ZA912203B - Arc diverter - Google Patents

Arc diverter

Info

Publication number
ZA912203B
ZA912203B ZA912203A ZA912203A ZA912203B ZA 912203 B ZA912203 B ZA 912203B ZA 912203 A ZA912203 A ZA 912203A ZA 912203 A ZA912203 A ZA 912203A ZA 912203 B ZA912203 B ZA 912203B
Authority
ZA
South Africa
Prior art keywords
resonant
discharge
diverting
capacitor
arc
Prior art date
Application number
ZA912203A
Other languages
English (en)
Inventor
Glen L Anderson
L Anderson Glen
David S Yotive
S Yotive David
Peter W Hammond
W Hammond Peter
Original Assignee
Halmar Electronics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Halmar Electronics filed Critical Halmar Electronics
Publication of ZA912203B publication Critical patent/ZA912203B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
    • H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Arc-Extinguishing Devices That Are Switches (AREA)
  • Testing Relating To Insulation (AREA)
  • Current-Collector Devices For Electrically Propelled Vehicles (AREA)
  • Emergency Protection Circuit Devices (AREA)
  • Thermistors And Varistors (AREA)
  • Curing Cements, Concrete, And Artificial Stone (AREA)
  • Sorting Of Articles (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
ZA912203A 1990-03-23 1991-03-22 Arc diverter ZA912203B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/498,343 US5241152A (en) 1990-03-23 1990-03-23 Circuit for detecting and diverting an electrical arc in a glow discharge apparatus

Publications (1)

Publication Number Publication Date
ZA912203B true ZA912203B (en) 1992-01-29

Family

ID=23980682

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA912203A ZA912203B (en) 1990-03-23 1991-03-22 Arc diverter

Country Status (12)

Country Link
US (1) US5241152A (xx)
EP (1) EP0521017B1 (xx)
JP (1) JP3073011B2 (xx)
KR (1) KR100204450B1 (xx)
AT (1) ATE127614T1 (xx)
AU (1) AU645792B2 (xx)
CA (1) CA2077902C (xx)
DE (1) DE69112820T2 (xx)
DK (1) DK0521017T3 (xx)
ES (1) ES2080301T3 (xx)
WO (1) WO1991015027A1 (xx)
ZA (1) ZA912203B (xx)

