ATE108549T1 - Druckmessumformer mit einem rotationssymmetrischen drucksensor aus keramik. - Google Patents

Druckmessumformer mit einem rotationssymmetrischen drucksensor aus keramik.

Info

Publication number
ATE108549T1
ATE108549T1 AT91108647T AT91108647T ATE108549T1 AT E108549 T1 ATE108549 T1 AT E108549T1 AT 91108647 T AT91108647 T AT 91108647T AT 91108647 T AT91108647 T AT 91108647T AT E108549 T1 ATE108549 T1 AT E108549T1
Authority
AT
Austria
Prior art keywords
pressure sensor
diaphragm
ceramic
designed
face
Prior art date
Application number
AT91108647T
Other languages
German (de)
English (en)
Inventor
Horst Obermeier
Emrullah Altiok
Original Assignee
Hartmann & Braun Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hartmann & Braun Ag filed Critical Hartmann & Braun Ag
Application granted granted Critical
Publication of ATE108549T1 publication Critical patent/ATE108549T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
AT91108647T 1990-06-11 1991-05-28 Druckmessumformer mit einem rotationssymmetrischen drucksensor aus keramik. ATE108549T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4018638A DE4018638A1 (de) 1990-06-11 1990-06-11 Druckmessumformer mit einem rotationssymmetrischen drucksensor aus keramik

Publications (1)

Publication Number Publication Date
ATE108549T1 true ATE108549T1 (de) 1994-07-15

Family

ID=6408182

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91108647T ATE108549T1 (de) 1990-06-11 1991-05-28 Druckmessumformer mit einem rotationssymmetrischen drucksensor aus keramik.

Country Status (4)

Country Link
US (1) US5174157A (enExample)
EP (1) EP0461459B1 (enExample)
AT (1) ATE108549T1 (enExample)
DE (2) DE4018638A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4234290C2 (de) * 1992-10-12 1995-06-14 Fibronix Sensoren Gmbh Drucksensor
DE4234289C1 (de) * 1992-10-12 1993-11-25 Fibronix Sensoren Gmbh Drucksensor
US5452613A (en) * 1993-10-04 1995-09-26 Granville-Phillips Company Wide range vacuum gauge
US5827972A (en) * 1993-11-02 1998-10-27 Texas Instruments Incorporated High pressure sensor apparatus with low cost compact packaging system
DE59504814D1 (de) * 1995-03-31 1999-02-25 Endress Hauser Gmbh Co Drucksensor
US5824909A (en) * 1995-08-04 1998-10-20 Ifm Electronic Gmbh Pressure measuring sensor and apparatus having a seal between a housing and a pressure measuring cell
DE19628551B4 (de) * 1995-08-04 2004-04-15 Ifm Electronic Gmbh Druckmeßgerät und Druckmeßanordnung
WO1999053286A1 (de) 1998-04-09 1999-10-21 Ploechinger Heinz Kapazitive druck- oder kraftsensorstruktur und verfahren zur herstellung derselben
DE102005011973B4 (de) * 2005-03-13 2012-04-19 Endress + Hauser Gmbh + Co. Kg Sensormodul
RU2491524C2 (ru) 2007-12-20 2013-08-27 Инфикон Гмбх Устройство с мембранным манометрическим элементом
EP2146190B1 (de) * 2008-07-15 2014-11-19 Krohne AG Ultraschallwandler
US10448922B2 (en) * 2012-12-13 2019-10-22 Volcano Corporation Rotational catheter with extended catheter body drive shaft support
DE102013213857A1 (de) 2013-04-18 2014-10-23 Ifm Electronic Gmbh Drucksensor
DE102016204511B3 (de) 2016-03-18 2017-03-30 Ifm Electronic Gmbh Druckmessgerät

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3008572C2 (de) * 1980-03-06 1982-05-27 Robert Bosch Gmbh, 7000 Stuttgart Druckmeßdose
DE3009811A1 (de) * 1980-03-14 1981-10-15 Robert Bosch Gmbh, 7000 Stuttgart Druckmessdose
US4414851A (en) * 1981-08-28 1983-11-15 Motorola, Inc. Gauge pressure sensor
DE3137219A1 (de) * 1981-09-18 1983-04-07 Robert Bosch Gmbh, 7000 Stuttgart Kapazitiver drucksensor und verfahren zu seiner herstellung
US4425799A (en) * 1982-06-03 1984-01-17 Kavlico Corporation Liquid capacitance pressure transducer technique
JPH0711461B2 (ja) * 1986-06-13 1995-02-08 株式会社日本自動車部品総合研究所 圧力検出器
US4745810A (en) * 1986-09-15 1988-05-24 Rosemount Inc. Flangeless transmitter coupling to a flange adapter union
US4771639A (en) * 1987-09-02 1988-09-20 Yokogawa Electric Corporation Semiconductor pressure sensor
DE3733766A1 (de) * 1987-10-06 1989-04-27 Murata Elektronik Gmbh Verfahren zum herstellen eines drucksensors
US4984467A (en) * 1988-03-15 1991-01-15 Pfister Gmbh Transducer for pressures and/or vibrations and method for manufacturing thereof
DE8815425U1 (de) * 1988-12-12 1990-04-12 Fibronix Sensoren GmbH, 2300 Kiel Überlastfester kapazitiver Drucksensor
DE8914010U1 (de) * 1989-11-28 1990-01-25 Schoppe & Faeser GmbH, 32425 Minden Druckmeßumformer mit einem rotationssymmetrischen Drucksensor

Also Published As

Publication number Publication date
EP0461459A1 (de) 1991-12-18
DE4018638A1 (de) 1991-12-12
DE4018638C2 (enExample) 1992-03-26
DE59102156D1 (de) 1994-08-18
US5174157A (en) 1992-12-29
EP0461459B1 (de) 1994-07-13

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee