AT521407A3 - Ausgabedüse für Beschichtungseinrichtung - Google Patents

Ausgabedüse für Beschichtungseinrichtung Download PDF

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Publication number
AT521407A3
AT521407A3 ATA50544/2019A AT505442019A AT521407A3 AT 521407 A3 AT521407 A3 AT 521407A3 AT 505442019 A AT505442019 A AT 505442019A AT 521407 A3 AT521407 A3 AT 521407A3
Authority
AT
Austria
Prior art keywords
dispensing nozzle
connection
coating device
coating material
valve seat
Prior art date
Application number
ATA50544/2019A
Other languages
English (en)
Other versions
AT521407B1 (de
AT521407A2 (de
Original Assignee
Suss Microtec Lithography Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suss Microtec Lithography Gmbh filed Critical Suss Microtec Lithography Gmbh
Publication of AT521407A2 publication Critical patent/AT521407A2/de
Publication of AT521407A3 publication Critical patent/AT521407A3/de
Application granted granted Critical
Publication of AT521407B1 publication Critical patent/AT521407B1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/30—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages
    • B05B1/3033—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages the control being effected by relative coaxial longitudinal movement of the controlling element and the spray head
    • B05B1/304—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages the control being effected by relative coaxial longitudinal movement of the controlling element and the spray head the controlling element being a lift valve
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/30—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages
    • B05B1/3033—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages the control being effected by relative coaxial longitudinal movement of the controlling element and the spray head
    • B05B1/304—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages the control being effected by relative coaxial longitudinal movement of the controlling element and the spray head the controlling element being a lift valve
    • B05B1/3046—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages the control being effected by relative coaxial longitudinal movement of the controlling element and the spray head the controlling element being a lift valve the valve element, e.g. a needle, co-operating with a valve seat located downstream of the valve element and its actuating means, generally in the proximity of the outlet orifice
    • B05B1/306—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages the control being effected by relative coaxial longitudinal movement of the controlling element and the spray head the controlling element being a lift valve the valve element, e.g. a needle, co-operating with a valve seat located downstream of the valve element and its actuating means, generally in the proximity of the outlet orifice the actuating means being a fluid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
    • B05B12/085—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to flow or pressure of liquid or other fluent material to be discharged
    • B05B12/087—Flow or presssure regulators, i.e. non-electric unitary devices comprising a sensing element, e.g. a piston or a membrane, and a controlling element, e.g. a valve
    • B05B12/088—Flow or presssure regulators, i.e. non-electric unitary devices comprising a sensing element, e.g. a piston or a membrane, and a controlling element, e.g. a valve the sensing element being a flexible member, e.g. membrane, diaphragm, bellows
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1039—Recovery of excess liquid or other fluent material; Controlling means therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
    • B05C5/0237—Fluid actuated valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B05C5/0258—Coating heads with slot-shaped outlet flow controlled, e.g. by a valve
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/027—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated
    • B05C5/0275—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated flow controlled, e.g. by a valve
    • B05C5/0279—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated flow controlled, e.g. by a valve independently, e.g. individually, flow controlled
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/36—Valve members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K23/00—Valves for preventing drip from nozzles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/28—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with integral means for shielding the discharged liquid or other fluent material, e.g. to limit area of spray; with integral means for catching drips or collecting surplus liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Coating Apparatus (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)

Abstract

Die Erfindung betrifft eine Ausgabedüse (1) zum Auftragen einer Beschichtung auf ein Substrat, mit einem Ventilsitz (16), einem Ventilelement (14), das zwischen einer geschlossenen Position, in der es mit dem Ventilsitz (16) zusammenwirkt, um eine Verbindung zwischen einem Beschichtungsmaterialeinlass (2) und einem Beschichtungsmaterialauslass (3) der Ausgabedüse (1) zu schließen, und einer offenen Position verlagert werden kann, in der diese Verbindung offen ist, und ferner mit einem Rückzugselement (24), das zwischen einer vorderen Position und einer hinteren Position verlagert werden kann, wobei das Rückzugselement (24) stromabwärts des Ventilelements (16) mit einem Ausgabekanal (18) der Ausgabedüse (1) in Strömungsverbindung steh, wobei es sich bei dem Rückzugselement (24) um eine Zwischenwand handelt, die auf einer Seite zum Ausgabekanal (18) freiliegt.
ATA50544/2019A 2018-06-21 2019-06-18 Ausgabedüse für Beschichtungseinrichtung AT521407B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL2021163A NL2021163B1 (en) 2018-06-21 2018-06-21 Dispensing nozzle for a Coater

Publications (3)

Publication Number Publication Date
AT521407A2 AT521407A2 (de) 2020-01-15
AT521407A3 true AT521407A3 (de) 2021-11-15
AT521407B1 AT521407B1 (de) 2022-07-15

Family

ID=64049640

Family Applications (1)

Application Number Title Priority Date Filing Date
ATA50544/2019A AT521407B1 (de) 2018-06-21 2019-06-18 Ausgabedüse für Beschichtungseinrichtung

Country Status (8)

Country Link
US (1) US20190388912A1 (de)
JP (1) JP2019217494A (de)
KR (1) KR20190143825A (de)
CN (1) CN110624768A (de)
AT (1) AT521407B1 (de)
DE (1) DE102019116366A1 (de)
NL (1) NL2021163B1 (de)
TW (1) TW202010572A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7541919B2 (ja) * 2017-08-29 2024-08-29 ヘンケル・アクチェンゲゼルシャフト・ウント・コムパニー・コマンディットゲゼルシャフト・アウフ・アクチェン ゼロ変位シール装置を備えた流体ディスペンサ
CN111482326B (zh) * 2020-05-12 2021-06-22 江苏高凯精密流体技术股份有限公司 喷嘴组件以及采用该喷嘴组件的点胶装置
CN111482327A (zh) * 2020-05-14 2020-08-04 苍南树蒙机械科技有限公司 一种用于点胶设备的点胶头结构
DE102020120439A1 (de) * 2020-08-03 2022-02-03 Focke & Co. (Gmbh & Co. Kg) Ventil für fließfähige Medien
CN114210520B (zh) * 2021-12-08 2023-03-14 佛山市亨力豪机械有限公司 一种淋胶机

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4516702A (en) * 1982-12-06 1985-05-14 Copar Corporation Dripless valve
EP0237190A2 (de) * 1986-02-12 1987-09-16 Sony Corporation Vorrichtung zum Auftragen eines viskosen Materials
FR2791033A1 (fr) * 1999-03-17 2000-09-22 Pierre Guillon Systeme de remplissage de recipients
US20050006609A1 (en) * 2003-07-07 2005-01-13 Smc Kabushiki Kaisha Suck back valve
US20100140289A1 (en) * 2007-01-26 2010-06-10 Haas-Mondomix B.V. Device and method for dosing foamed compounds
WO2011154220A1 (en) * 2010-06-11 2011-12-15 Weightpack S.P.A. Non drip faucet for a filling machine particularly for viscous fluid

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3478319B2 (ja) * 1996-12-03 2003-12-15 藤倉ゴム工業株式会社 ディスペンサ装置
US6334554B1 (en) * 2000-04-17 2002-01-01 Illinois Tool Works Inc. Snuffback valve for hot melt adhesive
JP4566955B2 (ja) * 2006-07-11 2010-10-20 株式会社コガネイ 薬液供給装置および薬液供給方法
CN101961701A (zh) * 2010-09-08 2011-02-02 中国科学院长春光学精密机械与物理研究所 射频电子标签封装过程中的预点胶控制装置
US9346075B2 (en) * 2011-08-26 2016-05-24 Nordson Corporation Modular jetting devices
US9799539B2 (en) * 2014-06-16 2017-10-24 Lam Research Ag Method and apparatus for liquid treatment of wafer shaped articles

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4516702A (en) * 1982-12-06 1985-05-14 Copar Corporation Dripless valve
EP0237190A2 (de) * 1986-02-12 1987-09-16 Sony Corporation Vorrichtung zum Auftragen eines viskosen Materials
FR2791033A1 (fr) * 1999-03-17 2000-09-22 Pierre Guillon Systeme de remplissage de recipients
US20050006609A1 (en) * 2003-07-07 2005-01-13 Smc Kabushiki Kaisha Suck back valve
US20100140289A1 (en) * 2007-01-26 2010-06-10 Haas-Mondomix B.V. Device and method for dosing foamed compounds
WO2011154220A1 (en) * 2010-06-11 2011-12-15 Weightpack S.P.A. Non drip faucet for a filling machine particularly for viscous fluid

Also Published As

Publication number Publication date
AT521407B1 (de) 2022-07-15
DE102019116366A1 (de) 2019-12-24
US20190388912A1 (en) 2019-12-26
AT521407A2 (de) 2020-01-15
NL2021163B1 (en) 2020-01-06
TW202010572A (zh) 2020-03-16
JP2019217494A (ja) 2019-12-26
CN110624768A (zh) 2019-12-31
KR20190143825A (ko) 2019-12-31

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