JPS57155744A - Jig for wafer - Google Patents

Jig for wafer

Info

Publication number
JPS57155744A
JPS57155744A JP4029981A JP4029981A JPS57155744A JP S57155744 A JPS57155744 A JP S57155744A JP 4029981 A JP4029981 A JP 4029981A JP 4029981 A JP4029981 A JP 4029981A JP S57155744 A JPS57155744 A JP S57155744A
Authority
JP
Japan
Prior art keywords
wafer
jig
accommodating
hands
side walls
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4029981A
Other languages
Japanese (ja)
Inventor
Susumu Nanko
Hiroto Nagatomo
Hisao Seki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4029981A priority Critical patent/JPS57155744A/en
Publication of JPS57155744A publication Critical patent/JPS57155744A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Weting (AREA)

Abstract

PURPOSE:To prevent contamination of a wafer and to improve reliability by a method wherein the outside walls of a wafer jig accommodating the wafer are made of solid structure to pervent contact to the wafer by fingers. CONSTITUTION:A unitedly formed wafer jig is provided with side walls 10, 12 extended in the longitudinal direction and many wafer accommodating grooves 20, 22 accommodating a wafer 18 are formed at inside facing surfaces. The outside sections of both the side walls 10, 12 are composed of solid structure having no opening grooves and have smooth surfaces. In this way, when the wafer jig is held by hands, the hands are not touched the wafer 18 to prevent the contamination of the wafer and to improve reliability.
JP4029981A 1981-03-23 1981-03-23 Jig for wafer Pending JPS57155744A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4029981A JPS57155744A (en) 1981-03-23 1981-03-23 Jig for wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4029981A JPS57155744A (en) 1981-03-23 1981-03-23 Jig for wafer

Publications (1)

Publication Number Publication Date
JPS57155744A true JPS57155744A (en) 1982-09-25

Family

ID=12576727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4029981A Pending JPS57155744A (en) 1981-03-23 1981-03-23 Jig for wafer

Country Status (1)

Country Link
JP (1) JPS57155744A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6139545A (en) * 1984-07-31 1986-02-25 Toshiba Ceramics Co Ltd Wafer carrier
JPS61151342U (en) * 1985-03-08 1986-09-18

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5598822A (en) * 1979-01-24 1980-07-28 Hitachi Ltd Wafer holding jig

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5598822A (en) * 1979-01-24 1980-07-28 Hitachi Ltd Wafer holding jig

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6139545A (en) * 1984-07-31 1986-02-25 Toshiba Ceramics Co Ltd Wafer carrier
JPS61151342U (en) * 1985-03-08 1986-09-18

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