985-05-21 | 1987-06-16 | Toshiba Ceramics Co., Ltd. | Alumina composite body and method for its manufacture |
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US4657065A (en) * | 1986-07-10 | 1987-04-14 | Amax Inc. | Composite materials having a matrix of magnesium or magnesium alloy reinforced with discontinuous silicon carbide particles |
US4713111A (en) * | 1986-08-08 | 1987-12-15 | Amax Inc. | Production of aluminum-SiC composite using sodium tetrasborate as an addition agent |
US4753690A (en) * | 1986-08-13 | 1988-06-28 | Amax Inc. | Method for producing composite material having an aluminum alloy matrix with a silicon carbide reinforcement |
US4662429A (en) * | 1986-08-13 | 1987-05-05 | Amax Inc. | Composite material having matrix of aluminum or aluminum alloy with dispersed fibrous or particulate reinforcement |
US4828008A (en) * | 1987-05-13 | 1989-05-09 | Lanxide Technology Company, Lp | Metal matrix composites |
US4884737A (en) * | 1987-05-21 | 1989-12-05 | Lanxide Technology Company, Lp | Method for surface bonding of ceramic bodies |
CA1238428A (en) * | 1987-08-21 | 1988-06-21 | John J. Kost | Thermally enhanced integrated circuit carrier package |
US4935055A (en) * | 1988-01-07 | 1990-06-19 | Lanxide Technology Company, Lp | Method of making metal matrix composite with the use of a barrier |
US4871008A (en) * | 1988-01-11 | 1989-10-03 | Lanxide Technology Company, Lp | Method of making metal matrix composites |
US4894293A (en) * | 1988-03-10 | 1990-01-16 | Texas Instruments Incorporated | Circuit system, a composite metal material for use therein, and a method for making the material |
EP0340957B1 (de) * | 1988-04-30 | 1994-03-16 | Toyota Jidosha Kabushiki Kaisha | Verfahren zur Herstellung von Verbundmetall unter Beschleunigung der Infiltration des Matrix-Metalls durch feine Teilchen eines dritten Materials |
US4875616A (en) * | 1988-08-10 | 1989-10-24 | America Matrix, Inc. | Method of producing a high temperature, high strength bond between a ceramic shape and metal shape |
US4932099A (en) * | 1988-10-17 | 1990-06-12 | Chrysler Corporation | Method of producing reinforced composite materials |
CA2000770C (en) * | 1988-10-17 | 2000-06-27 | John M. Corwin | Method of producing reinforced composite materials |
US5040588A (en) * | 1988-11-10 | 1991-08-20 | Lanxide Technology Company, Lp | Methods for forming macrocomposite bodies and macrocomposite bodies produced thereby |
US5004034A (en) * | 1988-11-10 | 1991-04-02 | Lanxide Technology Company, Lp | Method of surface bonding materials together by use of a metal matrix composite, and products produced thereby |
US5011063A (en) * | 1989-01-13 | 1991-04-30 | Lanxide Technology Company, Lp | Method of bonding a ceramic composite body to a second body and articles produced thereby |
US4978054A (en) * | 1990-07-03 | 1990-12-18 | The United States Of America As Represented By The Secretary Of The Navy | Diffusion bonding process for aluminum and aluminum alloys |
-
1990
- 1990-05-09 US US07/520,936 patent/US5163499A/en not_active Expired - Fee Related
-
1991
- 1991-02-25 JP JP3507739A patent/JPH05504659A/ja active Pending
- 1991-02-25 EP EP91907909A patent/EP0516765B1/de not_active Revoked
- 1991-02-25 AT AT91907909T patent/ATE155287T1/de active
- 1991-02-25 BR BR919106055A patent/BR9106055A/pt not_active Application Discontinuation
- 1991-02-25 AU AU76851/91A patent/AU651822B2/en not_active Ceased
- 1991-02-25 WO PCT/US1991/001247 patent/WO1991013462A2/en not_active Application Discontinuation
- 1991-02-25 DE DE69126773T patent/DE69126773D1/de not_active Expired - Lifetime
- 1991-02-25 CA CA002076637A patent/CA2076637A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO1991013462A3 (en) | 1991-10-17 |
US5163499A (en) | 1992-11-17 |
EP0516765A1 (de) | 1992-12-09 |
AU651822B2 (en) | 1994-08-04 |
CA2076637A1 (en) | 1991-08-24 |
AU7685191A (en) | 1991-09-18 |
EP0516765B1 (de) | 1997-07-09 |
JPH05504659A (ja) | 1993-07-15 |
DE69126773D1 (de) | 1997-08-14 |
WO1991013462A2 (en) | 1991-09-05 |
BR9106055A (pt) | 1993-06-15 |
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