Families Citing this family (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4127504A1 (de) * 1991-08-20 1993-02-25 Leybold Ag Einrichtung zur unterdrueckung von lichtboegen
CH689767A5 (de) * 1992-03-24 1999-10-15 Balzers Hochvakuum Verfahren zur Werkstueckbehandlung in einer Vakuumatmosphaere und Vakuumbehandlungsanlage.
JP3631246B2 (ja) * 1992-09-30 2005-03-23 アドバンスド エナージィ インダストリーズ，インコーポレイテッド 形状的に精密な薄膜フィルムコーティングシステム
US5427669A (en) * 1992-12-30 1995-06-27 Advanced Energy Industries, Inc. Thin film DC plasma processing system
US6217717B1 (en) 1992-12-30 2001-04-17 Advanced Energy Industries, Inc. Periodically clearing thin film plasma processing system
US5718813A (en) * 1992-12-30 1998-02-17 Advanced Energy Industries, Inc. Enhanced reactive DC sputtering system
SG74667A1 (en) * 1993-07-28 2000-08-22 Asahi Glass Co Ltd Method of an apparatus for sputtering
US5698082A (en) * 1993-08-04 1997-12-16 Balzers Und Leybold Method and apparatus for coating substrates in a vacuum chamber, with a system for the detection and suppression of undesirable arcing
US5651865A (en) * 1994-06-17 1997-07-29 Eni Preferential sputtering of insulators from conductive targets
DE4441206C2 (de) * 1994-11-19 1996-09-26 Leybold Ag Einrichtung für die Unterdrückung von Überschlägen in Kathoden-Zerstäubungseinrichtungen
DE69509046T2 (de) * 1994-11-30 1999-10-21 Applied Materials, Inc. Plasmareaktoren zur Behandlung von Halbleiterscheiben
US5584972A (en) * 1995-02-01 1996-12-17 Sony Corporation Plasma noise and arcing suppressor apparatus and method for sputter deposition
WO1996031899A1 (en) 1995-04-07 1996-10-10 Advanced Energy Industries, Inc. Adjustable energy quantum thin film plasma processing system
US5576939A (en) * 1995-05-05 1996-11-19 Drummond; Geoffrey N. Enhanced thin film DC plasma power supply
US5584974A (en) * 1995-10-20 1996-12-17 Eni Arc control and switching element protection for pulsed dc cathode sputtering power supply
US5917286A (en) * 1996-05-08 1999-06-29 Advanced Energy Industries, Inc. Pulsed direct current power supply configurations for generating plasmas
BE1010420A3 (fr) * 1996-07-12 1998-07-07 Cockerill Rech & Dev Procede pour la formation d'un revetement sur un substrat et installation pour la mise en oeuvre de ce procede.
DE19651615C1 (de) * 1996-12-12 1997-07-10 Fraunhofer Ges Forschung Verfahren zum Aufbringen von Kohlenstoffschichten durch reaktives Magnetron-Sputtern
DE19651811B4 (de) * 1996-12-13 2006-08-31 Unaxis Deutschland Holding Gmbh Vorrichtung zum Belegen eines Substrats mit dünnen Schichten
WO1998037257A1 (fr) * 1997-02-20 1998-08-27 Shibaura Mechatronics Corporation Bloc d'alimentation pour dispositif de pulverisation cathodique
US5897753A (en) * 1997-05-28 1999-04-27 Advanced Energy Industries, Inc. Continuous deposition of insulating material using multiple anodes alternated between positive and negative voltages
EP1025276A1 (en) 1997-09-17 2000-08-09 Tokyo Electron Limited Device and method for detecting and preventing arcing in rf plasma systems
US6051113A (en) * 1998-04-27 2000-04-18 Cvc Products, Inc. Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure using target indexing
US6905578B1 (en) * 1998-04-27 2005-06-14 Cvc Products, Inc. Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure
US6162332A (en) * 1998-05-07 2000-12-19 Taiwan Semiconductor Manufacturing Company, Ltd. Method and apparatus for preventing arcing in sputter chamber
US6818103B1 (en) 1999-10-15 2004-11-16 Advanced Energy Industries, Inc. Method and apparatus for substrate biasing in multiple electrode sputtering systems
US6350960B1 (en) 2000-11-28 2002-02-26 Thermal Dynamics Corporation Parts-in-place safety reset circuit and method for contact start plasma-arc torch
US7988833B2 (en) * 2002-04-12 2011-08-02 Schneider Electric USA, Inc. System and method for detecting non-cathode arcing in a plasma generation apparatus
US7981257B2 (en) 2002-04-12 2011-07-19 Schneider Electric USA, Inc. Current-based method and apparatus for detecting and classifying arcs
WO2004001094A1 (en) * 2002-06-19 2003-12-31 Tosoh Smd, Inc. Sputter target monitoring system
CN100360704C (zh) * 2002-06-28 2008-01-09 东京电子株式会社 用于在等离子体加工系统中电弧抑制的方法和系统
US6808607B2 (en) * 2002-09-25 2004-10-26 Advanced Energy Industries, Inc. High peak power plasma pulsed supply with arc handling
US6967305B2 (en) * 2003-08-18 2005-11-22 Mks Instruments, Inc. Control of plasma transitions in sputter processing systems
US20050103620A1 (en) * 2003-11-19 2005-05-19 Zond, Inc. Plasma source with segmented magnetron cathode
US9771648B2 (en) * 2004-08-13 2017-09-26 Zond, Inc. Method of ionized physical vapor deposition sputter coating high aspect-ratio structures
DE102004015090A1 (de) * 2004-03-25 2005-11-03 Hüttinger Elektronik Gmbh + Co. Kg Bogenentladungserkennungseinrichtung
US6943317B1 (en) * 2004-07-02 2005-09-13 Advanced Energy Industries, Inc. Apparatus and method for fast arc extinction with early shunting of arc current in plasma
EP2477207A3 (en) * 2004-09-24 2014-09-03 Zond, Inc. Apparatus for generating high-current electrical discharges
US7305311B2 (en) * 2005-04-22 2007-12-04 Advanced Energy Industries, Inc. Arc detection and handling in radio frequency power applications
US20060260938A1 (en) * 2005-05-20 2006-11-23 Petrach Philip M Module for Coating System and Associated Technology
