ATE127614T1 - Bogenentladungsableiter. - Google Patents

Bogenentladungsableiter.

Info

Publication number
ATE127614T1
ATE127614T1 AT91905760T AT91905760T ATE127614T1 AT E127614 T1 ATE127614 T1 AT E127614T1 AT 91905760 T AT91905760 T AT 91905760T AT 91905760 T AT91905760 T AT 91905760T AT E127614 T1 ATE127614 T1 AT E127614T1
Authority
AT
Austria
Prior art keywords
resonant
discharge
diverting
capacitor
arc
Prior art date
Application number
AT91905760T
Other languages
English (en)
Inventor
Glen L Anderson
Peter W Hammond
David S Yotive
Original Assignee
Halmar Robicon Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Halmar Robicon Group Inc filed Critical Halmar Robicon Group Inc
Application granted granted Critical
Publication of ATE127614T1 publication Critical patent/ATE127614T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
    • H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Arc-Extinguishing Devices That Are Switches (AREA)
  • Testing Relating To Insulation (AREA)
  • Current-Collector Devices For Electrically Propelled Vehicles (AREA)
  • Emergency Protection Circuit Devices (AREA)
  • Thermistors And Varistors (AREA)
  • Curing Cements, Concrete, And Artificial Stone (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Sorting Of Articles (AREA)
AT91905760T 1990-03-23 1991-03-21 Bogenentladungsableiter. ATE127614T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/498,343 US5241152A (en) 1990-03-23 1990-03-23 Circuit for detecting and diverting an electrical arc in a glow discharge apparatus

Publications (1)

Publication Number Publication Date
ATE127614T1 true ATE127614T1 (de) 1995-09-15

Family

ID=23980682

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91905760T ATE127614T1 (de) 1990-03-23 1991-03-21 Bogenentladungsableiter.

Country Status (12)

Country Link
US (1) US5241152A (de)
EP (1) EP0521017B1 (de)
JP (1) JP3073011B2 (de)
KR (1) KR100204450B1 (de)
AT (1) ATE127614T1 (de)
AU (1) AU645792B2 (de)
CA (1) CA2077902C (de)
DE (1) DE69112820T2 (de)
DK (1) DK0521017T3 (de)
ES (1) ES2080301T3 (de)
WO (1) WO1991015027A1 (de)
ZA (1) ZA912203B (de)

