ATE155287T1 - Herstellungsverfahren für elektronische packungen - Google Patents

Herstellungsverfahren für elektronische packungen

Info

Publication number
ATE155287T1
ATE155287T1 AT91907909T AT91907909T ATE155287T1 AT E155287 T1 ATE155287 T1 AT E155287T1 AT 91907909 T AT91907909 T AT 91907909T AT 91907909 T AT91907909 T AT 91907909T AT E155287 T1 ATE155287 T1 AT E155287T1
Authority
AT
Austria
Prior art keywords
preform
filler material
infiltration
spontaneously
metal
Prior art date
Application number
AT91907909T
Other languages
English (en)
Inventor
Steven David Keck
Michael Angelo Rocazella
Peter Michael Engelgau
Gregory Eugene Hannon
Danny Ray White
Alan Scott Nagelberg
Original Assignee
Lanxide Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27048059&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE155287(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Lanxide Technology Co Ltd filed Critical Lanxide Technology Co Ltd
Application granted granted Critical
Publication of ATE155287T1 publication Critical patent/ATE155287T1/de

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64Burning or sintering processes
    • C04B35/65Reaction sintering of free metal- or free silicon-containing compositions
    • C04B35/652Directional oxidation or solidification, e.g. Lanxide process
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C1/00Making non-ferrous alloys
    • C22C1/10Alloys containing non-metals
    • C22C1/1005Pretreatment of the non-metallic additives
    • C22C1/1015Pretreatment of the non-metallic additives by preparing or treating a non-metallic additive preform
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C1/00Making non-ferrous alloys
    • C22C1/10Alloys containing non-metals
    • C22C1/1036Alloys containing non-metals starting from a melt
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C1/00Making non-ferrous alloys
    • C22C1/10Alloys containing non-metals
    • C22C1/1036Alloys containing non-metals starting from a melt
    • C22C1/1057Reactive infiltration
    • C22C1/1063Gas reaction, e.g. lanxide
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C47/00Making alloys containing metallic or non-metallic fibres or filaments
    • C22C47/02Pretreatment of the fibres or filaments
    • C22C47/06Pretreatment of the fibres or filaments by forming the fibres or filaments into a preformed structure, e.g. using a temporary binder to form a mat-like element
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4803Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/12Mountings, e.g. non-detachable insulating substrates
    • H01L23/14Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3733Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon having a heterogeneous or anisotropic structure, e.g. powder or fibres in a matrix, wire mesh, porous structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacture Of Alloys Or Alloy Compounds (AREA)
  • Liquid Crystal Substances (AREA)
  • Packages (AREA)
  • Glass Compositions (AREA)
  • Formation Of Insulating Films (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
AT91907909T 1990-02-23 1991-02-25 Herstellungsverfahren für elektronische packungen ATE155287T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US48457590A 1990-02-23 1990-02-23
US07/520,936 US5163499A (en) 1988-11-10 1990-05-09 Method of forming electronic packages

Publications (1)

Publication Number Publication Date
ATE155287T1 true ATE155287T1 (de) 1997-07-15

Family

ID=27048059

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91907909T ATE155287T1 (de) 1990-02-23 1991-02-25 Herstellungsverfahren für elektronische packungen

Country Status (9)

Country Link
US (1) US5163499A (de)
EP (1) EP0516765B1 (de)
JP (1) JPH05504659A (de)
AT (1) ATE155287T1 (de)
AU (1) AU651822B2 (de)
BR (1) BR9106055A (de)
CA (1) CA2076637A1 (de)
DE (1) DE69126773D1 (de)
WO (1) WO1991013462A2 (de)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5526867A (en) * 1988-11-10 1996-06-18 Lanxide Technology Company, Lp Methods of forming electronic packages
US5406029A (en) * 1991-02-08 1995-04-11 Pcc Composites, Inc. Electronic package having a pure metal skin
US5614043A (en) 1992-09-17 1997-03-25 Coors Ceramics Company Method for fabricating electronic components incorporating ceramic-metal composites
US6338906B1 (en) 1992-09-17 2002-01-15 Coorstek, Inc. Metal-infiltrated ceramic seal
US6143421A (en) * 1992-09-17 2000-11-07 Coorstek, Inc. Electronic components incorporating ceramic-metal composites
JPH06236819A (ja) * 1993-01-11 1994-08-23 Boam R & D Co Ltd フェライト磁性体チップビード構造及びその製造方法
US5650592A (en) * 1993-04-05 1997-07-22 Olin Corporation Graphite composites for electronic packaging
US5657811A (en) * 1993-06-04 1997-08-19 Pcc Composites, Inc. Cast-in hermetic electrical feed-throughs
US5465481A (en) * 1993-10-04 1995-11-14 Motorola, Inc. Method for fabricating a semiconductor package
US5455118A (en) * 1994-02-01 1995-10-03 Pcc Composites, Inc. Plating for metal matrix composites
US5480727A (en) * 1994-02-03 1996-01-02 Motorola, Inc. Electronic device assembly and method for making
AT404083B (de) * 1995-04-18 1998-08-25 Electrovac Verfahren zum herstellen von gehäusen
AT405039B (de) * 1996-02-08 1999-04-26 Electrovac Verbundbauteil
JP3314141B2 (ja) * 1996-03-26 2002-08-12 マツダ株式会社 複合化用予備成形体並びにこれが複合化された複合アルミニウム系金属部品及びこれらの製造方法
US6018188A (en) * 1997-03-28 2000-01-25 Nec Corporation Semiconductor device
US6261872B1 (en) 1997-09-18 2001-07-17 Trw Inc. Method of producing an advanced RF electronic package
US5998733A (en) * 1997-10-06 1999-12-07 Northrop Grumman Corporation Graphite aluminum metal matrix composite microelectronic package
JP4304749B2 (ja) * 1998-02-24 2009-07-29 住友電気工業株式会社 半導体装置用部材の製造方法
JP2000106391A (ja) 1998-07-28 2000-04-11 Ngk Insulators Ltd 半導体支持装置、その製造方法、接合体の製造方法および接合体
US6270601B1 (en) 1998-11-02 2001-08-07 Coorstek, Inc. Method for producing filled vias in electronic components
US6355362B1 (en) 1999-04-30 2002-03-12 Pacific Aerospace & Electronics, Inc. Electronics packages having a composite structure and methods for manufacturing such electronics packages
US6284389B1 (en) 1999-04-30 2001-09-04 Pacific Aerospace & Electronics, Inc. Composite materials and methods for manufacturing composite materials
AT408345B (de) * 1999-11-17 2001-10-25 Electrovac Verfahren zur festlegung eines aus metall-matrix- composite-(mmc-) materiales gebildeten körpers auf einem keramischen körper
US6378755B1 (en) * 2000-11-08 2002-04-30 General Electric Company Joined structure utilizing a ceramic foam bonding element, and its fabrication
DE10125815C1 (de) * 2001-05-26 2002-08-01 Daimler Chrysler Ag Metall-Keramik-Verbundwerkstoff und seine Verwendung
US6551551B1 (en) 2001-11-16 2003-04-22 Caterpillar Inc Sinter bonding using a bonding agent
US7141310B2 (en) * 2002-04-17 2006-11-28 Ceramics Process Systems Corporation Metal matrix composite structure and method
DE102005030862B4 (de) * 2005-07-01 2009-12-24 Sintec Keramik Gmbh Erstbenetzungshilfsmaterial für einen Verdampferkörper, seine Verwendung zum Herrichten der Verdampferfläche eines Verdampferkörpers und ein elektrisch beheizbarer keramischer Verdampferkörper
US7910855B2 (en) * 2005-09-23 2011-03-22 Lasx Industries, Inc. No gap laser welding of coated steel
TWI403576B (zh) * 2008-12-31 2013-08-01 Ind Tech Res Inst 含碳金屬複合材料及其製作方法
FR2940857B1 (fr) 2009-01-07 2011-02-11 Commissariat Energie Atomique Procede de fabrication d'un electrolyseur haute temperature ou d'une pile a combustible haute temperature comprenant un empilement de cellules elementaires
MY153686A (en) * 2009-08-17 2015-03-13 Univ Sains Malaysia A process for producing a metal-matrix composite of significant ?cte between the hard base-metal and the soft matrix
US9272324B2 (en) * 2009-12-08 2016-03-01 Siemens Energy, Inc. Investment casting process for hollow components
US20110239933A1 (en) * 2010-04-01 2011-10-06 Bernhard Freudenberg Device and method for the production of silicon blocks
CN102802834B (zh) * 2010-12-07 2016-06-22 西门子能源有限公司 使用柔性蜡模工具的熔模铸造
US10100402B2 (en) * 2011-10-07 2018-10-16 International Business Machines Corporation Substrate holder for graphene film synthesis
KR101472416B1 (ko) * 2013-10-17 2014-12-12 고려대학교 산학협력단 3차원 스트레쳐블 전자소자 및 이의 제조 방법
WO2017081635A1 (en) * 2015-11-10 2017-05-18 Ecole Polytechnique Federale De Lausanne (Epfl) Small-scale metal castings, small-scale metal/transparent composite structures and process to produce same
JP6477800B2 (ja) * 2017-08-02 2019-03-06 三菱マテリアル株式会社 ヒートシンク
US11284510B2 (en) 2018-04-17 2022-03-22 Board Of Trustees Of Michigan State University Controlled wetting and spreading of metals on substrates using porous interlayers and related articles
US11464135B2 (en) * 2020-12-04 2022-10-04 Schneider Electric It Corporation Liquid cooling enclosure for circuit components
CN114171479B (zh) * 2022-02-14 2022-05-24 潮州三环(集团)股份有限公司 一种陶瓷封装基座及其制备方法和应用