ATE421791T1 (de) * 2005-12-22 2009-02-15 Huettinger Elektronik Gmbh Verfahren und vorrichtung zur arcerkennung in einem plasmaprozess
US20080000768A1 (en) * 2006-06-30 2008-01-03 Stimson Bradley O Electrically Coupled Target Panels
US7514935B2 (en) * 2006-09-13 2009-04-07 Advanced Energy Industries, Inc. System and method for managing power supplied to a plasma chamber
DE502006005363D1 (de) * 2006-11-23 2009-12-24 Huettinger Elektronik Gmbh Verfahren zum Erkennen einer Bogenentladung in einem Plasmaprozess und Bogenentladungserkennungsvorrichtung
US7795817B2 (en) * 2006-11-24 2010-09-14 Huettinger Elektronik Gmbh + Co. Kg Controlled plasma power supply
EP1928009B1 (de) * 2006-11-28 2013-04-10 HÜTTINGER Elektronik GmbH + Co. KG Bogenentladungs-Erkennungseinrichtung, Plasma-Leistungsversorgung und Verfahren zum Erkennen von Bogenentladungen
EP2102889B1 (en) 2006-12-12 2020-10-07 Evatec AG Rf substrate bias with high power impulse magnetron sputtering (hipims)
EP1933362B1 (de) * 2006-12-14 2011-04-13 HÜTTINGER Elektronik GmbH + Co. KG Bogenentladungs-Erkennungseinrichtung, Plasma-Leistungsversorgung und Verfahren zum Erkennen von Bogenentladungen
US8217299B2 (en) * 2007-02-22 2012-07-10 Advanced Energy Industries, Inc. Arc recovery without over-voltage for plasma chamber power supplies using a shunt switch
ATE493749T1 (de) 2007-03-08 2011-01-15 Huettinger Elektronik Gmbh Verfahren und vorrichtung zum unterdrücken von bogenentladungen beim betreiben eines plasmaprozesses
EP1995818A1 (en) 2007-05-12 2008-11-26 Huettinger Electronic Sp. z o. o Circuit and method for reducing electrical energy stored in a lead inductance for fast extinction of plasma arcs
US8207812B2 (en) * 2008-01-09 2012-06-26 Siemens Industry, Inc. System for isolating a medium voltage
US8158017B2 (en) * 2008-05-12 2012-04-17 Lam Research Corporation Detection of arcing events in wafer plasma processing through monitoring of trace gas concentrations
US9613784B2 (en) 2008-07-17 2017-04-04 Mks Instruments, Inc. Sputtering system and method including an arc detection
US8044594B2 (en) * 2008-07-31 2011-10-25 Advanced Energy Industries, Inc. Power supply ignition system and method
US8395078B2 (en) 2008-12-05 2013-03-12 Advanced Energy Industries, Inc Arc recovery with over-voltage protection for plasma-chamber power supplies
PL2648209T3 (pl) 2009-02-17 2018-06-29 Solvix Gmbh Urządzenie zasilające do obróbki plazmowej
US8619395B2 (en) 2010-03-12 2013-12-31 Arc Suppression Technologies, Llc Two terminal arc suppressor
DE102010031568B4 (de) 2010-07-20 2014-12-11 TRUMPF Hüttinger GmbH + Co. KG Arclöschanordnung und Verfahren zum Löschen von Arcs
US8552665B2 (en) 2010-08-20 2013-10-08 Advanced Energy Industries, Inc. Proactive arc management of a plasma load
EP2891388B1 (en) * 2012-08-31 2021-07-21 AES Global Holdings, Pte. Ltd. Arc management with voltage reversal and improved recovery
CN103981493B (zh) * 2014-05-30 2016-04-27 大连理工常州研究院有限公司 一种等离子镀膜设备用引弧装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH389797A (de) * 1959-08-17 1965-03-31 Berghaus Elektrophysik Anst Vorrichtung zur Vermeidung von plötzlichen Änderungen des Entladungszustandes für mit stromstarken Glimmentladungen betriebene Entladungsgefässe
US3437784A (en) * 1966-02-16 1969-04-08 Gen Electric Power supply for reducing arcing damage in glow discharge apparatus
US3702962A (en) * 1971-01-07 1972-11-14 Bosch Gmbh Robert Ac to dc rectifier circuit with rapid turn-off in case of overcurrent through the load circuit
CH561285A5 (xx) * 1973-02-19 1975-04-30 Berghaus Bernhard Elektrophysi
US3867669A (en) * 1974-01-11 1975-02-18 Yakov Lvovich Krasik Power source with a sparkproof output
DE2606395C3 (de) * 1976-02-18 1979-01-18 Ionit Anstalt Bernhard Berghaus, Vaduz Verfahren und Vorrichtung zur Überwachung des elektrischen Verhaltens einer stromstarken Glimmentladung
JPS5537769A (en) * 1978-09-09 1980-03-15 Tokyo Shibaura Electric Co High voltage dc breaker
US4331856A (en) * 1978-10-06 1982-05-25 Wellman Thermal Systems Corporation Control system and method of controlling ion nitriding apparatus
US4476373A (en) * 1978-10-06 1984-10-09 Wellman Thermal Systems Corporation Control system and method of controlling ion nitriding apparatus
FR2476143A1 (fr) * 1980-02-20 1981-08-21 Fours Indls Cie Procede de traitement thermochimique de pieces par bombardement ionique et dispositif pour la mise en oeuvre du procede
DE3010099A1 (de) * 1980-02-25 1981-09-03 BBC AG Brown, Boveri & Cie., Baden, Aargau Elektronische schutzschaltung
US4459629A (en) * 1981-11-23 1984-07-10 General Electric Company Electric circuit breaker utilizing semiconductor diodes for facilitating interruption
DE3330702A1 (de) * 1983-08-25 1985-03-07 Vsesojuznyj naučno-issledovatel'skij, proektno-konstruktorskij i technologičeskij institut elektrotermiČeskogo oborudovanija, Moskva Verfahren zur chemisch-thermischen behandlung von erzeugnissen mit hilfe einer glimmentladung und anlage zu deren durchfuehrung
IL71530A (en) * 1984-04-12 1987-09-16 Univ Ramot Method and apparatus for surface-treating workpieces
US4733137A (en) * 1986-03-14 1988-03-22 Walker Magnetics Group, Inc. Ion nitriding power supply
US4825029A (en) * 1987-06-02 1989-04-25 Wickes Companies, Inc. Spark erosion system for reducing the height of a honeycomb seal
US4853046A (en) * 1987-09-04 1989-08-01 Surface Combustion, Inc. Ion carburizing

