AT278187B - Hochvakuum-Elektronenstrahlofen - Google Patents

Hochvakuum-Elektronenstrahlofen

Info

Publication number
AT278187B
AT278187B AT527966A AT527966A AT278187B AT 278187 B AT278187 B AT 278187B AT 527966 A AT527966 A AT 527966A AT 527966 A AT527966 A AT 527966A AT 278187 B AT278187 B AT 278187B
Authority
AT
Austria
Prior art keywords
electron beam
high vacuum
vacuum electron
beam furnace
furnace
Prior art date
Application number
AT527966A
Other languages
English (en)
Original Assignee
Libbey Owens Ford Glass Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Libbey Owens Ford Glass Co filed Critical Libbey Owens Ford Glass Co
Application granted granted Critical
Publication of AT278187B publication Critical patent/AT278187B/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Detergent Compositions (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electron Sources, Ion Sources (AREA)
AT527966A 1965-06-11 1966-06-03 Hochvakuum-Elektronenstrahlofen AT278187B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US463190A US3394217A (en) 1965-06-11 1965-06-11 Method and apparatus for controlling plural electron beams

Publications (1)

Publication Number Publication Date
AT278187B true AT278187B (de) 1970-01-26

Family

ID=23839207

Family Applications (1)

Application Number Title Priority Date Filing Date
AT527966A AT278187B (de) 1965-06-11 1966-06-03 Hochvakuum-Elektronenstrahlofen

Country Status (11)

Country Link
US (1) US3394217A (de)
AT (1) AT278187B (de)
BE (1) BE681839A (de)
CH (1) CH452731A (de)
DE (1) DE1565881B2 (de)
DK (1) DK117649B (de)
GB (1) GB1141594A (de)
LU (1) LU51261A1 (de)
NL (1) NL6608065A (de)
NO (1) NO117547B (de)
SE (1) SE346196B (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3475542A (en) * 1967-09-13 1969-10-28 Air Reduction Apparatus for heating a target in an electron beam furnace
US3535428A (en) * 1968-07-17 1970-10-20 Air Reduction Apparatus for producing and directing an electron beam
FR2244014B1 (de) * 1973-09-17 1976-10-08 Bosch Gmbh Robert
IT1037702B (it) * 1975-04-29 1979-11-20 Varian Associates Apparecchiatura di rescaldamento e o di evaporazione a fascio elettronico
US3999097A (en) * 1975-06-30 1976-12-21 International Business Machines Corporation Ion implantation apparatus utilizing multiple aperture source plate and single aperture accel-decel system
SU782571A1 (ru) * 1976-05-12 1983-09-23 Институт ядерной физики СО АН СССР Способ радиационной обработки изделий круглого сечени
DD204947A1 (de) * 1982-04-20 1983-12-14 Manfred Neumann Einrichtung zum elektronenstrahlbedampfen breiter baender
WO1991013458A1 (en) * 1990-03-02 1991-09-05 Varian Associates, Inc. Charge neutralization apparatus for ion implantation system
US5136171A (en) * 1990-03-02 1992-08-04 Varian Associates, Inc. Charge neutralization apparatus for ion implantation system
JP3275166B2 (ja) * 1997-02-28 2002-04-15 住友重機械工業株式会社 プラズマビームの偏り修正機構を備えた真空成膜装置
US6476340B1 (en) 1999-04-14 2002-11-05 The Boc Group, Inc. Electron beam gun with grounded shield to prevent arc-down and gas bleed to protect the filament

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof
US3105275A (en) * 1960-05-27 1963-10-01 Stauffer Chemical Co Electron-beam furnace with double-coil magnetic beam guidance
FR1374335A (fr) * 1962-12-13 1964-10-09 Electronique & Physique Dispositif pour fabriquer une lame en matériau à grande pureté

Also Published As

Publication number Publication date
US3394217A (en) 1968-07-23
SE346196B (de) 1972-06-26
LU51261A1 (de) 1966-08-16
DE1565881B2 (de) 1971-01-21
CH452731A (de) 1968-03-15
GB1141594A (en) 1969-01-29
DE1565881A1 (de) 1970-03-19
NO117547B (de) 1969-08-25
DK117649B (da) 1970-05-19
NL6608065A (de) 1966-12-12
BE681839A (de) 1966-10-31

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