Family Cites Families (58)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2951771A (en) * 1956-11-05 1960-09-06 Owens Corning Fiberglass Corp Method for continuously fabricating an impervious metal coated fibrous glass sheet
US3031340A (en) * 1957-08-12 1962-04-24 Peter R Girardot Composite ceramic-metal bodies and methods for the preparation thereof
US3149409A (en) * 1959-12-01 1964-09-22 Daimler Benz Ag Method of producing an engine piston with a heat insulating layer
US3364976A (en) * 1965-03-05 1968-01-23 Dow Chemical Co Method of casting employing self-generated vacuum
US3396777A (en) * 1966-06-01 1968-08-13 Dow Chemical Co Process for impregnating porous solids
US3547180A (en) * 1968-08-26 1970-12-15 Aluminum Co Of America Production of reinforced composites
US3608170A (en) * 1969-04-14 1971-09-28 Abex Corp Metal impregnated composite casting method
JPS5013205B1 (de) * 1969-11-08 1975-05-17
US3718441A (en) * 1970-11-18 1973-02-27 Us Army Method for forming metal-filled ceramics of near theoretical density
US3970136A (en) * 1971-03-05 1976-07-20 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Method of manufacturing composite materials
US3868267A (en) * 1972-11-09 1975-02-25 Us Army Method of making gradient ceramic-metal material
US3864154A (en) * 1972-11-09 1975-02-04 Us Army Ceramic-metal systems by infiltration
JPS49107308A (de) * 1973-02-13 1974-10-11
US4033400A (en) * 1973-07-05 1977-07-05 Eaton Corporation Method of forming a composite by infiltrating a porous preform
US4055451A (en) * 1973-08-31 1977-10-25 Alan Gray Cockbain Composite materials
US4082864A (en) * 1974-06-17 1978-04-04 Fiber Materials, Inc. Reinforced metal matrix composite
US4044816A (en) * 1975-06-19 1977-08-30 Theodore H. Krueger Formation of metal parts
DE2536153B2 (de) * 1975-08-13 1977-06-08 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen mehrschichtiger kontaktstuecke fuer vakuummittelspannungsleistungsschalter
US4119363A (en) * 1976-03-18 1978-10-10 Bell Telephone Laboratories Incorporated Package for optical devices including optical fiber-to-metal hermetic seal
DE2819076C2 (de) * 1978-04-29 1982-02-25 Messerschmitt-Bölkow-Blohm GmbH, 8000 München Verfahren zum Herstellen eines metallischen Mehschicht-Verbundwerkstoffes
GB1595280A (en) * 1978-05-26 1981-08-12 Hepworth & Grandage Ltd Composite materials and methods for their production
JPS6053858B2 (ja) * 1979-02-16 1985-11-27 シャープ株式会社 エレクトロクロミック表示装置の製造方法
JPS602149B2 (ja) * 1980-07-30 1985-01-19 トヨタ自動車株式会社 複合材料の製造方法
JPS57210140A (en) * 1981-06-18 1982-12-23 Honda Motor Co Ltd Fiber reinfoced piston for internal combustion engine
US4404262A (en) * 1981-08-03 1983-09-13 International Harvester Co. Composite metallic and refractory article and method of manufacturing the article
US4376803A (en) * 1981-08-26 1983-03-15 The Aerospace Corporation Carbon-reinforced metal-matrix composites
US4376804A (en) * 1981-08-26 1983-03-15 The Aerospace Corporation Pyrolyzed pitch coatings for carbon fiber
US4473103A (en) * 1982-01-29 1984-09-25 International Telephone And Telegraph Corporation Continuous production of metal alloy composites
JPS58144441A (ja) * 1982-02-23 1983-08-27 Nippon Denso Co Ltd 炭素繊維強化金属複合材料の製造方法
EP0094353B1 (de) * 1982-05-10 1988-01-20 Eltech Systems Corporation Aluminium benetzbare Materialien
JPS5950149A (ja) * 1982-09-14 1984-03-23 Toyota Motor Corp 繊維強化金属複合材料
US4600481A (en) * 1982-12-30 1986-07-15 Eltech Systems Corporation Aluminum production cell components