Also Published As

Publication number Publication date
AU645792B2 (en) 1994-01-27
DK0521017T3 (da) 1996-01-22
WO1991015027A1 (en) 1991-10-03
ES2080301T3 (es) 1996-02-01
KR100204450B1 (ko) 1999-06-15
US5241152A (en) 1993-08-31
JPH05506327A (ja) 1993-09-16
CA2077902C (en) 2000-05-02
AU7465891A (en) 1991-10-21
JP3073011B2 (ja) 2000-08-07
EP0521017A1 (en) 1993-01-07
KR930700966A (ko) 1993-03-16
DE69112820T2 (de) 1996-05-30
CA2077902A1 (en) 1991-09-24
EP0521017B1 (en) 1995-09-06
ATE127614T1 (de) 1995-09-15
DE69112820D1 (de) 1995-10-12

Similar Documents

Publication Publication Date Title
ZA912203B (en) Arc diverter
UA42021C2 (uk) Силовий вимикач
DE69209966D1 (de) Hybridschalter mit Axialblasspule
UA42020C2 (uk) Силовий вимикач
DE59803205D1 (de) Hochspannungs-leistungsschalter mit zwei entgegengesetzt antreibbaren lichtbogenkontaktstücken
SE9704685L (sv) Kopplingsanordning och -förfarande
GB2176069B (en) A switch for protection against fault currents
ATE120607T1 (de) Plasmabrenner mit kurzschlusslichtbogenzündung.
EP0892415A3 (en) Electric current switching apparatus with arc spinning extinguisher
YU191580A (en) Multiple high voltage interrupter under load
WO1999012176A3 (de) Hochspannungsleistungsschalter mit antreibbarem gegenkontaktstück
TW365012B (en) Leak circuit breaker
ATE41263T1 (de) Gegen kurzschlussstroeme geschuetztes schaltgeraet.
ES2097626T3 (es) Disyuntor electrico de repulsion electrodinamica de los contactos y con camaras de corte doble.
DE69107670D1 (de) Hochspannungsschalter mit Hilfslichtbogen in Reihe.
EP0095038A3 (en) Current limiting circuit-breaker having an improved contact arrangement
MX9503935A (es) Carril guia de transferencia de cuchilla y blindaje de arco para un disyuntor de circuito de doble ruptura.
ATA65698A (de) Fehlerstromschutzschalter
SU1023422A1 (ru) Устройство дл отключени индуктивной цепи посто нного тока
JPS554064A (en) Power source circuit for flash device
AU554565B2 (en) Limiting the breaking currents of circuit breakers
JPS57194509A (en) On-load tap changer
ES2044973T3 (es) Disyuntor bipolar para una instalacion electrica del ambito civil, que comprende un dispositivo de conmutacion del arco.
EP0466977A3 (en) Switching device for switching of high loads
JPS56149602A (en) Controller of electric machinery