AT272925B - Bedampfung von Werkstoffen mit Metall - Google Patents

Bedampfung von Werkstoffen mit Metall

Info

Publication number
AT272925B
AT272925B AT751966A AT751966A AT272925B AT 272925 B AT272925 B AT 272925B AT 751966 A AT751966 A AT 751966A AT 751966 A AT751966 A AT 751966A AT 272925 B AT272925 B AT 272925B
Authority
AT
Austria
Prior art keywords
materials
vapor deposition
metal vapor
metal
deposition
Prior art date
Application number
AT751966A
Other languages
English (en)
Original Assignee
Kempten Elektroschmelz Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kempten Elektroschmelz Gmbh filed Critical Kempten Elektroschmelz Gmbh
Application granted granted Critical
Publication of AT272925B publication Critical patent/AT272925B/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/583—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on boron nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Ceramic Products (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Physical Vapour Deposition (AREA)
AT751966A 1965-08-11 1966-08-05 Bedampfung von Werkstoffen mit Metall AT272925B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1965E0029885 DE1289712C2 (de) 1965-08-11 1965-08-11 Verdampfer fuer das Vakuumaufdampfen von Metallschichten auf Werkstoffe

Publications (1)

Publication Number Publication Date
AT272925B true AT272925B (de) 1969-07-25

Family

ID=7074173

Family Applications (1)

Application Number Title Priority Date Filing Date
AT751966A AT272925B (de) 1965-08-11 1966-08-05 Bedampfung von Werkstoffen mit Metall

Country Status (9)

Country Link
US (1) US3813252A (de)
AT (1) AT272925B (de)
BE (1) BE685355A (de)
CH (1) CH477564A (de)
DE (1) DE1289712C2 (de)
ES (1) ES328790A1 (de)
GB (1) GB1160755A (de)
NL (1) NL157355B (de)
SE (1) SE310468B (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES417413A1 (es) * 1972-08-18 1976-03-01 Kempten Elektroschmelz Gmbh Perfeccionamientos introducidos en evaporadores a base de material refractario sinterizado.
JPS564509B2 (de) * 1974-08-15 1981-01-30
US4017319A (en) * 1976-01-06 1977-04-12 General Electric Company Si3 N4 formed by nitridation of sintered silicon compact containing boron
US4199480A (en) * 1978-05-25 1980-04-22 Gte Sylvania Incorporated Electrically conductive boat for vacuum evaporation of metals
US4332755A (en) 1978-06-15 1982-06-01 Kennecott Corporation Sintered silicon carbide - aluminum nitride articles and method of making such articles
US4268314A (en) * 1979-12-21 1981-05-19 Union Carbide Corporation High density refractory composites and method of making
US4373952A (en) * 1981-10-19 1983-02-15 Gte Products Corporation Intermetallic composite
DE3247985C2 (de) * 1982-12-24 1992-04-16 W.C. Heraeus Gmbh, 6450 Hanau Keramischer Träger
DE3248103C1 (de) * 1982-12-24 1987-11-12 W.C. Heraeus Gmbh, 6450 Hanau Tiegel zum Ziehen von Einkristallen
JPS59152269A (ja) * 1983-02-08 1984-08-30 九州耐火煉瓦株式会社 窒化珪素系複合耐火物
JPS60195059A (ja) * 1984-03-15 1985-10-03 株式会社トクヤマ 複合焼結体
US5045237A (en) * 1984-11-08 1991-09-03 Norton Company Refractory electrical device
US5085804A (en) * 1984-11-08 1992-02-04 Norton Company Refractory electrical device
US5324694A (en) * 1985-06-26 1994-06-28 The Babcock & Wilcox Company Silicon nitride/boron nitride composite with enhanced fracture toughness
US5627542A (en) * 1985-12-23 1997-05-06 Loral Vought Systems Corporation Method of making a radar transparent window material operable above 2000° C.
JPS62202868A (ja) * 1986-02-27 1987-09-07 電気化学工業株式会社 導電性セラミツク及びその製造法
US4847031A (en) * 1987-12-16 1989-07-11 Gte Products Corporation Evaporating boats containing titanium diboride
JP2556888B2 (ja) * 1987-12-24 1996-11-27 日立金属株式会社 電気抵抗率バラツキの少ないセラミックス導電材料
GB8926164D0 (en) * 1989-11-20 1990-01-10 Rtz Chemicals Borides Limited Process for the production of refractory composite article
US5126284A (en) * 1991-10-25 1992-06-30 Curran Patrick A Method of inductively contacting semiconductor regions
DE4138481A1 (de) * 1991-11-22 1993-05-27 Kempten Elektroschmelz Gmbh Wiederaufarbeitung von gebrauchten verdampferschiffchen
US5604164A (en) * 1995-09-06 1997-02-18 Advanced Ceramics Corporation Refractory boat and method of manufacture
DE19720927A1 (de) * 1996-05-20 1997-11-27 Hasco Normalien Hasenclever Co Werkzeugform zum Druck- oder Spritzgießen von Metallen und/oder Kunststoffen
DE10015850A1 (de) * 2000-03-30 2001-10-18 Kempten Elektroschmelz Gmbh Material für alterungsbeständige keramische Verdampfer
KR100489304B1 (ko) * 2002-12-23 2005-05-17 재단법인 포항산업과학연구원 저항가열 보트 및 그 제조방법
DE102007004635A1 (de) * 2007-01-30 2008-07-31 Sintec Keramik Gmbh 2-Schicht-Verdampferkörper und Verfahren zur Herstellung desselben
US11940466B2 (en) * 2017-10-20 2024-03-26 Ferrotec Material Technologies Corporation Ceramic, probe guiding member, probe card, and socket for package inspection

Also Published As

Publication number Publication date
DE1289712C2 (de) 1973-12-13
ES328790A1 (es) 1967-08-16
GB1160755A (en) 1969-08-06
DE1289712B (de) 1969-02-20
BE685355A (de) 1967-02-10
NL6611199A (de) 1967-02-13
CH477564A (de) 1969-08-31
US3813252A (en) 1974-05-28
SE310468B (de) 1969-04-28
NL157355B (nl) 1978-07-17

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