JPS59215982A (ja) * 1983-05-20 1984-12-05 Nippon Piston Ring Co Ltd 回転式流体ポンプ用ロータ及びその製造方法
GB2156718B (en) * 1984-04-05 1987-06-24 Rolls Royce A method of increasing the wettability of a surface by a molten metal
GB8411074D0 (en) * 1984-05-01 1984-06-06 Ae Plc Reinforced pistons
JPS6169448A (ja) * 1984-09-14 1986-04-10 工業技術院長 炭素繊維強化金属とその製造法
EP0183016B1 (de) * 1984-10-03 1989-09-20 Sumitomo Electric Industries Limited Werkstoff für Halbleiteranordung und Verfahren zu seiner Herstellung
US4587177A (en) * 1985-04-04 1986-05-06 Imperial Clevite Inc. Cast metal composite article
US4673435A (en) * 1985-05-21 1987-06-16 Toshiba Ceramics Co., Ltd. Alumina composite body and method for its manufacture
US4630665A (en) * 1985-08-26 1986-12-23 Aluminum Company Of America Bonding aluminum to refractory materials
US4657065A (en) * 1986-07-10 1987-04-14 Amax Inc. Composite materials having a matrix of magnesium or magnesium alloy reinforced with discontinuous silicon carbide particles
US4713111A (en) * 1986-08-08 1987-12-15 Amax Inc. Production of aluminum-SiC composite using sodium tetrasborate as an addition agent
US4753690A (en) * 1986-08-13 1988-06-28 Amax Inc. Method for producing composite material having an aluminum alloy matrix with a silicon carbide reinforcement
US4662429A (en) * 1986-08-13 1987-05-05 Amax Inc. Composite material having matrix of aluminum or aluminum alloy with dispersed fibrous or particulate reinforcement
US4828008A (en) * 1987-05-13 1989-05-09 Lanxide Technology Company, Lp Metal matrix composites
US4884737A (en) * 1987-05-21 1989-12-05 Lanxide Technology Company, Lp Method for surface bonding of ceramic bodies
CA1238428A (en) * 1987-08-21 1988-06-21 John J. Kost Thermally enhanced integrated circuit carrier package
US4935055A (en) * 1988-01-07 1990-06-19 Lanxide Technology Company, Lp Method of making metal matrix composite with the use of a barrier
US4871008A (en) * 1988-01-11 1989-10-03 Lanxide Technology Company, Lp Method of making metal matrix composites
US4894293A (en) * 1988-03-10 1990-01-16 Texas Instruments Incorporated Circuit system, a composite metal material for use therein, and a method for making the material
EP0340957B1 (de) * 1988-04-30 1994-03-16 Toyota Jidosha Kabushiki Kaisha Verfahren zur Herstellung von Verbundmetall unter Beschleunigung der Infiltration des Matrix-Metalls durch feine Teilchen eines dritten Materials
US4875616A (en) * 1988-08-10 1989-10-24 America Matrix, Inc. Method of producing a high temperature, high strength bond between a ceramic shape and metal shape
US4932099A (en) * 1988-10-17 1990-06-12 Chrysler Corporation Method of producing reinforced composite materials
CA2000770C (en) * 1988-10-17 2000-06-27 John M. Corwin Method of producing reinforced composite materials
US5040588A (en) * 1988-11-10 1991-08-20 Lanxide Technology Company, Lp Methods for forming macrocomposite bodies and macrocomposite bodies produced thereby
US5004034A (en) * 1988-11-10 1991-04-02 Lanxide Technology Company, Lp Method of surface bonding materials together by use of a metal matrix composite, and products produced thereby
US5011063A (en) * 1989-01-13 1991-04-30 Lanxide Technology Company, Lp Method of bonding a ceramic composite body to a second body and articles produced thereby
US4978054A (en) * 1990-07-03 1990-12-18 The United States Of America As Represented By The Secretary Of The Navy Diffusion bonding process for aluminum and aluminum alloys

Also Published As

Publication number Publication date
WO1991013462A3 (en) 1991-10-17
US5163499A (en) 1992-11-17
EP0516765A1 (de) 1992-12-09
AU651822B2 (en) 1994-08-04
CA2076637A1 (en) 1991-08-24
AU7685191A (en) 1991-09-18
EP0516765B1 (de) 1997-07-09
JPH05504659A (ja) 1993-07-15
DE69126773D1 (de) 1997-08-14
WO1991013462A2 (en) 1991-09-05
BR9106055A (pt) 1993-06-15

Similar Documents

Publication Publication Date Title
ATE155287T1 (de) Herstellungsverfahren für elektronische packungen
NO177583C (no) Framgangsmåte for framstilling av en makrokompositt
DK460489D0 (da) Fremgangsmaade til fremstilling af metalmatrixkompositprodukter
DK559189D0 (da) Fremgangsmaade til fremstilling af metalmatrixkompositprodukter
DK559289D0 (da) Fremgangsmaade til fremstilling af metalmatrixkompositprodukter
KR900007517A (ko) 금속기질 복합체를 이용하여 다수의 몸체를 결합시키는 방법
DK558889A (da) Fremgangsmaade til fremstilling af metalmatrixkompositprodukter
DK559689A (da) Fremgangsmaade til fremstilling af metalmatrixkompositprodukter
DK558989D0 (da) Fremgangsmaade til fremstilling af metalmatrixkompositprodukter
DE69028740D1 (de) Verfahren zur Herstellung von grossen Verbundwerkstoffkörpern geeignet für elektronische Packungsbehälter
Newkirk et al. Method of Forming Electronic Packages