ATE146853T1 - Herstellungsverfahren einer mikropumpe - Google Patents

Herstellungsverfahren einer mikropumpe

Info

Publication number
ATE146853T1
ATE146853T1 AT94107419T AT94107419T ATE146853T1 AT E146853 T1 ATE146853 T1 AT E146853T1 AT 94107419 T AT94107419 T AT 94107419T AT 94107419 T AT94107419 T AT 94107419T AT E146853 T1 ATE146853 T1 AT E146853T1
Authority
AT
Austria
Prior art keywords
piece
closing plates
production
cavity
completed
Prior art date
Application number
AT94107419T
Other languages
English (en)
Inventor
Rooij Nicolaas Frans De
Sylvain Jeanneret
Volker Gass
Der Schoot Bart Van
Original Assignee
Fondation Pour Le Soutien A La
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fondation Pour Le Soutien A La filed Critical Fondation Pour Le Soutien A La
Application granted granted Critical
Publication of ATE146853T1 publication Critical patent/ATE146853T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Micromachines (AREA)
  • External Artificial Organs (AREA)
  • Weting (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Lubricants (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
AT94107419T 1993-05-24 1994-05-13 Herstellungsverfahren einer mikropumpe ATE146853T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9306281A FR2705693B1 (fr) 1993-05-24 1993-05-24 Procédé de fabrication d'un dispositif micro-usiné à contenir ou à véhiculer un fluide.

Publications (1)

Publication Number Publication Date
ATE146853T1 true ATE146853T1 (de) 1997-01-15

Family

ID=9447460

Family Applications (1)

Application Number Title Priority Date Filing Date
AT94107419T ATE146853T1 (de) 1993-05-24 1994-05-13 Herstellungsverfahren einer mikropumpe

Country Status (9)

Country Link
US (1) US5462839A (de)
EP (1) EP0641934B1 (de)
JP (1) JP3651809B2 (de)
AT (1) ATE146853T1 (de)
DE (1) DE69401250T2 (de)
DK (1) DK0641934T3 (de)
ES (1) ES2099991T3 (de)
FR (1) FR2705693B1 (de)
SG (1) SG47036A1 (de)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6377155B1 (en) 1995-10-10 2002-04-23 Georgia Tech Research Corp. Microfabricated electromagnetic system and method for forming electromagnets in microfabricated devices
US5847631A (en) * 1995-10-10 1998-12-08 Georgia Tech Research Corporation Magnetic relay system and method capable of microfabrication production
US6281560B1 (en) 1995-10-10 2001-08-28 Georgia Tech Research Corp. Microfabricated electromagnetic system and method for forming electromagnets in microfabricated devices
US5879632A (en) * 1996-04-09 1999-03-09 Sarnoff Corporation Apportioning system
CA2260361A1 (en) 1996-07-08 1998-01-15 Burstein Laboratories, Inc Cleavable signal element device and method
US6331275B1 (en) 1996-07-08 2001-12-18 Burstein Technologies, Inc. Spatially addressable, cleavable reflective signal elements, assay device and method
US20050214827A1 (en) * 1996-07-08 2005-09-29 Burstein Technologies, Inc. Assay device and method
US6342349B1 (en) 1996-07-08 2002-01-29 Burstein Technologies, Inc. Optical disk-based assay devices and methods
DE19705910C1 (de) * 1997-02-15 1998-06-18 Inst Physikalische Hochtech Ev Mikrokammerarray mit hoher Kammerdichte
DE19719862A1 (de) 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Mikromembranpumpe
DE19719861A1 (de) 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Verfahren zum Herstellen eines Mikromembranpumpenkörpers
DE69834210T2 (de) 1997-11-19 2007-01-04 Microflow Engineering S.A. Sprühvorrichtung für einen Inhalator
EP1097378A2 (de) * 1998-07-21 2001-05-09 Burstein Laboratories Inc. Optische platten-testvorrichtung und verfahren
ES2149748T3 (es) 1998-12-01 2007-06-16 Microflow Engineering Sa Inhalador con nebulizador de ondas ultrasonicas que presenta unas aberturas de boquilla superpuestas sobre las crestas de un patron de onda estacionaria.
US6410360B1 (en) 1999-01-26 2002-06-25 Teledyne Industries, Inc. Laminate-based apparatus and method of fabrication
US6827866B1 (en) * 2000-05-24 2004-12-07 Active Optical Networks, Inc. Deep-well lithography process for forming micro-electro-mechanical structures
US6905614B1 (en) 2000-05-24 2005-06-14 Active Optical Networks, Inc. Pattern-transfer process for forming micro-electro-mechanical structures
AU2002227181A1 (en) * 2000-11-16 2002-05-27 Burstein Technologies, Inc. Optical biodiscs with reflective layers
AU2002241602A1 (en) * 2000-11-16 2002-06-11 Burstein Technologies, Inc. Methods and apparatus for detecting and quantifying lymphocytes with optical biodiscs
US7087203B2 (en) * 2000-11-17 2006-08-08 Nagaoka & Co., Ltd. Methods and apparatus for blood typing with optical bio-disc
US7026131B2 (en) * 2000-11-17 2006-04-11 Nagaoka & Co., Ltd. Methods and apparatus for blood typing with optical bio-discs
EP1236517A1 (de) * 2001-02-23 2002-09-04 Microflow Engineering SA Verfahren zur Herstellung eines Tröpfchen-Verneblers und ein solcher Vernebler
US7141416B2 (en) * 2001-07-12 2006-11-28 Burstein Technologies, Inc. Multi-purpose optical analysis optical bio-disc for conducting assays and various reporting agents for use therewith
US20030143637A1 (en) * 2001-08-31 2003-07-31 Selvan Gowri Pyapali Capture layer assemblies for cellular assays including related optical analysis discs and methods
JP2005502872A (ja) * 2001-09-07 2005-01-27 バースタイン テクノロジーズ，インコーポレイティド 光バイオディスクシステムを使用した、核の形態に基づく白血球の型の識別および定量
US20050003459A1 (en) * 2002-01-30 2005-01-06 Krutzik Siegfried Richard Multi-purpose optical analysis disc for conducting assays and related methods for attaching capture agents
US20040241381A1 (en) * 2002-01-31 2004-12-02 Chen Yihfar Microfluidic structures with circumferential grooves for bonding adhesives and related optical analysis discs
WO2003065355A2 (en) * 2002-01-31 2003-08-07 Burstein Technologies, Inc. Bio-safety features for optical analysis disc and disc system including same
US20070274863A1 (en) * 2003-07-25 2007-11-29 Horacio Kido Fluidic circuits for sample preparation including bio-discs and methods relating thereto
US7723899B2 (en) 2004-02-03 2010-05-25 S.C. Johnson & Son, Inc. Active material and light emitting device
US7538473B2 (en) * 2004-02-03 2009-05-26 S.C. Johnson & Son, Inc. Drive circuits and methods for ultrasonic piezoelectric actuators
EP1792662A1 (de) 2005-11-30 2007-06-06 Microflow Engineering SA Tropferspendervorrichtung
TWI580878B (zh) * 2016-07-19 2017-05-01 科際精密股份有限公司 單向閥組件
CN112016805B (zh) * 2020-07-23 2023-06-06 上海工程技术大学 一种磁流变液性能评价方法及系统
WO2025242139A1 (zh) * 2024-05-22 2025-11-27 苏州原位芯片科技有限责任公司 一种mems微阀及微泵

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4938742A (en) * 1988-02-04 1990-07-03 Smits Johannes G Piezoelectric micropump with microvalves
JPH04501449A (ja) * 1989-06-14 1992-03-12 ウエストンブリッジ　インターナショナル　リミティド マイクロポンプ
CH681168A5 (en) * 1989-11-10 1993-01-29 Westonbridge Int Ltd Micro-pump for medicinal dosing
KR910012538A (ko) * 1989-12-27 1991-08-08 야마무라 가쯔미 마이크로 펌프 및 그 제조 방법
DE69106240T2 (de) * 1990-07-02 1995-05-11 Seiko Epson Corp Mikropumpe und Verfahren zur Herstellung einer Mikropumpe.

Also Published As

Publication number Publication date
FR2705693A1 (fr) 1994-12-02
FR2705693B1 (fr) 1995-07-28
SG47036A1 (en) 1998-03-20
DE69401250D1 (de) 1997-02-06
US5462839A (en) 1995-10-31
EP0641934B1 (de) 1996-12-27
JP3651809B2 (ja) 2005-05-25
HK1006739A1 (en) 1999-03-12
ES2099991T3 (es) 1997-06-01
EP0641934A1 (de) 1995-03-08
DE69401250T2 (de) 1997-07-10
DK0641934T3 (da) 1997-10-13
JPH0719170A (ja) 1995-01-20

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
EEIH Change in the person of patent owner
REN Ceased due to non-payment of the annual fee