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US5897753A (en) * 1997-05-28 1999-04-27 Advanced Energy Industries, Inc. Continuous deposition of insulating material using multiple anodes alternated between positive and negative voltages
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US6818103B1 (en) 1999-10-15 2004-11-16 Advanced Energy Industries, Inc. Method and apparatus for substrate biasing in multiple electrode sputtering systems
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US7981257B2 (en) 2002-04-12 2011-07-19 Schneider Electric USA, Inc. Current-based method and apparatus for detecting and classifying arcs
US7988833B2 (en) * 2002-04-12 2011-08-02 Schneider Electric USA, Inc. System and method for detecting non-cathode arcing in a plasma generation apparatus
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US6808607B2 (en) * 2002-09-25 2004-10-26 Advanced Energy Industries, Inc. High peak power plasma pulsed supply with arc handling
US6967305B2 (en) * 2003-08-18 2005-11-22 Mks Instruments, Inc. Control of plasma transitions in sputter processing systems
US20050103620A1 (en) * 2003-11-19 2005-05-19 Zond, Inc. Plasma source with segmented magnetron cathode
US9771648B2 (en) * 2004-08-13 2017-09-26 Zond, Inc. Method of ionized physical vapor deposition sputter coating high aspect-ratio structures
DE102004015090A1 (de) * 2004-03-25 2005-11-03 Hüttinger Elektronik Gmbh + Co. Kg Bogenentladungserkennungseinrichtung
US6943317B1 (en) * 2004-07-02 2005-09-13 Advanced Energy Industries, Inc. Apparatus and method for fast arc extinction with early shunting of arc current in plasma
EP2477207A3 (de) * 2004-09-24 2014-09-03 Zond, Inc. Vorrichtung zum Erzeugen von elektrischen Hochstrom-entladungen
US7305311B2 (en) * 2005-04-22 2007-12-04 Advanced Energy Industries, Inc. Arc detection and handling in radio frequency power applications
US20060260938A1 (en) * 2005-05-20 2006-11-23 Petrach Philip M Module for Coating System and Associated Technology
ATE421791T1 (de) * 2005-12-22 2009-02-15 Huettinger Elektronik Gmbh Verfahren und vorrichtung zur arcerkennung in einem plasmaprozess
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US7514935B2 (en) * 2006-09-13 2009-04-07 Advanced Energy Industries, Inc. System and method for managing power supplied to a plasma chamber
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US7795817B2 (en) * 2006-11-24 2010-09-14 Huettinger Elektronik Gmbh + Co. Kg Controlled plasma power supply
EP1928009B1 (de) * 2006-11-28 2013-04-10 HÜTTINGER Elektronik GmbH + Co. KG Bogenentladungs-Erkennungseinrichtung, Plasma-Leistungsversorgung und Verfahren zum Erkennen von Bogenentladungen
CN101589451B (zh) * 2006-12-12 2012-03-07 Oc欧瑞康巴尔斯公司 针对高功率脉冲磁控溅射（hipims）的rf衬底偏压
EP1933362B1 (de) * 2006-12-14 2011-04-13 HÜTTINGER Elektronik GmbH + Co. KG Bogenentladungs-Erkennungseinrichtung, Plasma-Leistungsversorgung und Verfahren zum Erkennen von Bogenentladungen
US8217299B2 (en) * 2007-02-22 2012-07-10 Advanced Energy Industries, Inc. Arc recovery without over-voltage for plasma chamber power supplies using a shunt switch
EP1978542B1 (de) 2007-03-08 2010-12-29 HÜTTINGER Elektronik GmbH + Co. KG Verfahren und Vorrichtung zum Unterdrücken von Bogenentladungen beim Betreiben eines Plasmaprozesses
EP1995818A1 (de) * 2007-05-12 2008-11-26 Huettinger Electronic Sp. z o. o Schaltung und Verfahren zur Reduzierung der in einer Zuleitungsinduktivität gespeicherten elektrischen Energie zur schnellen Plasmalichtbogenlöschung
US8207812B2 (en) * 2008-01-09 2012-06-26 Siemens Industry, Inc. System for isolating a medium voltage
US8158017B2 (en) * 2008-05-12 2012-04-17 Lam Research Corporation Detection of arcing events in wafer plasma processing through monitoring of trace gas concentrations
US9613784B2 (en) 2008-07-17 2017-04-04 Mks Instruments, Inc. Sputtering system and method including an arc detection
US8044594B2 (en) * 2008-07-31 2011-10-25 Advanced Energy Industries, Inc. Power supply ignition system and method
US8395078B2 (en) 2008-12-05 2013-03-12 Advanced Energy Industries, Inc Arc recovery with over-voltage protection for plasma-chamber power supplies
PL2648209T3 (pl) * 2009-02-17 2018-06-29 Solvix Gmbh Urządzenie zasilające do obróbki plazmowej
US8619395B2 (en) 2010-03-12 2013-12-31 Arc Suppression Technologies, Llc Two terminal arc suppressor
DE102010031568B4 (de) 2010-07-20 2014-12-11 TRUMPF Hüttinger GmbH + Co. KG Arclöschanordnung und Verfahren zum Löschen von Arcs
US8552665B2 (en) 2010-08-20 2013-10-08 Advanced Energy Industries, Inc. Proactive arc management of a plasma load
KR101942146B1 (ko) * 2012-08-31 2019-01-24 어드밴스드 에너지 인더스트리즈 인코포레이티드 전압 반전 및 개선된 회복을 갖는 아크 처리
CN103981493B (zh) * 2014-05-30 2016-04-27 大连理工常州研究院有限公司 一种等离子镀膜设备用引弧装置

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Also Published As

Publication number Publication date
DE69112820T2 (de) 1996-05-30
JPH05506327A (ja) 1993-09-16
ZA912203B (en) 1992-01-29
CA2077902C (en) 2000-05-02
WO1991015027A1 (en) 1991-10-03
DK0521017T3 (da) 1996-01-22
ES2080301T3 (es) 1996-02-01
AU645792B2 (en) 1994-01-27
CA2077902A1 (en) 1991-09-24
DE69112820D1 (de) 1995-10-12
KR100204450B1 (ko) 1999-06-15
EP0521017B1 (de) 1995-09-06
EP0521017A1 (de) 1993-01-07
JP3073011B2 (ja) 2000-08-07
AU7465891A (en) 1991-10-21
KR930700966A (ko) 1993-03-16
US5241152A (en) 1993-08-31

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties